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    • 6. 发明授权
    • Methods for forming and positioning moldable permanent magnets on
electromagnetically actuated microfabricated components
    • 在电磁致动的微制造部件上形成和定位成型永久磁铁的方法
    • US5472539A
    • 1995-12-05
    • US254725
    • 1994-06-06
    • Richard J. SaiaKevin M. DurocherThomas B. GorczycaMario Ghezzo
    • Richard J. SaiaKevin M. DurocherThomas B. GorczycaMario Ghezzo
    • H01H50/00B32B31/28
    • H01H50/005H02K99/00H01H2050/007
    • A low temperature batch method for forming and positioning permanent magnets on electromagnetically actuated micro-fabricated components, such as electrical switches employs a first adhesive, such as a Siltem/epoxy blend of an epoxy resin and a siloxane polyimide polymer, to releasably attach a mold layer of Kapton polyimide to a substrate, which may be the movable portion of a micromechanical structure, or a precursor to such movable portion. A well-shape cavity is formed in the mold layer, and filled with a slurry of rare earth NdFeB magnetic particles suspended in a second adhesive, which is cured to form the body of a magnet. The second adhesive is an SPI/epoxy blend, also of an epoxy resin and a siloxane polyimide polymer, but with a greater adhesion strength and a higher temperature softening point compared to the Siltem/epoxy blend. The entire structure is heated, and the mold layer is pulled off the substrate, while the body of magnetic material remains firmly attached. Selective etchants may be subsequently employed to remove metal sacrificial layers, while the NdFeB magnetic particles are protected from attack by the etchant by being effectively encased in plastic.
    • 用于在诸如电气开关的电磁致动微制造部件上形成和定位永磁体的低温分批方法采用第一粘合剂,例如环氧树脂的Siltem /环氧共混物和硅氧烷聚酰亚胺聚合物,以可释放地附接模具 Kapton聚酰亚胺层可以是基底,其可以是微机械结构的可移动部分,或者是可移动部分的前体。 在模具层中形成良好的形状的空腔,并填充悬浮在第二粘合剂中的稀土NdFeB磁性颗粒的浆料,其被固化以形成磁体的主体。 第二种粘合剂是SPI /环氧共混物,也是环氧树脂和硅氧烷聚酰亚胺聚合物,但是与Siltem /环氧树脂共混物相比具有更大的粘合强度和更高的温度软化点。 整个结构被加热,并且模具层被拉离基板,而磁性材料的主体保持牢固地附着。 随后可以选择性蚀刻剂去除金属牺牲层,同时通过被有效地包裹在塑料中来保护NdFeB磁性颗粒免受蚀刻剂的侵蚀。