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    • 4. 发明申请
    • Spatial Light Modulators and Fabrication Techniques
    • 空间光调制器和制作技术
    • US20120170103A1
    • 2012-07-05
    • US12983199
    • 2010-12-31
    • Pavan GuptaGabriel MatusVlad Novotny
    • Pavan GuptaGabriel MatusVlad Novotny
    • G02B26/00B32B38/04
    • G02B26/0841Y10T156/1052
    • We describe a method of fabricating an optical MEMS spatial light modulator (SLM). The method comprises providing an optical MEMS SLM wafer bearing multiple optical MEMS SLM devices and spin coating a glass wafer with an organic adhesive, in some preferred embodiments benzocyclobutene. The adhesive is patterned, preferably by uv lithography, to define multiple ring-shaped bond lines each sized to fit around one of the SLM devices, and the glass wafer is then bonded to the MEMS SLM wafer, preferably at a temperature of between 100° C. and 450° C., such that each of the ring-shaped bond lines encompasses a respective SLM device. A portion of the glass wafer adjacent an SLM device is then removed to reveal electrical connectors to the device and the devices are tested before dicing and packaging, to enable selective packaging of working devices.
    • 我们描述了一种制造光学MEMS空间光调制器(SLM)的方法。 该方法包括提供具有多个光学MEMS SLM器件的光学MEMS SLM晶片,并且在一些优选实施方案中,使用有机粘合剂旋转涂覆玻璃晶片,苯并环丁烯。 将粘合剂图案化,优选通过紫外光刻法来限定多个环形接合线,每个环形接合线的尺寸适合于围绕一个SLM器件,并且然后将玻璃晶片接合到MEMS SLM晶片,优选地在100°的温度 C.和450℃,使得每个环形接合线包括相应的SLM装置。 然后移除与SLM装置相邻的玻璃晶片的一部分以露出与装置的电连接器,并且在切割和包装之前对装置进行测试,以便能够选择性地包装工作装置。
    • 6. 发明申请
    • Corrosion Protection and Lubrication of MEMS Devices
    • MEMS器件的腐蚀保护和润滑
    • US20100291410A1
    • 2010-11-18
    • US12465573
    • 2009-05-13
    • Vlad NovotnyGabriel Matus
    • Vlad NovotnyGabriel Matus
    • B32B9/00B05D5/12
    • G02B26/0841B81B3/0075B81B2201/047
    • Systems and methods, such as for a MEMS device, can include a component having a contact portion that includes on one side a layer including hydrophilic functional groups and a coating formed on the layer. The coating can include hydrophilic functional groups adapted to interact with the hydrophilic functional groups of the layer. The coating can also include hydrophobic functional groups opposite the hydrophilic functional groups of the coating. The layer can be bonded to the component, and the coating can be bonded to the layer. The coating can be adapted to be formed on the layer while in vapor form and can include a lubricant. The layer can be an atomic monolayer or multilayer, such as of aluminum oxide, and the coating can include a fluorinated acid, such as perfluorodecanoic acid.
    • 诸如用于MEMS器件的系统和方法可以包括具有接触部分的部件,该部分在一侧包括包含亲水性官能团的层和形成在该层上的涂层。 涂层可以包括适于与层的亲水性官能团相互作用的亲水性官能团。 涂层还可以包括与涂层的亲水性官能团相对的疏水官能团。 该层可以结合到组分上,并且涂层可以结合到该层。 涂层可以适于在蒸气形式的层上形成并且可以包括润滑剂。 该层可以是原子单层或多层,例如氧化铝,并且涂层可以包括氟化酸,例如全氟癸酸。
    • 10. 发明授权
    • Personal wellness monitoring system
    • US10249214B1
    • 2019-04-02
    • US14741695
    • 2015-06-17
    • Vlad NovotnyMichelle Novotny
    • Vlad NovotnyMichelle Novotny
    • G09B19/00
    • A complete personal nutrition, health, wellness and fitness monitor is disclosed that captures, monitors, and tracks many relevant health and wellness factors. Image of all consumed items is captured with a three dimensional reference object, matched to reference images in a database in terms of shape, color, size and texture, identified, and the volume of the respective items is determined. In addition, molecular optical fingerprinting of consumable products provides information about actual food composition, including vitamins and contaminants that affect food safety. Using energy and nutrition information of items in another database, full nutritional content and energy is evaluated for all of the items in the image. Combined with activity monitoring that captures energy output, the monitor actively tracks overall energy balance and nutritional content for every consumable item in real time, and makes proactive recommendations with respect to nutrition, exercise, and general lifestyle for overall nutrition, health, wellness, and fitness.