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    • 2. 发明申请
    • MULTI-NOZZLE ORGANIC VAPOR JET PRINTING
    • 多喷嘴有机蒸汽喷射印刷
    • US20140057390A1
    • 2014-02-27
    • US13595160
    • 2012-08-27
    • Siddharth Harikrishna MohanPaul E. Burrows
    • Siddharth Harikrishna MohanPaul E. Burrows
    • C23C16/455H01L51/56H01L51/48
    • H01L51/0003C23C14/04C23C14/12C23C14/228H01L51/0005H01L51/56
    • Systems and methods are provided in which individual elements of a thin patterned film are deposited by two or more nozzles having different geometries. The different nozzle geometries may include one or more of different throttle diameters, different exhaust diameters, different cross-sectional shapes, different bore angles, different wall angles, different exhaust distances from the substrate, and different leading edges relative to the direction of movement of the nozzles or the substrate. Methods may include steps of ejecting a carrier gas and a material from a plurality of nozzles and depositing the material on the substrate in a plurality of laterally spaced elements, each of the elements deposited by a separate nozzle group. At least one of the nozzles in a group of nozzles depositing an element may be configured to deposit the material on the substrate in a width that is smaller than the width of the element.
    • 提供了系统和方法,其中通过具有不同几何形状的两个或更多个喷嘴沉积薄图案化膜的各个元件。 不同的喷嘴几何形状可以包括一个或多个不同的节流直径,不同的排气直径,不同的横截面形状,不同的孔角度,不同的壁角度,与基板的不同排气距离以及相对于运动方向的不同前缘 喷嘴或基板。 方法可以包括以下步骤:从多个喷嘴喷射载体气体和材料,并将材料沉积在多个横向间隔开的元件的基板上,每个元件由单独的喷嘴组沉积。 沉积元件的一组喷嘴中的至少一个喷嘴可以被配置为以小于元件宽度的宽度将材料沉积在基板上。
    • 6. 发明申请
    • ORGANIC VAPOR JET PRINTING WITH CHILLER PLATE
    • 有机蒸汽喷射机用冷冻板打印
    • US20110097495A1
    • 2011-04-28
    • US12870125
    • 2010-08-27
    • Paul E. BurrowsSiddharth Harikrishna Mohan
    • Paul E. BurrowsSiddharth Harikrishna Mohan
    • C23C16/458B05B7/00C23C16/00
    • C23C14/12C23C14/228C23C14/564
    • A device is provided. The device includes a nozzle, a source of carrier gas and a source of organic molecules in fluid communication with the nozzle. The device also includes an active cooling system disposed adjacent to the nozzle. Preferably, the device also includes a chamber, wherein the nozzle, and the active cooling system are disposed within the chamber. A substrate holder may also be disposed within the chamber, adapted to support a substrate beneath the nozzle, movable relative to the nozzle. Preferably, a substrate is held by the substrate holder, the substrate disposed at a distance of 0.1 to 10 mm from the active cooling system. Preferably, the device also includes a heating system attached to the nozzle. The points at which the heating system are attached to the nozzle preferably includes at least one point that is zero to 5 mm from the tip of the nozzle.
    • 提供了一种设备。 该装置包括喷嘴,载气源和与喷嘴流体连通的有机分子源。 该装置还包括邻近喷嘴设置的主动冷却系统。 优选地,该装置还包括腔室,其中喷嘴和主动冷却系统设置在腔室内。 衬底保持器还可以设置在腔室内,适于支撑喷嘴下方的衬底,其可相对于喷嘴移动。 优选地,基板被基板保持器保持,基板设置在距主动冷却系统0.1至10mm的距离处。 优选地,该装置还包括附接到喷嘴的加热系统。 加热系统附接到喷嘴的点优选地包括距喷嘴的尖端为零至5mm的至少一个点。
    • 8. 发明授权
    • Multi-nozzle organic vapor jet printing
    • 多喷嘴有机蒸气喷射印刷
    • US08728858B2
    • 2014-05-20
    • US13595160
    • 2012-08-27
    • Siddharth Harikrishna MohanPaul E. Burrows
    • Siddharth Harikrishna MohanPaul E. Burrows
    • H01L51/40
    • H01L51/0003C23C14/04C23C14/12C23C14/228H01L51/0005H01L51/56
    • Systems and methods are provided in which individual elements of a thin patterned film are deposited by two or more nozzles having different geometries. The different nozzle geometries may include one or more of different throttle diameters, different exhaust diameters, different cross-sectional shapes, different bore angles, different wall angles, different exhaust distances from the substrate, and different leading edges relative to the direction of movement of the nozzles or the substrate. Methods may include steps of ejecting a carrier gas and a material from a plurality of nozzles and depositing the material on the substrate in a plurality of laterally spaced elements, each of the elements deposited by a separate nozzle group. At least one of the nozzles in a group of nozzles depositing an element may be configured to deposit the material on the substrate in a width that is smaller than the width of the element.
    • 提供了系统和方法,其中通过具有不同几何形状的两个或更多个喷嘴沉积薄图案化膜的各个元件。 不同的喷嘴几何形状可以包括一个或多个不同的节流直径,不同的排气直径,不同的横截面形状,不同的孔角度,不同的壁角度,与基板的不同排气距离以及相对于运动方向的不同前缘 喷嘴或基板。 方法可以包括以下步骤:从多个喷嘴喷射载体气体和材料,并将材料沉积在多个横向间隔开的元件的基板上,每个元件由单独的喷嘴组沉积。 沉积元件的一组喷嘴中的至少一个喷嘴可以被配置为以小于元件宽度的宽度将材料沉积在基板上。