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    • 4. 发明申请
    • BACK END OF LINE METAL-TO-METAL CAPACITOR STRUCTURES AND RELATED FABRICATION METHODS
    • 金属 - 金属电容器结构的背面和相关制造方法
    • US20110261500A1
    • 2011-10-27
    • US12765575
    • 2010-04-22
    • Patrice M. ParrisRichard J. De SouzaWeize ChenMoaniss Zitouni
    • Patrice M. ParrisRichard J. De SouzaWeize ChenMoaniss Zitouni
    • H01G4/00B05D5/12
    • H01G4/33H01G4/232H01L23/5223H01L28/86H01L28/90H01L2924/0002H01L2924/00
    • Apparatus and related fabrication methods are provided for capacitor structures. One embodiment of a capacitor structure comprises a plurality of consecutive metal layers and another metal layer. Each via layer of a plurality of via layers is interposed between metal layers of the plurality of metal layers. The plurality of metal layers and the plurality of via layers are cooperatively configured to provide a first plurality of vertical conductive structures corresponding to a first electrode and a second plurality of vertical conductive structures corresponding to a second electrode. The plurality of consecutive metal layers form a plurality of vertically-aligned regions and provide intralayer electrical interconnections among the first plurality of vertical conductive structures. The first metal layer provides an intralayer electrical interconnection among the second plurality of vertical conductive structures, wherein each vertically-aligned region has a vertical conductive structure of the second plurality of vertical conductive structures disposed therein.
    • 为电容器结构提供了装置和相关的制造方法。 电容器结构的一个实施例包括多个连续的金属层和另一个金属层。 多个通孔层的每个通孔层插入在多个金属层的金属层之间。 多个金属层和多个通孔层协作地构造成提供对应于对应于第二电极的第一电极和第二多个垂直导电结构的第一多个垂直导电结构。 多个连续的金属层形成多个垂直排列的区域,并且在第一多个垂直导电结构之间提供层间电互连。 第一金属层在第二多个垂直导电结构之间提供内层电互连,其中每个垂直对齐区域具有设置在其中的第二多个垂直导电结构的垂直导电结构。
    • 10. 发明授权
    • Semiconductor device with floating RESURF region
    • 具有浮动RESURF区域的半导体器件
    • US09024380B2
    • 2015-05-05
    • US13529589
    • 2012-06-21
    • Weize ChenRichard J. De SouzaPatrice M. Parris
    • Weize ChenRichard J. De SouzaPatrice M. Parris
    • H01L29/66H01L29/06H01L29/78
    • H01L29/0692H01L29/0634H01L29/0653H01L29/66659H01L29/7835
    • A device includes a semiconductor substrate, a body region in the semiconductor substrate, having a first conductivity type, and including a channel region through which charge carriers flow, a drain region in the semiconductor substrate, having a second conductivity type, and spaced from the body region along a first lateral dimension, a drift region in the semiconductor substrate, having the second conductivity type, and electrically coupling the drain region to the channel region, and a plurality of floating reduced surface field (RESURF) regions in the semiconductor substrate adjacent the drift region, having the first conductivity type, and around which the charge carriers drift through the drift region under an electric field arising from a voltage applied to the drain region. Adjacent floating RESURF regions of the plurality of floating RESURF regions are spaced from one another along a second lateral dimension of the device by a respective gap.
    • 一种器件包括半导体衬底,半导体衬底中的主体区域,具有第一导电类型,并且包括电荷载流子流过的沟道区域,半导体衬底中的漏极区域,具有第二导电类型,并与第二导电类型间隔开 沿着第一横向尺寸的主体区域,具有第二导电类型的半导体衬底中的漂移区域,以及将漏极区域电耦合到沟道区域,以及在半导体衬底相邻的多个浮动缩小表面场(RESURF)区域 具有第一导电类型的漂移区域,并且电荷载流子在由施加到漏极区域的电压产生的电场下漂移穿过漂移区域。 多个浮动RESURF区域的相邻的浮动RESURF区域沿设备的第二横向尺寸彼此间隔开。