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1. 发明申请

US20090050487A1 Direct Nanoscale Patterning of Metals Using Polymer Electrolytes 有权
标题翻译：使用聚合物电解质的金属的直接纳米尺度图案化
公开(公告)号：US20090050487A1
公开(公告)日：2009-02-26
申请号：US12122967
申请日：2008-05-19
申请人： Nicholas X. FANG , Placid M. FERREIRA , Keng Hao HSU , Peter Lee SCHULTZ , Kyle E. JACOBS , Anil KUMAR
发明人： Nicholas X. FANG , Placid M. FERREIRA , Keng Hao HSU , Peter Lee SCHULTZ , Kyle E. JACOBS , Anil KUMAR
IPC分类号： C25D5/02
CPC分类号： B23H3/00 , B23H3/04 , B81C1/0046 , B81C2201/0154 , C25D1/00 , C25D1/006 , C25D5/02 , C25D11/22 , C25D17/007 , G01Q80/00 , H01L21/32134 , H05K3/07 , H05K2203/0108 , H05K2203/0117
摘要： Disclosed herein are electrochemical fabrication platforms for making structures, arrays of structures and functional devices having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations. Methods, systems and system components use an electrochemical stamping tool such as solid state polymeric electrolytes for generating patterns of relief and/or recessed features exhibiting excellent reproducibility, pattern fidelity and resolution on surfaces of solid state ionic conductors and in metal. Electrochemical stamping tools are capable high throughput patterning of large substrate areas, are compatible with commercially attractive manufacturing pathways to access a range of functional systems and devices including nano- and micro-electromechanical systems, sensors, energy storage devices, metal masks for printing, interconnects, and integrated electronic circuits.
摘要翻译：本文公开了用于制造具有选定的纳米尺寸和/或微尺寸物理尺寸，形状和空间取向的结构，结构阵列和功能装置的电化学制造平台。方法，系统和系统组件使用电化学冲压工具，例如固态聚合物电解质，用于产生在固态离子导体和金属表面上显示出优异的再现性，图案保真度和分辨率的浮雕和/或凹陷特征图案。电化学冲压工具能够对大衬底区域进行高通量图案化，与商业上有吸引力的制造途径兼容，以访问一系列功能系统和设备，包括纳米和微机电系统，传感器，能量存储设备，印刷用金属掩模，互连，和集成电子电路。

2. 发明申请

US20130036928A1 NON-CONTACT TRANSFER PRINTING 有权
标题翻译：非接触式转印
公开(公告)号：US20130036928A1
公开(公告)日：2013-02-14
申请号：US13549291
申请日：2012-07-13
申请人： John A. ROGERS , Placid M. FERREIRA , Reza SAEIDPOURAZAR
发明人： John A. ROGERS , Placid M. FERREIRA , Reza SAEIDPOURAZAR
IPC分类号： B41F33/00
CPC分类号： B41F16/00 , B41J2/475
摘要： A transfer printing process that exploits the mismatch in mechanical or thermo-mechanical response at the interface of a printable micro- or nano-device and a transfer stamp to drive the release of the device from the stamp and its non-contact transfer to a receiving substrate are provided. The resulting facile, pick-and-place process is demonstrated with the assembling of 3-D microdevices and the printing of GAN light-emitting diodes onto silicon and glass substrates. High speed photography is used to provide experimental evidence of thermo-mechanically driven release.
摘要翻译：一种利用机械或热机械反应在可印刷的微型或纳米器件的接口上的不匹配的转移印刷方法和转印印模，以将装置从印模及其非接触转印释放到接收衬底。通过组装3-D微型器件和将GAN发光二极管印刷到硅和玻璃基板上，可以显示出所得到的轻便，拾取和放置过程。高速摄影用于提供热机械驱动释放的实验证据。

3. 发明申请

US20100001616A1 High Precision Silicon-on-Insulator MEMS Parallel Kinematic Stages 有权
标题翻译：高精度绝缘体上硅MEMS平行运动阶段
公开(公告)号：US20100001616A1
公开(公告)日：2010-01-07
申请号：US12437051
申请日：2009-05-07
申请人： Placid M. FERREIRA , Jingyan DONG , Deepkishore MUKHOPADHYAY
发明人： Placid M. FERREIRA , Jingyan DONG , Deepkishore MUKHOPADHYAY
IPC分类号： H02N1/00 , C23C14/34
CPC分类号： H02N1/008
摘要： MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably connect the actuator to a movable end stage provide independent motion from each of the actuators that minimizes unwanted off-axis displacement, particularly for three-dimensional movement of a cantilever. Also provided are methods for using and making MEMS stages. In an aspect, a process provides a unitary MEMS stage made from a silicon-on-insulator wafer that avoids any post-fabrication assembly steps. Further provided are various devices that incorporate any of the stages disclosed herein, such as devices requiring accurate positioning systems in applications including scanning probe microscopy, E-jet printing, near-field optic sensing, cell probing and material characterization.
摘要翻译：包括多个梳状驱动致动器的MEMS级提供微型和高达纳米定位能力。将致动器可操作地连接到可动端部的挠性铰链和折叠弹簧提供了每个致动器的独立运动，其使不需要的偏轴位移最小化，特别是对于悬臂的三维运动。还提供了使用和制造MEMS级的方法。在一个方面，一种方法提供了由绝缘体上硅晶片制成的整体MEMS级，避免了任何制后组装步骤。还提供了包括本文公开的任何阶段的各种装置，例如在应用中需要精确定位系统的装置，包括扫描探针显微镜，E喷射印刷，近场光学感测，细胞探测和材料表征。

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