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    • 7. 发明授权
    • Thin film transistors in pixel and driver portions characterized by surface roughness
    • 具有表面粗糙度的像素和驱动器部分的薄膜晶体管
    • US08097883B2
    • 2012-01-17
    • US11954716
    • 2007-12-12
    • Hong-Ro Lee
    • Hong-Ro Lee
    • H01L29/04H01L29/786H01L27/12
    • H01L27/12H01L27/1214H01L27/1285H01L29/04
    • A thin film transistor and a fabrication method thereof, in which one excimer laser annealing (ELA) makes a pixel portion and a driver portion different from each other in surface roughness and grain size. The thin film transistor includes: a substrate including a pixel portion and a driver portion; a first semiconductor layer disposed in the pixel portion and having a first surface roughness; a second semiconductor layer disposed in the driver portion and having a second surface roughness smaller than the first surface roughness; a gate insulating layer formed on the substrate including the first and second semiconductor layers; a first gate electrode placed to correspond to the first semiconductor layer on the gate insulating layer; a second gate electrode placed to correspond to the second semiconductor layer on the gate insulating layer; an interlayer insulating layer formed on the substrate including the first and second gate electrodes; first source and drain electrodes formed on the interlayer insulating layer and electrically connected with the first semiconductor layer; and second source and drain electrodes formed on the interlayer insulating layer and electrically connected with the second semiconductor layer.
    • 一种薄膜晶体管及其制造方法,其中一个准分子激光退火(ELA)使得像素部分和驱动器部分在表面粗糙度和晶粒尺寸上彼此不同。 薄膜晶体管包括:包括像素部分和驱动器部分的基板; 第一半导体层,设置在像素部分中并具有第一表面粗糙度; 第二半导体层,设置在所述驱动器部分中,具有小于所述第一表面粗糙度的第二表面粗糙度; 形成在包括所述第一半导体层和所述第二半导体层的所述基板上的栅极绝缘层; 第一栅极电极,被放置成对应于栅极绝缘层上的第一半导体层; 第二栅极电极,被放置为对应于栅极绝缘层上的第二半导体层; 在包括所述第一和第二栅电极的所述基板上形成的层间绝缘层; 形成在所述层间绝缘层上并与所述第一半导体层电连接的第一源极和漏极; 以及第二源极和漏极,形成在层间绝缘层上并与第二半导体层电连接。