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    • 3. 发明授权
    • Method for reducing the thickness of an SOI layer
    • 降低SOI层厚度的方法
    • US09064929B2
    • 2015-06-23
    • US12153519
    • 2008-05-20
    • Shoji AkiyamaYoshihiro KubotaAtsuo ItoKoichi TanakaMakoto KawaiYuuji Tobisaka
    • Shoji AkiyamaYoshihiro KubotaAtsuo ItoKoichi TanakaMakoto KawaiYuuji Tobisaka
    • H01L21/762H01L21/3065H01L21/66
    • H01L21/76254H01L21/3065H01L22/12H01L22/20H01L2924/014
    • There is disclosed a method for manufacturing an SOI wafer comprising: a step of implanting at least one of a hydrogen ion and a rare gas ion into a donor wafer to form an ion implanted layer; a step of bonding an ion implanted surface of the donor wafer to a handle wafer; a step of delaminating the donor wafer at the ion implanted layer to reduce a film thickness of the donor wafer, thereby providing an SOI layer; and a step of etching the SOI layer to reduce a thickness of the SOI layer, wherein the etching step includes: a stage of performing rough etching as wet etching; a stage of measuring a film thickness distribution of the SOI layer after the rough etching; and a stage of performing precise etching as dry etching based on the measured film thickness distribution of the SOI layer. There can be provided A method for manufacturing an SOI wafer having high film thickness uniformity of an SOI layer with excellent productivity.
    • 公开了一种用于制造SOI晶片的方法,包括:将氢离子和稀有气体离子中的至少一种注入施主晶片以形成离子注入层的步骤; 将施主晶片的离子注入表面接合到处理晶片的步骤; 在离子注入层分层施主晶片以降低施主晶片的膜厚,从而提供SOI层的步骤; 以及蚀刻所述SOI层以减小所述SOI层的厚度的步骤,其中所述蚀刻步骤包括:执行粗蚀刻的阶段,如湿蚀刻; 在粗蚀刻之后测量SOI层的膜厚分布的阶段; 以及基于所测量的SOI层的膜厚分布,进行干蚀刻的精确蚀刻的阶段。 可以提供一种以优异的生产率制造具有SOI层的高膜厚均匀性的SOI晶片的方法。
    • 9. 发明授权
    • Vehicle power transmission device
    • 车辆动力传动装置
    • US08727928B2
    • 2014-05-20
    • US13033679
    • 2011-02-24
    • Terasu HarashimaKoichi TanakaAtsushi TeshimaYoshihiko SasakiHiroshi Hamaguchi
    • Terasu HarashimaKoichi TanakaAtsushi TeshimaYoshihiko SasakiHiroshi Hamaguchi
    • F16H48/06
    • F16H57/0483B60K1/00B60K2001/001F16C33/6659F16C2361/65F16H57/0441F16H57/0471F16H57/0476F16H63/3416H02K7/006H02K7/116
    • A vehicle power transmission device includes: a first power transmission member including a cylindrical shaft end portion rotatably supported via a first bearing on an inner circumferential side of a non-rotating support wall; and a second power transmission member supported on the inside of the cylindrical shaft end portion via a second bearing radially overlapping with the first bearing by the cylindrical shaft end portion to be rotatable concentrically and relatively to the first power transmission member, the second power transmission member including a circular disc gear portion protruded to an outer circumferential side at a predetermined distance from the second bearing in a shaft center direction of the second power transmission member, at a portion facing the first bearing, the gear portion having an annular inner circumferential guide protruding portion for guiding to the first bearing a lubricant oil that passes through the second bearing for lubrication, that enters into a gap between the second bearing and the gear portion, and that travels to the outer circumferential side due to the centrifugal force.
    • 一种车辆动力传递装置,包括:第一动力传递构件,其包括圆筒形的轴端部,其通过非旋转支撑壁的内周侧上的第一轴承可旋转地支撑; 以及第二动力传递构件,其经由与所述第一轴承径向重叠的所述圆筒形轴端部的第二轴承支撑在所述圆筒形轴端部的内侧,以能够同心地且相对于所述第一动力传递构件旋转,所述第二动力传递构件 包括圆形盘齿轮部分,在与所述第二动力传递构件的轴中心方向相对于所述第二轴承预定距离的外周侧处,在面向所述第一轴承的部分处,所述齿轮部分具有环形内周引导件突出 用于引导到第一轴承的润滑油,其通过用于润滑的第二轴承,其进入第二轴承和齿轮部之间的间隙,并且由于离心力而行进到外周侧。