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1. 发明授权

US06804900B2 Method for drying microstructure member 失效
标题翻译：干燥微结构件的方法
公开(公告)号：US06804900B2
公开(公告)日：2004-10-19
申请号：US10636777
申请日：2003-08-08
申请人： Nobuyuki Kawakami , Toshiro Kugimiya
发明人： Nobuyuki Kawakami , Toshiro Kugimiya
IPC分类号： F26B300
CPC分类号： G03F7/32 , G03F7/40
摘要： Method for drying a microstructure member having many micro concavities in a surface, the micro concavities containing water, includes adjusting the temperature of liquid inside the micro concavities to a temperature in the range of the cloud point of a surfactant ±1° C., and supplying a mixture of the surfactant and a hydrophobic solvent adjusted to a temperature in the range of the cloud point ±1° C. into the micro concavities to remove part or all of the water; heating the liquid inside the micro concavities to a temperature exceeding the cloud point +1° C., and supplying the hydrophobic solvent controlled to a temperature exceeding the cloud point +1° C. into the micro concavities to replace the liquid in the concavities with the hydrophobic solvent; and placing the resulting microstructure member with the concavities into contact with liquid or supercritical carbon dioxide to replace the hydrophobic solvent with the liquid or supercritical carbon dioxide.
摘要翻译：在表面具有多个微凹部的微结构构件的干燥方法，含有水的微凹部包括将微凹部内的液体的温度调节至表面活性剂的浊点±1℃的范围内的温度，以及将表面活性剂和调整到浊点±1℃范围内的温度的疏水溶剂的混合物供应到微凹部中以除去部分或全部水; 将微凹部内的液体加热到超过浊点+ 1℃的温度，并将控制到超过浊点+ 1℃的温度的疏水性溶剂供给到微凹部中，以将凹部中的液体替换为疏水性溶剂; 并将所得到的具有凹部的微结构构件与液体或超临界二氧化碳接触以用液体或超临界二氧化碳代替疏水性溶剂。

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