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    • 5. 发明授权
    • Microelectronic structure having an array of diamond structures on a
nondiamond substrate and associated fabrication methods
    • 微电子结构在非金刚石衬底上具有金刚石结构阵列,并且具有相关的制造方法
    • US5420443A
    • 1995-05-30
    • US35643
    • 1993-03-23
    • David L. DreifusBrian R. StonerJeffrey T. Glass
    • David L. DreifusBrian R. StonerJeffrey T. Glass
    • C30B29/04C23C16/02C23C16/26C23C16/27C23C16/458C23C16/50C23C16/511C30B25/10H01L21/205H01L21/338
    • C23C16/274C23C16/02C23C16/4581C30B25/105
    • A microelectronic structure including a plurality of spaced apart diamond structures on which a plurality of semiconductor devices may be formed. The semiconductor devices include a semiconducting diamond layer on each of the diamond structures. The diamond structures are preferably oriented relative to a single crystal nondiamond substrate so that the diamond structures have a (100)-oriented outer face for forming the semiconductor devices thereon. The microelectronic structure may be diced into discrete devices, or the devices interconnected, such as to form a higher powered device. One embodiment of the microelectronic structure includes the plurality of diamond structures, wherein each diamond structure is formed of a highly oriented textured diamond layer approaching single crystal quality, yet capable of fabrication on a single crystal nondiamond substrate. A method for fabricating the nondiamond highly oriented textured diamond layer includes carburizing a face of the nondiamond substrate, nucleating the carburized face by electrical bias enhanced nucleation, and selectively growing diamond favoring growth of the (100)-oriented grains.
    • 一种微电子结构,包括多个间隔开的金刚石结构,其上可以形成多个半导体器件。 半导体器件包括在每个金刚石结构上的半导体金刚石层。 金刚石结构优选相对于单晶非金刚石基底定向,使得金刚石结构具有用于在其上形成半导体器件的(100)取向的外表面。 微电子结构可以被切割成分立的设备,或者互连的设备,以形成更高功率的设备。 微电子结构的一个实施例包括多个金刚石结构,其中每个金刚石结构由接近单晶质量的高取向纹理金刚石层形成,但能够在单晶非金刚石基底上制造。 用于制造非金刚石高取向纹理金刚石层的方法包括使非金刚石基底的表面渗碳,通过电偏压增强的成核使渗碳表面成核,以及选择性地生长有利于(100)取向晶粒生长的金刚石。
    • 6. 发明授权
    • Nucleation enhancement for chemical vapor deposition of diamond
    • 金刚石化学气相沉积的成核增强
    • US5397428A
    • 1995-03-14
    • US937481
    • 1992-08-28
    • Brian R. StonerJeffrey T. GlassWilliam M. HookeBradley E. Williams
    • Brian R. StonerJeffrey T. GlassWilliam M. HookeBradley E. Williams
    • C30B29/04C23C16/02C23C16/26C23C16/27C23C16/458C23C16/50C23C16/511C30B25/10C30B29/00
    • C23C16/274C23C16/02C23C16/4581C30B25/105
    • A method and apparatus for enhancing the nucleation of diamond by pretreating a substrate by electrically biasing a diamond film adjacent the substrate while exposing the substrate and the thus biased diamond film to a carbon-containing plasma. The bias pretreatment may be maintained for a time period in the range of about 1 hour to 2 hours to achieve a high diamond nucleation density. Alternatively, the biasing may be continued until diamond film formation is indicated by a change in reflectivity of the surface of the substrate. The biasing pretreating may be used to nucleate diamond heteroepitaxially on a substrate having a surface film formed of a material having a relatively close lattice match to diamond, such as .beta.-silicon carbide. The apparatus includes a laser reflection interferometer to monitor the surface of the substrate. The laser reflection interferometer is used to monitor growth of the diamond film and cooperates with a controller to control the processing parameters during the diamond growing process.
    • 一种用于通过在将衬底和由此偏置的金刚石膜暴露于含碳等离子体的同时电气偏置邻近衬底的金刚石膜来预处理衬底来增强金刚石成核的方法和装置。 偏置预处理可以在约1小时至2小时的范围内保持一段时间,以获得高的金刚石成核密度。 或者,可以继续施加偏压,直到金刚石膜形成由衬底的表面的反射率的变化来表示。 偏置预处理可用于使具有异质外延的金刚石成核,该基体具有由具有与金刚石相似的晶格匹配的材料形成的表面膜,例如β-碳化硅。 该装置包括用于监测基板表面的激光反射干涉仪。 激光反射干涉仪用于监测金刚石膜的生长,并与控制器配合以控制金刚石生长过程中的加工参数。
    • 10. 发明授权
    • Highly-oriented diamond film field-effect transistor
    • 高取向金刚石膜场效应晶体管
    • US5491348A
    • 1996-02-13
    • US313986
    • 1994-09-28
    • Hisasi KoyamaoKoichi MiyataKimitsugu SaitoDavid L. DreifusBrian R. Stoner
    • Hisasi KoyamaoKoichi MiyataKimitsugu SaitoDavid L. DreifusBrian R. Stoner
    • H01L21/314H01L21/338H01L29/04H01L29/16H01L29/812
    • H01L29/1602H01L29/045H01L29/812
    • A source electrode is formed on the first semiconducting diamond film and a drain electrode is formed on the second semiconducting diamond film. A highly resistant diamond film having a thickness of between 10 .ANG. and 1 mm and an electrical resistance of at least 10.sup.2 .OMEGA..cm or more is placed between the first and second semiconducting diamond films. A gate electrode is formed on the highly resistant diamond film. Thereby, a channel region is formed by these first and second semiconducting diamond films as well as the highly resistant diamond film. All or at least a part of said first and second semiconducting diamond films and the highly resistant diamond film are made of highly-oriented diamond films where either (100) or (111) crystal planes of diamond cover at least 80% of the film surface, and the differences {.DELTA..alpha., .DELTA..beta., .DELTA..gamma.} of Euler angles {.alpha., .beta., .gamma.} which represent the crystal plane orientation, satisfy .vertline..DELTA..alpha..vertline.
    • 在第一半导体金刚石膜上形成源电极,在第二半导体金刚石膜上形成漏电极。 在第一和第二半导体金刚石膜之间放置厚度在10埃至1毫米至10欧姆或更大的电阻之间的高度耐磨的金刚石薄膜。 在耐高压金刚石膜上形成栅电极。 因此,通过这些第一和第二半导体金刚石膜以及高度耐磨的金刚石膜形成沟道区。 所述第一和第二半导体金刚石膜的全部或至少一部分和高度耐金刚石膜由高取向金刚石膜制成,金刚石的(100)或(111)晶面覆盖至少80%的膜表面 ,并且表示晶面取向的欧拉角{α,β,γ}的差异{DELTAα,DELTAβ,DELTAγ}满足| DELTAα| <10°,| DELTA beta | <10°,| DELTA gamma | <10°,同时在相邻的晶面之间。