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    • 7. 发明授权
    • Method for manufacturing semiconductor memory
    • 半导体存储器的制造方法
    • US06333231B1
    • 2001-12-25
    • US09668308
    • 2000-09-25
    • Hiroaki TakahashiMasaru Seto
    • Hiroaki TakahashiMasaru Seto
    • H01L21336
    • H01L27/1126H01L27/112
    • A method for manufacturing read-only memory. In each memory cell on a wafer, a gate electrode 3a is formed on a silicon substrate 1 with an intermediary of a gate oxide film 2, and an oxide film 4 is formed to cover the surface of the silicon substrate. After an inter-layer dielectric film 6 is grown on the oxide film 4 by LPCVD, this inter-layer dielectric film 6 is put to rapid thermal processing at 700° C. to 800° C. for about 60 seconds to remove the water content of the inter-layer dielectric film 6. This eliminates chances of insulation deterioration when semi-finished wafers are put into long-term storage. After the steps just before data writing have been finished, the wafers can be put into long-term storage, so that time from decision of data to write until product completion can be reduced.
    • 一种用于制造只读存储器的方法。 在晶片上的每个存储单元中,在具有栅极氧化膜2的介质的硅衬底1上形成栅电极3a,并且形成氧化物膜4以覆盖硅衬底的表面。 在通过LPCVD在氧化物膜4上生长层间电介质膜6之后,将该层间电介质膜6在700℃〜800℃进行快速热处理约60秒以除去含水量 这消除了半成品晶片长期保存时绝缘劣化的可能性。 在完成数据写入之后的步骤之后,晶片可以进行长期存储,从而可以减少从数据到写入到产品完成的时间。
    • 10. 发明授权
    • Scan program communication method and X-ray CT apparatus
    • 扫描程序通信方法和X射线CT装置
    • US07336762B2
    • 2008-02-26
    • US11179872
    • 2005-07-12
    • Masaru SetoYasushi Sato
    • Masaru SetoYasushi Sato
    • G01N23/00
    • A61B6/032G06F19/00
    • An X-ray CT apparatus includes a host and a scanner that executes a scan based on a scan program communicated from the host by means of communicating means. The X-ray CT apparatus also includes a communicating means which collectively communicate the calculated values of X-ray applied amounts at every scan positions or original data for the calculation of the amount of X-ray application even with respect to unprogrammed scan positions. Each of the calculated values of X-ray applied amounts corresponds to a tube current value of an X-ray tube. The original data for the calculation of the amount of X-ray application corresponds to X-ray penetrated image data of a subject.
    • X射线CT装置包括主机和扫描器,其基于通过通信装置从主机传送的扫描程序执行扫描。 X射线CT装置还包括通信装置,其在每个扫描位置或原始数据中共同传送计算的X射线量值,以用于计算X射线应用量,即使相对于未编程的扫描位置。 X射线施加量的计算值中的每一个对应于X射线管的管电流值。 用于计算X射线应用量的原始数据对应于被摄体的X射线穿透图像数据。