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    • 8. 发明授权
    • Trench and via formation in insulating films utilizing a patterned etching stopper film
    • 利用图案化蚀刻阻挡膜的绝缘膜中的沟槽和通孔形成
    • US06268279B1
    • 2001-07-31
    • US09320466
    • 1999-05-27
    • Norio Okada
    • Norio Okada
    • H01L214763
    • H01L21/76829H01L21/7681
    • A first interlayer insulating film and an etching stopper film are sequentially formed on a semiconductor substrate with a surface area on which first wiring is formed. The etching stopper film is patterned so as to correspond to a pattern of via hole formed on the first interlayer insulating film and a pattern of forming a second wiring. A second interlayer insulating film is formed on the etching stopped film for forming the second wiring, a wiring trench is formed by etching the second interlayer insulating film. Continuously, the via hole is formed by etching the first interlayer insulating film while having the etching stopper film as a photomask. Conductive materials are laid in the via hole and the wiring trench so that the second wiring connected to the first wiring is formed.
    • 第一层间绝缘膜和蚀刻阻挡膜依次形成在其上形成有第一布线的表面积的半导体基板上。 蚀刻停止膜被图案化以对应于形成在第一层间绝缘膜上的通孔的图案和形成第二布线的图案。 在用于形成第二布线的蚀刻停止膜上形成第二层间绝缘膜,通过蚀刻第二层间绝缘膜形成布线沟槽。 连续地,通过蚀刻第一层间绝缘膜同时具有蚀刻停止膜作为光掩模来形成通孔。 导电材料铺设在通孔和布线沟槽中,从而形成连接到第一布线的第二布线。
    • 10. 发明授权
    • Light modulation device
    • 调光装置
    • US08547620B2
    • 2013-10-01
    • US13090290
    • 2011-04-20
    • Norio Okada
    • Norio Okada
    • G02B26/00G02F1/01
    • G02F1/0121
    • A light modulation device includes: an input terminal into which a modulation signal is input; a light modulation element including an anode connected to the input terminal and a cathode that is grounded; a matching resistor connected in parallel with the light modulation element; a matching capacitor connected to the light modulation element and connected in series to the matching resistor; and a protective resistor connected in parallel with the light modulation element, the matching resistor, and the matching capacitor.
    • 光调制装置包括:输入端子,输入调制信号; 光调制元件,包括连接到输入端子的阳极和接地的阴极; 与光调制元件并联连接的匹配电阻器; 连接到光调制元件并与匹配电阻器串联连接的匹配电容器; 以及与光调制元件,匹配电阻器和匹配电容器并联连接的保护电阻器。