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1. 发明授权

US5548130A DC superconducting quantum interference device with shield layer 失效
标题翻译：直流超导量子干涉器件与屏蔽层
公开(公告)号：US5548130A
公开(公告)日：1996-08-20
申请号：US366363
申请日：1994-12-29
申请人： Nobuhiro Shimizu , Norio Chiba , Satoru Yabe
发明人： Nobuhiro Shimizu , Norio Chiba , Satoru Yabe
IPC分类号： G01R33/035 , H01L39/22 , H01L29/06
CPC分类号： G01R33/0354 , H01L39/223 , Y10S505/846 , Y10S505/874
摘要： A DC SQUID has a first washer coil for forming a superconducting ring, Josephson junctions and a dampening resistor coupled to both ends of the first washer coil, and a shunting resistor connected in parallel to the Josephson junctions. An input coil is magnetically coupled with the first washer coil, and a first modulation coil is also magnetically coupled with the first washer coil. A ground plane comprising a superconducting film is disposed to cover an area of the Josephson junctions without covering the first washer coil for shielding the Josephson junctions from a magnetic noise. The ground plane prevents a magnetic flux trap from occurring, thus enabling stable operation of the DC SQUID. A washer cover comprising a superconducting film is disposed to cover only a slit portion of the first washer coil to prevent leakage of a magnetic field from the slit portion. The ground plane and the washer cover are simultaneously formed in a same layer of the DC SQUID. A second washer coil can be connected in series, or in parallel, with the first washer coil for forming the superconducting ring. The second washer coil is effective for canceling a uniform magnetic flux, thereby improving the operation of the DC SQUID.
摘要翻译： DC SQUID具有用于形成超导环的第一垫圈线圈，耦合到第一垫圈线圈两端的约瑟夫逊结和阻尼电阻器以及并联连接到约瑟夫逊结的分流电阻器。输入线圈与第一清洗线圈磁耦合，第一调制线圈也与第一清洗线圈磁耦合。包括超导膜的接地平面设置成覆盖约瑟夫逊结的区域，而不覆盖第一清洗线圈，用于屏蔽约瑟夫逊结与磁性噪声。接地平面可防止发生磁通陷阱，从而使DC SQUID稳定运行。设置包括超导膜的垫圈盖，以仅覆盖第一清洗线圈的狭缝部分，以防止来自狭缝部的磁场泄漏。接地平面和垫圈盖同时形成在同一层DC SQUID中。第二清洗线圈可以与第一垫圈线圈串联或并联连接，以形成超导环。第二清洗线圈对于消除均匀磁通有效，从而改善了DC SQUID的工作。

2. 发明授权

US5596273A Highly sensitive magnetic field detector using low-noise DC SQUID 失效
标题翻译：高灵敏度磁场检测器采用低噪声直流SQUID
公开(公告)号：US5596273A
公开(公告)日：1997-01-21
申请号：US306411
申请日：1994-09-15
申请人： Satoru Yabe , Norio Chiba , Satoshi Nakayama
发明人： Satoru Yabe , Norio Chiba , Satoshi Nakayama
IPC分类号： G01R33/035 , H01L39/22
CPC分类号： G01R33/0358 , Y10S505/846
摘要： DC-SQUID includes an input coil for transmitting an external magnetic field signal as a signal current from a detection coil, a washer coil to which the signal current is input as a signal magnetic flux, two Josephson devices for converting the signal magnetic flux transmitted to the washer coil to a signal voltage, shunt resistors and a damping resistor which are connected to each of the Josephson devices in parallel and in series respectively to extinguish the hysteresis of the current-voltage characteristic, and a feedback modulation coil to which a feedback and modulation current is transmitted from an external control circuit. The feedback modulation coil is arranged so as to linearly traverse over the upper portion or lower portion of the washer coil. The mutual inductance Mms between a washer coil and a feedback modulation coil is set to be smaller than the self inductance Lw of the washer coil, to thereby making the magnetic field sensitivity excellent, the SN ratio of an DS-SQUID is improved, and RF noises are reduced.
摘要翻译： DC-SQUID包括一个输入线圈，用于传输来自检测线圈的信号电流的外部磁场信号，输入信号电流的清洗线圈作为信号磁通;两个约瑟夫逊器件，用于将传输的信号磁通转换为将所述洗涤器线圈分配到信号电压，并联电阻器和阻尼电阻器，所述阻尼电阻器并联并且分别并联连接并分别串联以消除所述电流 - 电压特性的滞后，以及反馈调制线圈，反馈和调制电流从外部控制电路发送。反馈调制线圈布置成线性地横过清洗线圈的上部或下部。将洗涤器线圈和反馈调制线圈之间的互感Mms设定为小于洗涤器线圈的自感Lw，从而使得磁场灵敏度优异，DS-SQUID的SN比提高，RF 噪音减少。

3. 发明授权

US5329229A Magnetic field detection coils with superconducting wiring pattern on flexible film 失效
标题翻译：具有超导布线图案的磁场检测线圈在柔性膜上
公开(公告)号：US5329229A
公开(公告)日：1994-07-12
申请号：US914894
申请日：1992-07-15
申请人： Norio Chiba , Satoru Yabe , Akikazu Odawara , Satoshi Nakayama
发明人： Norio Chiba , Satoru Yabe , Akikazu Odawara , Satoshi Nakayama
IPC分类号： G01R33/022 , G01R33/035 , H01F5/08 , H01F27/28
CPC分类号： G01R33/0358 , G01R33/022 , Y10S505/846 , Y10S505/88 , Y10T29/4902
摘要： Superconducting detection coils for a superconducting quantum interference device are foraged on a flexible printed wiring film having a pair of opposed edges. The flexible printed wiring film is capable of being shaped into a cylinder by bringing the opposed edges toward each other. A superconducting wiring pattern is formed on the flexible printed wiring film and has at least one substantially U-shaped wiring portion. The U-shaped wiring portion forms at least two circular wiring patterns when the printed wiring film is shaped into a cylinder by bringing the opposed edges toward each other. The superconducting wiring pattern also has a first and a second electrode portion for connecting the circular wiring patterns to at least one superconducting quantum interference device. A resistor is electrically connected between the electrode portions of the superconducting wiring pattern.
摘要翻译：用于超导量子干涉装置的超导检测线圈用于具有一对相对边缘的柔性印刷布线膜上。柔性印刷布线膜能够通过使相对的边缘朝向彼此而成形为圆筒。在柔性印刷布线膜上形成超导布线图案，并且具有至少一个基本上U形的布线部分。当通过使相对的边缘朝向彼此而将印刷布线膜成形为圆筒时，U形布线部形成至少两个圆形布线图案。超导布线图案还具有用于将圆形布线图案连接到至少一个超导量子干涉装置的第一和第二电极部分。电阻器电连接在超导布线图案的电极部分之间。

4. 发明授权

US06703626B2 Mask defect repair method 有权
标题翻译：面膜缺损修复方法
公开(公告)号：US06703626B2
公开(公告)日：2004-03-09
申请号：US10047974
申请日：2002-01-15
申请人： Osamu Takaoka , Satoru Yabe
发明人： Osamu Takaoka , Satoru Yabe
IPC分类号： G01N2300
CPC分类号： G01N23/04 , G03F1/74
摘要： First, a region including the defect is observed with the atomic force microscope (AFM) and a pattern putting together the shape and position of the defect is extracted from and AFM image. The extracted pattern is then converted to a shape format for a for an ion beam defect repairing apparatus and transferred. At this time, a pattern that is observable with the ion beam defect repairing apparatus is selected as a position alignment pattern. The extracted/converted position alignment pattern is combined with a pattern corresponding to a secondary electron image or a secondary ion image. Repairing of the irradiation region and similar repairing is then performed with respect to matching processing for a pattern for a normal secondary ion image or secondary electron image for the ion beam defect repairing apparatus and extraction is performed by the AFM. A defect region finely adjusted using alignment of the position alignment pattern is then corrected using an ion beam.
摘要翻译：首先，用原子力显微镜（AFM）观察包括缺陷的区域，并从AFM图像中提取出缺陷的形状和位置的图案。然后将提取的图案转换成用于离子束缺陷修复装置的形状格式并进行转印。此时，选择使用离子束缺陷修复装置观察到的图案作为位置对准图案。提取/转换的位置对准图案与对应于二次电子图像或二次离子图像的图案组合。然后对于离子束缺陷修复装置的正常二次离子图像或二次电子图像的图案的匹配处理，进行照射区域的修复和类似的修复，并且通过AFM进行提取。然后使用离子束校正使用位置对准图案的对准精细调整的缺陷区域。

5. 发明授权

US6067062A Light valve device 失效
标题翻译：光阀装置
公开(公告)号：US6067062A
公开(公告)日：2000-05-23
申请号：US749292
申请日：1991-08-23
申请人： Hiroaki Takasu , Yoshikazu Kojima , Masaaki Kamiya , Tsuneo Yamazaki , Hiroshi Suzuki , Masaaki Taguchi , Ryuichi Takano , Satoru Yabe
发明人： Hiroaki Takasu , Yoshikazu Kojima , Masaaki Kamiya , Tsuneo Yamazaki , Hiroshi Suzuki , Masaaki Taguchi , Ryuichi Takano , Satoru Yabe
IPC分类号： G02F1/1337 , G02F1/136 , G02F1/1362 , G09G3/20 , G09G3/36 , G09G5/00 , H01L27/12
CPC分类号： G02F1/13454 , G02F1/13378 , G09G3/3648 , H01L27/1214 , H01L27/1251 , G02F1/136213 , G02F2202/105 , G09G2330/02 , G09G5/006
摘要： A light valve has a composite substrate comprised of an electrically insulating substrate and a semiconductor single crystal thin film formed over the electrically insulating substrate. A pixel array comprising semiconductor switch elements is formed in the semiconductor single crystal thin film. A peripheral circuit having circuit elements is formed in the semiconductor single crystal thin film so that a small-sized, high speed light valve is obtained. X- driver and Y-driver circuits are formed in the semiconductor single crystal thin film and controlled by a control circuit, such as a video signal processing circuit, which receives and processes video signals inputted directly from an external source. The peripheral circuit can be a DRAM sense amplifier for sensing charges stored in each pixel of the pixel array to detect defects in the pixel array. The peripheral circuit can be a photosensor circuit for detecting an intensity of incident light to monitor the performance of a light source of the light valve. The peripheral circuit can be a temperature sensor for detecting the temperature of a liquid crystal layer of the light valve, and may be comprised of Darlington connected NPN transistors formed in the semiconductor single crystal thin film. The peripheral circuit can also be a solar cell for converting incident light into electrical energy to supply power to at least one of the pixel array, X-driver and Y-driver circuits and the peripheral circuit.
摘要翻译：光阀具有由电绝缘基板和形成在电绝缘基板上的半导体单晶薄膜构成的复合基板。包含半导体开关元件的像素阵列形成在半导体单晶薄膜中。在半导体单晶薄膜中形成具有电路元件的外围电路，从而获得小型高速光阀。 X驱动器和Y驱动器电路形成在半导体单晶薄膜中，并由诸如视频信号处理电路的控制电路控制，该电路接收并处理从外部源直接输入的视频信号。外围电路可以是用于感测存储在像素阵列的每个像素中的电荷的DRAM读出放大器，以检测像素阵列中的缺陷。外围电路可以是用于检测入射光的强度以监视光阀的光源的性能的光电传感器电路。外围电路可以是用于检测光阀的液晶层的温度的温度传感器，并且可以由形成在半导体单晶薄膜中的达林顿连接的NPN晶体管组成。外围电路也可以是用于将入射光转换为电能以向像素阵列，X驱动器和Y驱动器电路和外围电路中的至少一个供电的太阳能电池。

6. 发明授权

US5637187A Light valve device making 失效
标题翻译：光阀装置制造
公开(公告)号：US5637187A
公开(公告)日：1997-06-10
申请号：US464075
申请日：1995-06-05
申请人： Hiroaki Takasu , Yoshikazu Kojima , Masaaki Kamiya , Tsuneo Yamazaki , Hiroshi Suzuki , Masaaki Taguchi , Ryuichi Takano , Satoru Yabe
发明人： Hiroaki Takasu , Yoshikazu Kojima , Masaaki Kamiya , Tsuneo Yamazaki , Hiroshi Suzuki , Masaaki Taguchi , Ryuichi Takano , Satoru Yabe
IPC分类号： G02F1/1337 , G02F1/136 , G02F1/1362 , G09G3/20 , G09G3/36 , G09G5/00 , H01L27/12 , H01L21/00
CPC分类号： G02F1/13454 , G02F1/13378 , G09G3/3648 , H01L27/1214 , H01L27/1251 , G02F1/136213 , G02F2202/105 , G09G2330/02 , G09G5/006
摘要： A process for forming a light valve device comprises forming a semiconductor single crystal film to form a composite substrate by polishing a semiconductor single crystal substrate after an electric insulating substrate has been bonded thereto; forming a group of pixel electrodes for defining a pixel region and a group of switch elements for selectively energizing the pixel electrodes by integrating a pixel array portion over the composite substrate; forming a liquid crystal aligning means for the pixel region; superposing an opposed substrate over the composite substrate with a gap therebetween; and filling the gap with liquid crystal material.
摘要翻译：形成光阀装置的方法包括：形成半导体单晶膜，以在电绝缘基板已经结合之后通过抛光半导体单晶基板来形成复合基板; 形成用于限定像素区域的一组像素电极和一组开关元件，用于通过在复合衬底上积分像素阵列部分来选择性地激励像素电极; 形成用于像素区域的液晶对准装置; 在复合基板上叠置相对的基板，其间具有间隙; 并用液晶材料填充间隙。

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