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1. 发明申请

US20050280829A1 Film thickness and boundary characterization by interferometric profilometry 有权
标题翻译：薄膜厚度和通过干涉测量轮廓测定的边界表征
公开(公告)号：US20050280829A1
公开(公告)日：2005-12-22
申请号：US10869138
申请日：2004-06-16
申请人： Paul Unruh , Joanna Schmit , Erik Novak
发明人： Paul Unruh , Joanna Schmit , Erik Novak
IPC分类号： G01B11/02 , G01B11/06
CPC分类号： G01B11/0675
摘要： Two threshold parameters are used to identify the intensity modulation peaks corresponding to the interfaces of the two sides of a thin film with the adjacent media. The first parameter is used to distinguish modulation data from noise and is set on the basis of actual background noise data measured during the interferometric scan. The second parameter is used to separate actual contrast data from signals of relatively high modulation that satisfy the first parameter but do not in fact result from interference fringes. Data that satisfy both parameters are considered valid modulation data and the peak of each modulation envelope is then calculated using conventional means. The thickness of the film at each pixel is obtained by dividing the scanning distance corresponding to the two peaks by the group index of refraction of the film material.
摘要翻译：使用两个阈值参数来识别与相邻介质的薄膜的两侧的界面相对应的强度调制峰值。第一个参数用于区分调制数据和噪声，并根据干涉扫描期间测量的实际背景噪声数据设置。第二个参数用于将实际的对比度数据与满足第一个参数的相对较高的调制信号进行分离，但实际上并不是由干扰条纹引起的。满足这两个参数的数据被认为是有效的调制数据，然后使用常规方法计算每个调制包络的峰值。通过将对应于两个峰的扫描距离除以膜材料的折射率折射率来获得每个像素处的膜的厚度。

2. 发明申请

US20050157306A1 Measurement of object deformation with optical profiler 有权
标题翻译：用光学轮廓仪测量物体变形
公开(公告)号：US20050157306A1
公开(公告)日：2005-07-21
申请号：US10759686
申请日：2004-01-16
申请人： Joanna Schmit , Paul Unruh , Erik Novak
发明人： Joanna Schmit , Paul Unruh , Erik Novak
IPC分类号： G01B11/16 , G01B9/02
CPC分类号： G01B11/161
摘要： An interferometric profiler is used to measure object motion by modifying the motion of the scanner so that the phase variation at each scanning step is kept within the acceptable limits of the algorithm used to calculate phase changes. The scanner motion is so manipulated on the basis of prior knowledge about the nature of the object motion, or knowledge obtained by pre-calibration, or by real-time feedback based on current measurements. The object motion is recovered from the scanning information by subtracting the scanner position from the object position as it evolves during the scan.
摘要翻译：干涉测量分析器用于通过修改扫描仪的运动来测量物体运动，使得每个扫描步骤的相位变化保持在用于计算相位变化的算法的可接受限度内。基于关于物体运动的性质或通过预校准获得的知识的现有知识或基于当前测量的实时反馈，扫描器运动被如此操纵。通过在扫描期间从对象位置减去扫描仪位置，从扫描信息中恢复物体运动。

3. 发明授权

US08953171B1 Signal sectioning for profiling printed-circuit-board vias with vertical scanning interferometry 有权
标题翻译：用垂直扫描干涉测量法对印刷电路板通孔进行分析的信号分段
公开(公告)号：US08953171B1
公开(公告)日：2015-02-10
申请号：US13719101
申请日：2012-12-18
申请人： Joanna Schmit , Erik Novak
发明人： Joanna Schmit , Erik Novak
IPC分类号： G01B11/02 , G01B11/22 , G01B9/02
CPC分类号： G01N21/954 , G01B2210/56 , G01N2021/95653 , H05K3/0032
摘要： The bottom surface of a via drilled in a fiber-reinforced PCB is profiled interferometrically with acceptable precision using an objective with sufficiently large numerical aperture to illuminate the bottom under the fibers. The light scattering produced by the inherent roughness of the surface of the via bottom causes diffused light to return to the objective and yield reliable data fringes. Under such appropriate numerical-aperture and surface roughness conditions, the bottom surface of vias can be profiled correctly simply by segmenting the correlograms produced by the scan and processing all fringes that correspond to the bottom surface elevation.
摘要翻译：通过在纤维增强的PCB中钻出的通孔的底表面以可接受的精度进行成像干涉，使用具有足够大的数值孔径的物镜照射纤维下方的底部。由通孔底表面的固有粗糙度产生的光散射导致扩散光返回到目标并产生可靠的数据条纹。在这种适当的数值孔径和表面粗糙度条件下，可以简单地通过分割由扫描产生的相关图并处理与底面高程相对应的所有条纹来正确地形成通孔的底面。

4. 发明授权

US07808652B2 Interferometric measurement of DLC layer on magnetic head 有权
标题翻译：磁头DLC层的干涉测量
公开(公告)号：US07808652B2
公开(公告)日：2010-10-05
申请号：US12009424
申请日：2008-01-18
申请人： Florin Munteanu , Dong Chen , Erik Novak , G. Lawrence Best
发明人： Florin Munteanu , Dong Chen , Erik Novak , G. Lawrence Best
IPC分类号： G01B9/02
CPC分类号： G01B11/0675 , G01B11/0625
摘要： An explicit relationship is developed between the ratio of average interferometric modulation produced by diamond-like carbon (DLC)-coated magnetic-head surfaces and the thickness of the DLC layer. Accordingly, the thickness of the DLC layer is calculated in various manners from modulation data acquired for the system using object surfaces of known optical parameters.
摘要翻译：在由类金刚石碳（DLC）涂覆的磁头表面产生的平均干涉调制比与DLC层的厚度之间形成明确的关系。因此，从使用已知光学参数的物体表面的系统获取的调制数据，以各种方式计算DLC层的厚度。

5. 发明申请

US20060001954A1 Crystal detection with scattered-light illumination and autofocus 审中-公开
标题翻译：水晶检测采用散射光照射和自动对焦
公开(公告)号：US20060001954A1
公开(公告)日：2006-01-05
申请号：US10880670
申请日：2004-06-30
申请人： Michael Wahl , Erik Novak
发明人： Michael Wahl , Erik Novak
IPC分类号： G02B21/00
CPC分类号： G02B21/086 , G02B21/241 , G02B26/00
摘要： A scatter shutter is used to alternately provide non-scattered illumination for autofocus purposes and diffuse illumination for imaging purposes in a microscope system for high-throughput testing of protein samples in a multi-well tray. As the tray is being scanned continuously through the microscope objective for data acquisition, the scatter shutter is intermittently deactivated to allow collimated light to focus on the underside of the tray and produce autofocus signals, and then activated to produce diffused light and to image the protein sample in each well. The timing of each step is synchronized so as to place the droplet in focus prior to energizing the scatter shutter and switching to the imaging mode.
摘要翻译：散射快门用于在显微镜系统中交替地提供用于自动聚焦目的的非散射照明和用于成像目的的漫射照明，用于在多孔盘中进行蛋白质样品的高通量测试。随着托盘被连续扫描通过显微镜物镜进行数据采集，散射快门被间歇地停用，以允许准直的光聚焦在托盘的下侧并产生自动聚焦信号，然后被激活以产生扩散的光并使蛋白成像样品在每个井。每个步骤的时序被同步，以便在激发散射快门并切换到成像模式之前将液滴放在焦点上。

6. 发明授权

US09746316B1 High-resolution in-line metrology for roll-to-roll processing operations 有权
公开(公告)号：US09746316B1
公开(公告)日：2017-08-29
申请号：US15049080
申请日：2016-02-21
申请人： Brad Kimbrough , Erik Novak
发明人： Brad Kimbrough , Erik Novak
IPC分类号： G01B11/02 , G01B11/24
CPC分类号： G01B11/2441 , G01N21/8901
摘要： A substrate is tested with an interferometer in-line in a roll-to-roll processing operation to detect defects and exclude them from further processing. A tilt is introduced in the illumination path of the interferometer to allow detection of best fringes in a selected measurement field of view (FOV) that is smaller than the camera FOV in the direction transverse to the fringes. At each acquisition frame, the measurement FOV is shifted to track the best-fringe position within the camera field of view based on irradiance acquired at the previous step. As a result, the system is able to accommodate substrate flutter and roller runout and maintain focus on the substrate that allows precise identification of defects and their isolation for subsequent processing.

7. 发明申请

US20120257216A1 INTERFEROMETRIC MEASUREMENT OF NON-HOMOGENEOUS MULTI-MATERIAL SURFACES 有权
标题翻译：非同质多材料表面的非线性测量
公开(公告)号：US20120257216A1
公开(公告)日：2012-10-11
申请号：US13528793
申请日：2012-06-20
申请人： DONG CHEN , Florin Munteanu , Erik Novak , G. Lawrence Best
发明人： DONG CHEN , Florin Munteanu , Erik Novak , G. Lawrence Best
IPC分类号： G01B11/24
CPC分类号： G01B9/02083 , G01B9/02072 , G01B11/0608
摘要： Correction factors for the ALR and PTR parameters of magnetic-head sliders are determined by calculating an effective reflectivity and a corresponding PCOR at each pixel of the air-bearing surface. The absolute value of reflectivity at each pixel of the AlTiC air-bearing surface is obtained from an empirical equation relating it to modulation. The ratio of Al2O3 and TiC in the AlTiC surface is then calculated at every pixel assuming a linear relationship between the absolute value of AlTiC reflectivity and the theoretical reflectivity of each constituent. The linear relationship is then also used to calculate the effective (complex) reflectivity for the AlTiC material from the relative concentrations of Al2O3 and TiC at each pixel.
摘要翻译：通过计算空气轴承表面的每个像素处的有效反射率和相应的PCOR来确定磁头滑块的ALR和PTR参数的校正因子。 AlTiC空气轴承表面的每个像素处的反射率的绝对值是从与调制相关的经验方程式获得的。然后在每个像素处计算AlTiC表面中Al2O3和TiC的比例，假设AlTiC反射率的绝对值和每个组分的理论反射率之间呈线性关系。然后，线性关系也用于从每个像素的Al2O3和TiC的相对浓度计算AlTiC材料的有效（复杂）反射率。

8. 发明申请

US20060119862A1 Profilometry through dispersive medium using collimated light with compensating optics 有权
标题翻译：通过使用补偿光学的准直光的色散介质进行轮廓测量
公开(公告)号：US20060119862A1
公开(公告)日：2006-06-08
申请号：US11003538
申请日：2004-12-03
申请人： Sen Han , Erik Novak
发明人： Sen Han , Erik Novak
IPC分类号： G01B11/02
CPC分类号： G01B11/2441
摘要： A collimated light is used in combination with a compensation element and an aberration-corrected objective with a long working distance to produce a greatly improved fringe contrast in the measurement of a sample surface through a dispersive element. When the dispersive element consists of a fixed cover with substantially consistent characteristics from sample to sample, the compensation element is a plate that matches the optical characteristics of the dispersive element. When the dispersive element varies, the compensation element consists of a variable-thickness transmissive element embodied in a pair of half-cube prisms is adapted to slide along the beam-splitting plane, thereby permitting the adjustment of the optical path-length through the splitter in the reference-beam direction while retaining unchanged the optical path-length in the test-beam direction.
摘要翻译：准直光与补偿元件和具有长工作距离的像差校正物镜组合使用，以通过色散元件测量样品表面而产生极大改善的条纹对比度。当分散元件由具有从样品到样品的基本一致特性的固定盖组成时，补偿元件是与分散元件的光学特性相匹配的板。当分散元件变化时，补偿元件由一对半透镜棱镜中实施的可变厚度透射元件组成，其适于沿着分束平面滑动，从而允许通过分离器调节光程长度在参考光束方向上，同时保持测试光束方向上的光程长度不变。

9. 发明授权

US08482741B2 Interferometric measurement of non-homogeneous multi-material surfaces 有权
公开(公告)号：US08482741B2
公开(公告)日：2013-07-09
申请号：US13528793
申请日：2012-06-20
申请人： Dong Chen , Florin Munteanu , Erik Novak , G. Lawrence Best
发明人： Dong Chen , Florin Munteanu , Erik Novak , G. Lawrence Best
IPC分类号： G01B11/02
CPC分类号： G01B9/02083 , G01B9/02072 , G01B11/0608
摘要： Correction factors for the ALR and PTR parameters of magnetic-head sliders are determined by calculating an effective reflectivity and a corresponding PCOR at each pixel of the air-bearing surface. The absolute value of reflectivity at each pixel of the AlTiC air-bearing surface is obtained from an empirical equation relating it to modulation. The ratio of Al2O3 and TiC in the AlTiC surface is then calculated at every pixel assuming a linear relationship between the absolute value of AlTiC reflectivity and the theoretical reflectivity of each constituent. The linear relationship is then also used to calculate the effective (complex) reflectivity for the AlTiC material from the relative concentrations of Al2O3 and TiC at each pixel.

10. 发明授权

US09234814B1 Automated re-focusing of interferometric reference mirror 有权
标题翻译：干涉式参考镜自动重新聚焦
公开(公告)号：US09234814B1
公开(公告)日：2016-01-12
申请号：US13925708
申请日：2013-06-24
申请人： Erik Novak , Colin Farrell , Bryan Guenther
发明人： Erik Novak , Colin Farrell , Bryan Guenther
IPC分类号： G01B9/02 , G01M11/02
CPC分类号： G01B9/02063 , G01B9/02067 , G01B9/02072 , G01M11/02
摘要： A reference surface is used to develop an empirical plot between a parameter of interest, such as roughness or modulation, and the position of the reference mirror in an interferometer by repeating measurements of the reference surface at different positions of the reference mirror so as to identify the in-focus position of the reference mirror. Serial quality-control measurements of samples of interest are carried out with the reference mirror in such in-focus position until a predetermined quality-control event triggers an automated system re-calibration by re-measuring the reference surface and, if the result does not correspond to the in-focus position of the reference mirror according to the plot, by finding a new in-focus position for the reference mirror using the same plot or, alternatively, a new similarly produced plot. Sample measurements are then resumed with the mirror placed at that new position.
摘要翻译：参考表面用于通过重复在参考镜的不同位置处的参考表面的测量来形成感兴趣参数（例如粗糙度或调制）与参考镜在干涉仪中的位置之间的经验图，以便识别参考镜的对焦位置。所关注的样本的串行质量控制测量使用参考反射镜在这样的对焦位置进行，直到预定的质量控制事件通过重新测量参考表面触发自动系统重新校准，并且如果结果不对应于根据绘图的参考镜的对焦位置，通过使用相同的曲线找到用于参考镜的新的对焦位置，或者替代地，新的类似产生的图。然后用放置在该新位置的反射镜恢复样品测量。

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