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1. 发明申请

US20060289757A1 Electron beam system and electron beam measuring and observing methods 失效
公开(公告)号：US20060289757A1
公开(公告)日：2006-12-28
申请号：US11505872
申请日：2006-08-18
申请人： Nobuo Kochi , Hirotami Koike , Yasuko Tsuruga , Shinichi Okada
发明人： Nobuo Kochi , Hirotami Koike , Yasuko Tsuruga , Shinichi Okada
IPC分类号： G21K7/00
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2611
摘要： To provide an electron beam system capable of performing three-dimensional measurement of a sample with high precision irrespective of the tilt angle and height of the sample. The electron beam system has a correction factor storing section 32 for storing a correction factor at a reference tilt angle with respect to a plane which is used to tilt a sample by a sample tilting section 5, an approximate coordinate measuring section 28 for obtaining an approximate shape or approximate coordinate values of the sample based on an output corresponding to a stereo image from an electron beam detecting section 4, an image correcting section 30 for correcting the stereo image according to the tilt angle created by the sample tilting section 5 based on the shape or coordinate values of the sample obtained in the approximate coordinate measuring section 28 using a correction factor stored in the correction factor storing section 32, and a precise coordinate measuring section 34 for obtaining a shape or coordinate values of the sample which are more precise than those obtained in the approximate coordinate measuring section 28 based on a corrected stereo image obtained in the image correcting section 30.

2. 发明授权

US07329867B2 Electron beam system and electron beam measuring and observing methods 失效
标题翻译：电子束系统和电子束测量和观测方法
公开(公告)号：US07329867B2
公开(公告)日：2008-02-12
申请号：US11505872
申请日：2006-08-18
申请人： Nobuo Kochi , Hirotami Koike , Yasuko Tsuruga , Shinichi Okada
发明人： Nobuo Kochi , Hirotami Koike , Yasuko Tsuruga , Shinichi Okada
IPC分类号： H01J37/28
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2611
摘要： To provide an electron beam system capable of performing three-dimensional measurement of a sample with high precision irrespective of the tilt angle and height of the sample. The electron beam system has a correction factor storing section 32 for storing a correction factor at a reference tilt angle with respect to a plane which is used to tilt a sample by a sample tilting section 5, an approximate coordinate measuring section 28 for obtaining an approximate shape or approximate coordinate values of the sample based on an output corresponding to a stereo image from an electron beam detecting section 4, an image correcting section 30 for correcting the stereo image according to the tilt angle created by the sample tilting section 5 based on the shape or coordinate values of the sample obtained in the approximate coordinate measuring section 28 using a correction factor stored in the correction factor storing section 32, and a precise coordinate measuring section 34 for obtaining a shape or coordinate values of the sample which are more precise than those obtained in the approximate coordinate measuring section 28 based on a corrected stereo image obtained in the image correcting section 30.
摘要翻译：提供能够以高精度执行样品的三维测量的电子束系统，而与样品的倾斜角度和高度无关。电子束系统具有校正因子存储部分32，用于存储相对于用于通过样本倾斜部分5倾斜样本的平面的参考倾斜角的校正因子，用于获得近似坐标测量部分28的近似坐标测量部分28 基于与来自电子束检测部分4的立体图像相对应的输出的样本的形状或近似坐标值，用于根据由样本倾斜部分5产生的倾斜角校正立体图像的图像校正部分30 使用存储在校正因子存储部分32中的校正因子在近似坐标测量部分28中获得的样本的形状或坐标值，以及精确坐标测量部分34，用于获得样本的形状或坐标值，其比基于所获得的校正立体图像在近似坐标测量部分28中获得的那些在图像校正部30中。

3. 发明授权

US07151258B2 Electron beam system and electron beam measuring and observing methods 失效
标题翻译：电子束系统和电子束测量和观测方法
公开(公告)号：US07151258B2
公开(公告)日：2006-12-19
申请号：US10897434
申请日：2004-07-23
申请人： Nobuo Kochi , Hirotami Koike , Yasuko Tsuruga , Shinichi Okada
发明人： Nobuo Kochi , Hirotami Koike , Yasuko Tsuruga , Shinichi Okada
IPC分类号： H01J37/28
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2611
摘要： To provide an electron beam system capable of performing three-dimensional measurement of a sample with high precision irrespective of the tilt angle and height of the sample. The electron beam system has a correction factor storing section 32 for storing a correction factor at a reference tilt angle with respect to a plane which is used to tilt a sample by a sample tilting section 5, an approximate coordinate measuring section 28 for obtaining an approximate shape or approximate coordinate values of the sample based on an output corresponding to a stereo image from an electron beam detecting section 4, an image correcting section 30 for correcting the stereo image according to the tilt angle created by the sample tilting section 5 based on the shape or coordinate values of the sample obtained in the approximate coordinate measuring section 28 using a correction factor stored in the correction factor storing section 32, and a precise coordinate measuring section 34 for obtaining a shape or coordinate values of the sample which are more precise than those obtained in the approximate coordinate measuring section 28 based on a corrected stereo image obtained in the image correcting section 30.
摘要翻译：提供能够以高精度执行样品的三维测量的电子束系统，而与样品的倾斜角度和高度无关。电子束系统具有校正因子存储部分32，用于存储相对于用于通过样本倾斜部分5倾斜样本的平面的参考倾斜角的校正因子，用于获得近似坐标测量部分28的近似坐标测量部分28 基于与来自电子束检测部分4的立体图像相对应的输出的样本的形状或近似坐标值，用于根据由样本倾斜部分5产生的倾斜角校正立体图像的图像校正部分30 使用存储在校正因子存储部分32中的校正因子在近似坐标测量部分28中获得的样本的形状或坐标值，以及精确坐标测量部分34，用于获得样本的形状或坐标值，其比基于所获得的校正立体图像在近似坐标测量部分28中获得的那些在图像校正部30中。

4. 发明申请

US20050061972A1 Electron beam system and electron beam measuring and observing methods 失效
标题翻译：电子束系统和电子束测量和观测方法
公开(公告)号：US20050061972A1
公开(公告)日：2005-03-24
申请号：US10897434
申请日：2004-07-23
申请人： Nobuo Kochi , Hirotami Koike , Yasuko Tsuruga , Shinichi Okada
发明人： Nobuo Kochi , Hirotami Koike , Yasuko Tsuruga , Shinichi Okada
IPC分类号： H01J37/28 , G01N23/00
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2611
摘要： To provide an electron beam system capable of performing three-dimensional measurement of a sample with high precision irrespective of the tilt angle and height of the sample. The electron beam system has a correction factor storing section 32 for storing a correction factor at a reference tilt angle with respect to a plane which is used to tilt a sample by a sample tilting section 5, an approximate coordinate measuring section 28 for obtaining an approximate shape or approximate coordinate values of the sample based on an output corresponding to a stereo image from an electron beam detecting section 4, an image correcting section 30 for correcting the stereo image according to the tilt angle created by the sample tilting section 5 based on the shape or coordinate values of the sample obtained in the approximate coordinate measuring section 28 using a correction factor stored in the correction factor storing section 32, and a precise coordinate measuring section 34 for obtaining a shape or coordinate values of the sample which are more precise than those obtained in the approximate coordinate measuring section 28 based on a corrected stereo image obtained in the image correcting section 30.
摘要翻译：提供能够以高精度执行样品的三维测量的电子束系统，而与样品的倾斜角度和高度无关。电子束系统具有校正因子存储部分32，用于存储相对于用于通过样本倾斜部分5倾斜样本的平面的参考倾斜角的校正因子，用于获得近似坐标测量部分28的近似坐标测量部分28 基于与来自电子束检测部分4的立体图像相对应的输出的样本的形状或近似坐标值，用于根据由样本倾斜部分5产生的倾斜角校正立体图像的图像校正部分30 使用存储在校正因子存储部分32中的校正因子在近似坐标测量部分28中获得的样本的形状或坐标值，以及精确坐标测量部分34，用于获得样本的形状或坐标值，其比在近似坐标测量部分28中基于经校正的立体图像获得的那些图像校正部30。

5. 发明授权

US06852974B2 Electron beam device and method for stereoscopic measurements 失效
公开(公告)号：US06852974B2
公开(公告)日：2005-02-08
申请号：US10086625
申请日：2002-03-04
申请人： Nobuo Kochi , Hirotami Koike
发明人： Nobuo Kochi , Hirotami Koike
IPC分类号： H01J37/26 , G01N23/00
CPC分类号： H01J37/26 , H01J2237/2611
摘要： An electron beam device according to the present invention is made up of an electron beam source for emitting an electron beam, an electron optical system for irradiating the electron beam onto a specimen, a specimen holder for holding the specimen, a specimen tilting section for producing relative tilt angles between the specimen holder and the electron beam, an electron beam detecting section for detecting electron beam emitted from the specimen, and a data correcting section for correcting the three-dimensional detection data to have specified relationship under the condition of a relative tilt angle between the specimen holder and the electron beam.

6. 发明申请

US20050040332A1 Electron beam device and method for stereoscopic measurements 审中-公开
标题翻译：用于立体测量的电子束装置和方法
公开(公告)号：US20050040332A1
公开(公告)日：2005-02-24
申请号：US10950638
申请日：2004-09-28
申请人： Nobuo Kochi , Hirotami Koike
发明人： Nobuo Kochi , Hirotami Koike
IPC分类号： H01J37/26 , G21K7/00
CPC分类号： H01J37/26 , H01J2237/2611
摘要： An electron beam device according to the present invention is made up of an electron beam source for emitting an electron beam, an electron optical system for irradiating the electron beam onto a specimen, a specimen holder for holding the specimen, a specimen tilting section for producing relative tilt angles between the specimen holder and the electron beam, an electron beam detecting section for detecting electron beam emitted from the specimen, and a data correcting section for correcting the three-dimensional detection data to have specified relationship under the condition of a relative tilt angle between the specimen holder and the electron beam.
摘要翻译：根据本发明的电子束装置由用于发射电子束的电子束源，用于将电子束照射到试样上的电子光学系统，用于保持试样的试样保持器，用于产生检体保持体与电子束之间的相对倾斜角度，用于检测从样本发射的电子束的电子束检测部分，以及用于在相对倾斜的条件下校正三维检测数据以具有特定关系的数据校正部分样品架和电子束之间的角度。

7. 发明授权

US07539340B2 Apparatus and method for three-dimensional coordinate measurement 失效
标题翻译：用于三维坐标测量的装置和方法
公开(公告)号：US07539340B2
公开(公告)日：2009-05-26
申请号：US10830456
申请日：2004-04-23
申请人： Nobuo Kochi , Yasuko Tsuruga
发明人： Nobuo Kochi , Yasuko Tsuruga
IPC分类号： G06K9/00
CPC分类号： H01J37/28 , G01B15/04 , G06K9/209 , G06K2209/19 , G06T7/593 , H01J37/265 , H01J2237/2611
摘要： A three-dimensional coordinate measuring apparatus has a first and second incident angle adjusting sections for adjusting the attitude of the object in the directions of first and second neutral axes, respectively, to adjust the incident angle of the beam projected on the object from an imaging optical system relative to the object so that first and second stereoscopic images of the object can be formed, a matching process section for searching for corresponding points corresponding to measurement points in first and second search directions generally perpendicular to the first and second neutral axes, respectively, in the first and second stereoscopic images, and a shape measuring section for obtaining three-dimensional coordinate data of the object based on the relation between the measurement points and the corresponding points in the first and second stereoscopic images.
摘要翻译：三维坐标测量装置具有第一和第二入射角调节部分，用于分别调节物体在第一和第二中立轴线方向上的姿态，以调整投射在物体上的光束的入射角度与成像光学系统相对于物体，从而可以形成物体的第一和第二立体图像;匹配处理部分，用于分别搜索与第一和第二中立轴线大致垂直的第一和第二搜索方向上的测量点对应的点以及形状测量部分，用于基于第一和第二立体图像中的测量点和对应点之间的关系来获得对象的三维坐标数据。

8. 发明授权

US09182220B2 Image photographing device and method for three-dimensional measurement 有权
标题翻译：图像拍摄装置和三维测量方法
公开(公告)号：US09182220B2
公开(公告)日：2015-11-10
申请号：US13256543
申请日：2010-03-15
申请人： Nobuo Kochi , Takuya Moriyama
发明人： Nobuo Kochi , Takuya Moriyama
IPC分类号： H04N13/02 , G01B11/24
CPC分类号： G01B11/24 , G01B2210/52 , H04N13/20
摘要： An image photographing device for three-dimensional measurement sequentially photographs a measuring object in an overlapping manner by a single camera. The image photographing device for three-dimensional measurement photographs the measuring object with marks having self-other identifiable identification codes, extracts the marks from a photographed image, identifies the identification codes of the marks, defines an area of the measuring object in the photographed image into photographed areas surrounded by the marks, counts a number of photographing times of each of the photographed areas which are involved in different photographed images, groups the photographed areas in response to the number of photographing times, inputs positions of the marks in a coordinate space of a photographing range image of the measuring object, connects the positions of the marks input in the photographing range image such that mark symbols of the marks surrounding the photographed areas correspond to each other to match the photographed areas into the photographing range image, and indicates the photographed areas matched into the photographing range image.
摘要翻译：用于三维测量的图像拍摄装置通过单个相机以重叠的方式顺序拍摄测量对象。用于三维测量的图像拍摄装置用具有自身可识别识别码的标记拍摄测量对象，从拍摄图像中提取标记，识别标记的识别码，定义拍摄图像中的测量对象的区域在由标记包围的拍摄区域中，对涉及不同拍摄图像的每个拍摄区域的拍摄次数进行计数，根据拍摄次数对拍摄区域进行分组，将标记的位置输入到坐标空间测量对象的拍摄范围图像连接摄像范围图像中输入的标记的位置，使得拍摄区域周围的标记的标记符号彼此对应，以将拍摄区域匹配到拍摄范围图像中，并且指示拍摄区域与拍摄范围相匹配图片。

9. 发明授权

US08811718B2 Position measurement method, position measurement device, and program 有权
标题翻译：位置测量方法，位置测量装置和程序
公开(公告)号：US08811718B2
公开(公告)日：2014-08-19
申请号：US12980839
申请日：2010-12-29
申请人： Tetsuji Anai , Nobuo Kochi , Nobuyuki Fukaya
发明人： Tetsuji Anai , Nobuo Kochi , Nobuyuki Fukaya
IPC分类号： G06K9/00 , G01C11/10 , G01C11/06
CPC分类号： G01C11/10 , G01C11/06 , G06T7/74 , G06T2207/10012 , G06T2207/30244
摘要： A position measurement method includes an exterior orientation parameter correcting step S11 for correcting exterior orientation parameters calculated in a step S10, based on difference between photographing timing of an image and obtaining timing of a photographing position and/or a photographing posture measured outside, a bundle-adjusting step S12 for simultaneously adjusting a bundle of the exterior orientation parameters of one or more images and three-dimensional coordinates of characteristic points, based on the exterior orientation parameters corrected by the step S11, a three-dimensional coordinate calculating step S13 for calculating three-dimensional coordinates of characteristic points subsequently detected in an area in which the density of the characteristic points is decreased, based on the exterior orientation parameters adjusted bundle thereof, and a repeating step for repeating processing from the steps S10 to S13 until the image becomes a final image.
摘要翻译：位置测量方法包括：外部取向参数校正步骤S11，用于根据图像的拍摄定时和获得拍摄位置的定时和/或外部测量的拍摄姿势之间的差异来校正在步骤S10中计算的外部姿态参数; - 调整步骤S12，用于基于由步骤S11校正的外部取向参数，同时调整一个或多个图像的外部取向参数的束和特征点的三维坐标;三维坐标计算步骤S13，用于计算基于其特征点的密度减少的区域中随后检测到的特征点的三维坐标，以及重复步骤，用于从步骤S10至S13重复处理，直到图像变为最后的形象。

10. 发明申请

US20120127279A1 IMAGE PHOTOGRAPHING DEVICE AND METHOD FOR THREE-DIMENSIONAL MEASUREMENT 有权
标题翻译：图像摄影装置和三维测量方法
公开(公告)号：US20120127279A1
公开(公告)日：2012-05-24
申请号：US13256543
申请日：2010-03-15
申请人： Nobuo Kochi , Takuya Moriyama
发明人： Nobuo Kochi , Takuya Moriyama
IPC分类号： H04N13/02
CPC分类号： G01B11/24 , G01B2210/52 , H04N13/20
摘要： An image photographing device for three-dimensional measurement is provided that enables efficient photographing with just sufficient images in a case that a photographer uses a single camera to photograph while moving. An image photographing device 1 for three-dimensional measurement sequentially photographs a measuring object in an overlapping manner by a single camera. The image photographing device 1 for three-dimensional measurement photographs the measuring object 2 with marks having self-other identifiable identification codes, extracts the marks from a photographed image, identifies the identification codes of the marks, defines an area of the measuring object 2 in the photographed image into photographed areas surrounded by the marks, counts a number of photographing times of each of the photographed areas which are involved in different photographed images, groups the photographed areas in response to the number of photographing times, inputs positions of the marks in a coordinate space of a photographing range image of the measuring object 2, connects the positions of the marks input in the photographing range image such that mark symbols of the marks surrounding the photographed areas correspond to each other to match the photographed areas into the photographing range image, and indicates the photographed areas matched into the photographing range image.
摘要翻译：提供一种用于三维测量的图像拍摄装置，其在拍摄者使用单个相机在移动时拍摄的情况下能够仅利用足够的图像进行拍摄。用于三维测量的图像拍摄装置1通过单个相机以重叠的方式顺序拍摄测量对象。用于三维测量的图像拍摄装置1用具有自身可识别识别码的标记拍摄测量对象2，从拍摄图像中提取标记，识别标记的识别码，将测量对象2的区域定义在拍摄图像到由标记包围的拍摄区域中，对涉及不同拍摄图像的每个拍摄区域的拍摄次数进行计数，对拍摄区域进行响应于拍摄次数的组合，将标记的位置输入测量对象2的拍摄范围图像的坐标空间连接在拍摄范围图像中输入的标记的位置，使得拍摄区域周围的标记的标记符号彼此对应以将拍摄区域匹配成拍摄范围图像，并指示拍摄区域与照相机匹配 g范围图像。

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