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1. 发明授权

US06665102B2 Galvanometer-type scanner 有权
公开(公告)号：US06665102B2
公开(公告)日：2003-12-16
申请号：US10253716
申请日：2002-09-25
申请人： Toshiki Maruyama , Nozomu Tanioka , Kunio Miyashita , Akira Akahane
发明人： Toshiki Maruyama , Nozomu Tanioka , Kunio Miyashita , Akira Akahane
IPC分类号： G02B2608
CPC分类号： G02B26/105
摘要： A DC motor of a galvanometer-type scanner has four poles, and compared to a conventional DC motor with a bipolar construction, the armature inductance L can be reduced to half or less for a case where the external diameter of the rotor and the induced voltage constant KE are the same. Since KE/L, which is the index for the rise of torque of the motor, is increased by a factor of two or more, the responsiveness of the motor can be improved without increasing the exciting current of the winding. Accordingly, it is possible to provide a galvanometer-type scanner that can set minute angles of around one degree within several hundred microseconds.

2. 发明授权

US09077228B2 Rotary actuator equipped with sensing mechanism, and joint unit 有权
标题翻译：旋转执行器配有传感机构和接头单元
公开(公告)号：US09077228B2
公开(公告)日：2015-07-07
申请号：US13816138
申请日：2010-09-28
申请人： Nozomu Tanioka
发明人： Nozomu Tanioka
IPC分类号： B25J17/00 , H02K11/00 , B25J17/02 , H02K7/116 , H02K7/14
CPC分类号： H02K11/0026 , B25J17/00 , B25J17/0241 , B25J17/025 , H02K7/116 , H02K7/14 , H02K11/22 , Y10T74/20329
摘要： A rotary actuator equipped with a sensing mechanism includes a motor and a reducer concentrically disposed inside a cylindrical housing; a scale for detecting the rotational position of a rotary arm, the scale being disposed on the circular outer face of the cylindrical housing; and a position sensor mounted in the facing section of the rotary arm that rotates along the circular outer face, the facing section being in a facing arrangement with the circular outer face. A detection mechanism includes the scale and the position sensor detects the rotational position of the rotary arm capable of rotating within a finite angular range along the circular outer face of the cylindrical housing. The components are concentrically disposed. The actuator is suitable for use as a digital joint unit.
摘要翻译：配有传感机构的旋转执行机构包括：电动机和同心地设置在圆筒形壳体内的减速器; 用于检测旋转臂的旋转位置的刻度尺，刻度尺设置在圆柱形壳体的圆形外表面上; 以及安装在所述旋转臂的面对部分中的位置传感器，其沿着所述圆形外表面旋转，所述面对部分与所述圆形外表面对置配置。检测机构包括刻度，位置传感器检测能够沿圆柱形壳体的圆形外表面在有限角度范围内旋转的旋转臂的旋转位置。组件同心地设置。执行器适用于数字式接头单元。

3. 发明申请

US20090284815A1 METHOD FOR ADJUSTING GALVANO SCANNER SYSTEM 有权
标题翻译：调整GALVANO扫描仪系统的方法
公开(公告)号：US20090284815A1
公开(公告)日：2009-11-19
申请号：US12421021
申请日：2009-04-09
申请人： Nozomu Tanioka
发明人： Nozomu Tanioka
IPC分类号： G02B26/10
CPC分类号： G02B26/105 , Y10S359/90
摘要： In a galvano scanner system (1), a light position detection unit (30) is mounted so as to match the scanning center of the workpiece surface (7), the light position detection unit being provided with a two-dimensional light position sensor (32) disposed in the center and four one-dimensional light position sensors (33(1)) to (33(4)) concyclically disposed at equal angles about the center of the two-dimensional light position sensor. An origin position command is given to galvano scanners (3, 4), laser light is irradiated at low output, and the offset adjustment value is calculated based on the detection output of the two-dimensional light position sensor (32). Next, the galvano scanners (3, 4) are pivoted left, right, up, and down; the perpendicularity in relation to the workpiece surface (7) is determined and the distance from the workpiece surface (7) is calculated based on the detection output of each one-dimensional light position sensor (33); and the scale adjustment value is calculated on the basis thereof. Adjustment can be carried out with good accuracy in a simple manner in comparison with the case in which such an adjustment is made in alignment with a scale on a workpiece surface while visually observing visible laser light.
摘要翻译：在电流计扫描器系统（1）中，安装光位置检测单元（30）以与工件表面（7）的扫描中心相匹配，光位置检测单元设置有二维光位置传感器（33（1））〜（33（4））的四个一维光位置传感器（33（1））〜（33（4））。给电动扫描器（3,4）提供原点位置命令，激光以低输出照射，并且基于二维光位置传感器（32）的检测输出计算偏移调整值。接下来，电动扫描仪（3,4）左，右，上，下摆动; 确定相对于工件表面（7）的垂直度，并且基于每个一维光位置传感器（33）的检测输出计算与工件表面（7）的距离; 并且基于此计算比例调整值。与在目视观察可见激光时，与工件表面上的刻度对准的这种调整的情况相比，可以以简单的方式进行调整。

4. 发明申请

US20050277305A1 Driving Method For Galvano Scanner 有权
标题翻译： Galvano扫描仪的驱动方法
公开(公告)号：US20050277305A1
公开(公告)日：2005-12-15
申请号：US10908228
申请日：2005-05-03
申请人： Nozomu Tanioka
发明人： Nozomu Tanioka
IPC分类号： G02B26/10 , B23K26/06 , H01L21/31 , H01L21/469 , H04N1/04 , H04N1/053 , H04N1/113 , H04N1/32
CPC分类号： H04N1/053 , H04N1/1135 , H04N2201/04755 , H04N2201/04793 , Y10S359/90
摘要： A galvano scanner system has a galvano scanner and a scanner driver for driving the scanner, wherein a microcomputer for generating commands in which digital data representing a drive pattern of the scanner is written is mounted in the scanner driver. The microcomputer for generating commands is actuated by an external or internal trigger signal, and the digital data of the drive pattern is sequentially output. The output data is converted to an analog signal in a DA converter, and a drive control circuit generates a drive signal of the scanner on the basis of the analog signal to drive the galvano scanner. A system that can optimally drive a galvano scanner can be achieved with a small inexpensive system configuration.
摘要翻译：电动扫描仪系统具有电动扫描器和用于驱动扫描器的扫描器驱动器，其中，用于产生表示扫描器的驱动图案的数字数据的命令的微型计算机安装在扫描仪驱动器中。用于产生命令的微计算机由外部或内部触发信号启动，并且依次输出驱动模式的数字数据。输出数据在DA转换器中转换成模拟信号，驱动控制电路根据模拟信号产生扫描仪的驱动信号，驱动电流扫描器。可以以较小的廉价系统配置实现可以最佳地驱动电流计扫描仪的系统。

5. 发明申请

US20130139636A1 ROTARY ACTUATOR EQUIPPED WITH SENSING MECHANISM, AND JOINT UNIT 有权
标题翻译：配有传感机构的旋转执行器和接头单元
公开(公告)号：US20130139636A1
公开(公告)日：2013-06-06
申请号：US13816138
申请日：2010-09-28
申请人： Nozomu Tanioka
发明人： Nozomu Tanioka
IPC分类号： H02K11/00 , B25J17/00
CPC分类号： H02K11/0026 , B25J17/00 , B25J17/0241 , B25J17/025 , H02K7/116 , H02K7/14 , H02K11/22 , Y10T74/20329
摘要： A rotary actuator equipped with a sensing mechanism includes a motor and a reducer concentrically disposed inside a cylindrical housing; a scale for detecting the rotational position of a rotary arm, the scale being disposed on the circular outer face of the cylindrical housing; and a position sensor mounted in the facing section of the rotary arm that rotates along the circular outer face, the facing section being in a facing arrangement with the circular outer face. A detection mechanism includes the scale and the position sensor detects the rotational position of the rotary arm capable of rotating within a finite angular range along the circular outer face of the cylindrical housing. The components are concentrically disposed. The actuator is suitable for use as a digital joint unit.
摘要翻译：配有传感机构的旋转执行机构包括：电动机和同心地设置在圆筒形壳体内的减速器; 用于检测旋转臂的旋转位置的刻度尺，刻度尺设置在圆柱形壳体的圆形外表面上; 以及安装在所述旋转臂的面对部分中的位置传感器，其沿着所述圆形外表面旋转，所述面对部分与所述圆形外表面对置配置。检测机构包括刻度，位置传感器检测能够沿圆柱形壳体的圆形外表面在有限角度范围内旋转的旋转臂的旋转位置。组件同心地设置。执行器适用于数字式接头单元。

6. 发明授权

US08031385B2 Method for adjusting drive characteristics of scanner driver of galvanometric scanner 有权
标题翻译：用于调整电流计扫描仪扫描仪驱动器的驱动特性的方法
公开(公告)号：US08031385B2
公开(公告)日：2011-10-04
申请号：US12119222
申请日：2008-05-12
申请人： Nozomu Tanioka
发明人： Nozomu Tanioka
IPC分类号： G02B26/08
CPC分类号： G02B26/105 , Y10S359/90
摘要： A scanner driver of a galvanometric scanner system includes an analog drive circuit; a control unit 31 for storing and holding optimized data formed from combinations of optimal values of circuit constants set in advance in accordance with a plurality of drive modes of a galvanometric scanner; and an electronic trimmer for changing the circuit constants of the analog drive circuit. The control unit selects one of the optimized data in accordance with an external input, and sets or updates parameters of the circuit constants via the electronic trimmer in accordance with the selected optimized data. When a drive mode of the galvanometric scanner system is changed, the scanner driver can accordingly be optimized readily and quickly.
摘要翻译：电流扫描仪系统的扫描仪驱动器包括模拟驱动电路; 控制单元31，用于根据电流计扫描器的多个驱动模式来存储并保持由预先设置的电路常数的最佳值的组合形成的优化数据; 以及用于改变模拟驱动电路的电路常数的电子微调器。控制单元根据外部输入选择一个优化数据，并且根据所选择的优化数据经由电子修剪器设置或更新电路常数的参数。当电流计扫描器系统的驱动模式改变时，扫描仪驱动器可以相应地被容易且快速地优化。

7. 发明授权

US07576456B2 Linear actuator 有权
标题翻译：线性执行机构
公开(公告)号：US07576456B2
公开(公告)日：2009-08-18
申请号：US11820673
申请日：2007-06-20
申请人： Nozomu Tanioka , Akira Akahane
发明人： Nozomu Tanioka , Akira Akahane
IPC分类号： H02K33/00 , H02K33/18
CPC分类号： H02K41/0356
摘要： In a linear actuator (1), on the inside of a rectangular tubular movable element (3), a linear guide (14) that supports the movable element (3) so as to be linearly movable is positioned at a center of the movable element (3), and a position detecting mechanism (20) and load attaching member (13) that sandwich the linear guide are disposed linearly in a vertical direction. This arrangement enables a center of gravity of the movable element (3) to be matched with a center of the linear guide (14). A magnetic circuit is in a bilaterally symmetrical relationship with regard to the center of the movable element (3). Therefore, a center of a thrust force that acts upon the movable element (3) is matched with the center of the movable element (3). The center of the thrust force that acts upon the movable element (3), the center of gravity of the movable element (3), and the center of the linear guide (14) are positioned at the center of the movable element (3). Resistance to sliding in the movable element (3) can be reduced without unreasonable stress being placing on the linear guide (14). Therefore, a magnetically driven linear actuator that has highly precise positioning and that is durable can be realized.
摘要翻译：在线性致动器（1）中，在矩形管状可移动元件（3）的内部，支撑可移动元件（3）以直线移动的线性引导件（14）位于可移动元件（3），并且夹持线性引导件的位置检测机构（20）和负载附接构件（13）在垂直方向上线性地设置。这种布置使得可移动元件（3）的重心与直线导轨（14）的中心相匹配。相对于可动元件（3）的中心，磁路呈双向对称关系。因此，作用在可动元件（3）上的推力的中心与可移动元件（3）的中心相匹配。作用在可动元件（3）上的推力的中心，可动元件（3）的重心和直线导轨（14）的中心位于可移动元件（3）的中心，。可以减少可动元件（3）中的滑动阻力，而不会在直线导轨（14）上施加不合理的应力。因此，可以实现具有高精度定位并且耐用的磁驱动线性致动器。

8. 发明授权

US07359102B2 Driving method for galvano scanner 有权
标题翻译：电动扫描仪的驱动方法
公开(公告)号：US07359102B2
公开(公告)日：2008-04-15
申请号：US10908228
申请日：2005-05-03
申请人： Nozomu Tanioka
发明人： Nozomu Tanioka
IPC分类号： G02B26/08
CPC分类号： H04N1/053 , H04N1/1135 , H04N2201/04755 , H04N2201/04793 , Y10S359/90
摘要： A galvano scanner system has a galvano scanner and a scanner driver for driving the scanner, wherein a microcomputer for generating commands in which digital data representing a drive pattern of the scanner is written is mounted in the scanner driver. The microcomputer for generating commands is actuated by an external or internal trigger signal, and the digital data of the drive pattern is sequentially output. The output data is converted to an analog signal in a DA converter, and a drive control circuit generates a drive signal of the scanner on the basis of the analog signal to drive the galvano scanner. A system that can optimally drive a galvano scanner can be achieved with a small inexpensive system configuration.
摘要翻译：电动扫描仪系统具有电动扫描器和用于驱动扫描器的扫描器驱动器，其中，用于产生表示扫描器的驱动图案的数字数据的命令的微型计算机安装在扫描仪驱动器中。用于产生命令的微计算机由外部或内部触发信号启动，并且依次输出驱动模式的数字数据。输出数据在DA转换器中转换成模拟信号，驱动控制电路根据模拟信号产生扫描仪的驱动信号，驱动电流扫描器。可以以较小的廉价系统配置实现可以最佳地驱动电流计扫描仪的系统。

9. 发明申请

US20110304836A1 METHOD FOR CREATING DRIVE PATTERN FOR GALVANO-SCANNER SYSTEM 有权
标题翻译：用于创建GALVANO-SCANNER系统的驱动模式的方法
公开(公告)号：US20110304836A1
公开(公告)日：2011-12-15
申请号：US12992937
申请日：2008-05-16
申请人： Nozomu Tanioka
发明人： Nozomu Tanioka
IPC分类号： G03B27/54
CPC分类号： B23K26/0853 , B23K26/082 , G02B27/0031 , H04N3/08 , H04N3/10
摘要： A visible laser beam scanned by a galvano-scanner system is aligned at each of positioning points on the top surface of a master work by manual operation to record sensor position signals of position sensors on galvano-scanners. The sensor position signals on each positioning point are recorded to create a drive pattern in accordance with recorded sensor position signals. The drive pattern no longer has optics system error sources including focus error and attachment error as well as errors caused by scale, offset and the like, also eliminating the need for entering a distance as far as the top surface of the work. Therefore, the drive pattern with error components removed can be created with ease.
摘要翻译：由电动扫描仪系统扫描的可见激光束通过手动操作对准主工作顶表面上的每个定位点，以记录电流计扫描仪上位置传感器的传感器位置信号。记录每个定位点上的传感器位置信号，以根据记录的传感器位置信号创建驱动模式。驱动器模式不再具有光学系统误差源，包括聚焦误差和附着误差以及由刻度，偏移等造成的误差，也消除了进入距离工件顶表面的距离的需要。因此，可以轻松创建带有错误组件的驱动模式。

10. 发明授权

US08054521B2 Method for adjusting galvano scanner system 有权
标题翻译：电动扫描仪系统调整方法
公开(公告)号：US08054521B2
公开(公告)日：2011-11-08
申请号：US12421021
申请日：2009-04-09
申请人： Nozomu Tanioka
发明人： Nozomu Tanioka
IPC分类号： G02B26/08
CPC分类号： G02B26/105 , Y10S359/90
摘要： In a galvano scanner system (1), a light position detection unit (30) is mounted so as to match the scanning center of the workpiece surface (7), the light position detection unit being provided with a two-dimensional light position sensor (32) disposed in the center and four one-dimensional light position sensors (33(1)) to (33(4)) concyclically disposed at equal angles about the center of the two-dimensional light position sensor. An origin position command is given to galvano scanners (3, 4), laser light is irradiated at low output, and the offset adjustment value is calculated based on the detection output of the two-dimensional light position sensor (32). Next, the galvano scanners (3, 4) are pivoted left, right, up, and down; the perpendicularity in relation to the workpiece surface (7) is determined and the distance from the workpiece surface (7) is calculated based on the detection output of each one-dimensional light position sensor (33); and the scale adjustment value is calculated on the basis thereof. Adjustment can be carried out with good accuracy in a simple manner in comparison with the case in which such an adjustment is made in alignment with a scale on a workpiece surface while visually observing visible laser light.
摘要翻译：在电流计扫描器系统（1）中，安装光位置检测单元（30）以与工件表面（7）的扫描中心相匹配，光位置检测单元设置有二维光位置传感器（33（1））〜（33（4））的四个一维光位置传感器（33（1））〜（33（4））。给电动扫描器（3,4）提供原点位置命令，激光以低输出照射，并且基于二维光位置传感器（32）的检测输出计算偏移调整值。接下来，电动扫描仪（3,4）左，右，上，下摆动; 确定相对于工件表面（7）的垂直度，并且基于每个一维光位置传感器（33）的检测输出计算与工件表面（7）的距离; 并且基于此计算比例调整值。与在目视观察可见激光时，与工件表面上的刻度对准的这种调整的情况相比，可以以简单的方式进行调整。

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