专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08159109B2 Microresonator 有权
标题翻译：微谐振器
公开(公告)号：US08159109B2
公开(公告)日：2012-04-17
申请号：US12850126
申请日：2010-08-04
申请人： Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
发明人： Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
IPC分类号： H01L21/00
CPC分类号： H03H9/2405 , H03H3/0072 , H03H2009/02496
摘要： A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
摘要翻译：一种微谐振器，包括单晶硅谐振元件和靠近谐振元件放置的至少一个激活电极，其中谐振元件放置在覆盖衬底的半导体层的开口中，激活电极形成在半导体层中并在开幕式的水平。

2. 发明申请

US20100295416A1 MICRORESONATOR 有权
标题翻译：微型计算机
公开(公告)号：US20100295416A1
公开(公告)日：2010-11-25
申请号：US12850126
申请日：2010-08-04
申请人： Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
发明人： Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
IPC分类号： H02N1/08
CPC分类号： H03H9/2405 , H03H3/0072 , H03H2009/02496
摘要： A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
摘要翻译：一种微谐振器，包括单晶硅谐振元件和靠近谐振元件放置的至少一个激活电极，其中谐振元件放置在覆盖衬底的半导体层的开口中，激活电极形成在半导体层中并在开幕式的水平。

3. 发明授权

US07858407B2 Microresonator 有权
标题翻译：微谐振器
公开(公告)号：US07858407B2
公开(公告)日：2010-12-28
申请号：US12266471
申请日：2008-11-06
申请人： Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
发明人： Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
IPC分类号： H01L21/00 , H02N2/00
CPC分类号： H03H9/2405 , H03H3/0072 , H03H2009/02496
摘要： A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
摘要翻译：一种微谐振器，包括单晶硅谐振元件和靠近谐振元件放置的至少一个激活电极，其中谐振元件放置在覆盖衬底的半导体层的开口中，激活电极形成在半导体层中并在开幕式的水平。

4. 发明申请

US20090152998A1 MICRORESONATOR 有权
标题翻译：微型计算机
公开(公告)号：US20090152998A1
公开(公告)日：2009-06-18
申请号：US12266471
申请日：2008-11-06
申请人： Nicolas Abele , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stephane Monfray , Fabrice Cassett
发明人： Nicolas Abele , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stephane Monfray , Fabrice Cassett
IPC分类号： H01L41/00 , H01L21/20
CPC分类号： H03H9/2405 , H03H3/0072 , H03H2009/02496
摘要： A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
摘要翻译：一种微谐振器，包括单晶硅谐振元件和靠近谐振元件放置的至少一个激活电极，其中谐振元件放置在覆盖衬底的半导体层的开口中，激活电极形成在半导体层中并在开幕式的水平。

5. 发明授权

US07565725B2 Method for forming a variable capacitor 有权
标题翻译：形成可变电容器的方法
公开(公告)号：US07565725B2
公开(公告)日：2009-07-28
申请号：US11512731
申请日：2006-08-30
申请人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
发明人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
IPC分类号： H01G7/00
CPC分类号： H01G5/16 , Y10T29/435 , Y10T29/49002 , Y10T29/4913 , Y10T29/49139 , Y10T29/49147 , Y10T29/49165 , Y10T83/0476 , Y10T83/0505 , Y10T83/051 , Y10T83/0577
摘要： A method for forming a variable capacitor including a conductive strip covering the inside of a cavity, and a flexible conductive membrane placed above the cavity, the cavity being formed according to the steps of: forming a recess in the substrate; placing a malleable material in the recess; having a stamp bear against the substrate at the level of the recess to give the upper part of the malleable material a desired shape; hardening the malleable material; and removing the stamp.
摘要翻译：一种形成可变电容器的方法，所述可变电容器包括覆盖空腔内部的导电条和位于所述空腔上方的柔性导电膜，所述空腔根据以下步骤形成：在所述基板中形成凹部; 将可延展材料放置在凹槽中; 在凹部的水平处具有抵靠基板的印模，以使可延展材料的上部具有期望的形状; 硬化可延展材料; 并移除邮票。

6. 发明申请

US20070087513A1 Method for forming a variable capacitor 有权
标题翻译：形成可变电容器的方法
公开(公告)号：US20070087513A1
公开(公告)日：2007-04-19
申请号：US11512731
申请日：2006-08-30
申请人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
发明人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
IPC分类号： H01L21/76 , H01L21/20
CPC分类号： H01G5/16 , Y10T29/435 , Y10T29/49002 , Y10T29/4913 , Y10T29/49139 , Y10T29/49147 , Y10T29/49165 , Y10T83/0476 , Y10T83/0505 , Y10T83/051 , Y10T83/0577
摘要： A method for forming a variable capacitor including a conductive strip covering the inside of a cavity, and a flexible conductive membrane placed above the cavity, the cavity being formed according to the steps of: forming a recess in the substrate; placing a malleable material in the recess; having a stamp bear against the substrate at the level of the recess to give the upper part of the malleable material a desired shape; hardening the malleable material; and removing the stamp.
摘要翻译：一种形成可变电容器的方法，所述可变电容器包括覆盖空腔内部的导电条和位于所述空腔上方的柔性导电膜，所述空腔根据以下步骤形成：在所述基板中形成凹部; 将可延展材料放置在凹槽中; 在凹部的水平处具有抵靠基板的印模，以使可延展材料的上部具有期望的形状; 硬化可延展材料; 并移除邮票。

7. 发明申请

US20050199970A1 Electromechanical resonator and method for fabricating such a resonator 有权
标题翻译：机电谐振器及其制造方法
公开(公告)号：US20050199970A1
公开(公告)日：2005-09-15
申请号：US10895616
申请日：2004-07-21
申请人： Stephane Monfray , Pascal Ancey , Thomas Skotnicki , Karim Segueni
发明人： Stephane Monfray , Pascal Ancey , Thomas Skotnicki , Karim Segueni
IPC分类号： B81B3/00 , H03H9/24 , H01L27/14
CPC分类号： H03H9/2405 , H03H2009/02511
摘要： An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).
摘要翻译：机电谐振器包括设置有由绝缘区限定的有源区（ZA）的单晶硅衬底（S），由绝缘区上的至少一个自由端锚定的振动束（10），并且包括单晶硅衬底硅振动中心部分（12）和布置在梁的上方并且承载在活动区上的控制电极（E）。光束的中心部分（12）与有源区（ZA）和控制电极（E）分离。

8. 发明授权

US07196451B2 Electromechanical resonator and method for fabricating such a resonator 有权
标题翻译：机电谐振器及其制造方法
公开(公告)号：US07196451B2
公开(公告)日：2007-03-27
申请号：US10895616
申请日：2004-07-21
申请人： Stephane Monfray , Pascal Ancey , Thomas Skotnicki , Karim Segueni
发明人： Stephane Monfray , Pascal Ancey , Thomas Skotnicki , Karim Segueni
IPC分类号： H02N1/00
CPC分类号： H03H9/2405 , H03H2009/02511
摘要： An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).
摘要翻译：机电谐振器包括设置有由绝缘区限定的有源区（ZA）的单晶硅衬底（S），由绝缘区上的至少一个自由端锚定的振动束（10），并且包括单晶硅衬底硅振动中心部分（12）和布置在梁的上方并且承载在活动区上的控制电极（E）。光束的中心部分（12）与有源区（ZA）和控制电极（E）分离。

9. 发明授权

US08212324B2 Micro-electromechanical resonance device with periodic structure 有权
标题翻译：具有周期性结构的微机电共振装置
公开(公告)号：US08212324B2
公开(公告)日：2012-07-03
申请号：US12419125
申请日：2009-04-06
申请人： Gregory Caruyer , Karim Segueni , Pascal Ancey , Bertrand Dubus
发明人： Gregory Caruyer , Karim Segueni , Pascal Ancey , Bertrand Dubus
IPC分类号： H01L29/84 , H01L21/00
CPC分类号： H03H9/02338 , H03H9/02433 , H03H9/2436 , H03H9/2463
摘要： A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.
摘要翻译：微机电系统谐振装置包括连接到具有输入频率的交流电源的基板和输入电极。该装置还包括输出电极和连接到基板的至少一个锚定结构。该装置还包括通过至少一个接头连接到锚固结构的振动结构，具有自然的声共振频率。在输入电极的作用下，在输入电极的作用下的振动在输出电极上产生交流电流，其中输出频率等于固有频率。振动结构和/或锚定结构包括周期性结构。周期性结构至少包括彼此不同的第一和第二区，并且分别对应于第一和第二声学传播特性。

10. 发明申请

US20090289314A1 MICRO-ELECTROMECHANICAL RESONANCE DEVICE WITH PERIODIC STRUCTURE 有权
标题翻译：具有周期结构的微机电谐振器件
公开(公告)号：US20090289314A1
公开(公告)日：2009-11-26
申请号：US12419125
申请日：2009-04-06
申请人： Gregory CARUYER , Karim Segueni , Pascal Ancey , Bertrand Dubus
发明人： Gregory CARUYER , Karim Segueni , Pascal Ancey , Bertrand Dubus
IPC分类号： H01L29/84 , H01L21/30
CPC分类号： H03H9/02338 , H03H9/02433 , H03H9/2436 , H03H9/2463
摘要： A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.
摘要翻译：微机电系统谐振装置包括连接到具有输入频率的交流电源的基板和输入电极。该装置还包括输出电极和连接到基板的至少一个锚定结构。该装置还包括通过至少一个接头连接到锚固结构的振动结构，具有自然的声共振频率。在输入电极的作用下，在输入电极的作用下的振动在输出电极上产生交流电流，其中输出频率等于固有频率。振动结构和/或锚定结构包括周期性结构。周期性结构至少包括彼此不同的第一和第二区，并且分别对应于第一和第二声学传播特性。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式