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    • 1. 发明申请
    • Non-Volatile Semiconductor Memory Device
    • 非易失性半导体存储器件
    • US20090090961A1
    • 2009-04-09
    • US12246193
    • 2008-10-06
    • Natsuo AjikaShoji ShukuriSatoshi ShimizuTaku Ogura
    • Natsuo AjikaShoji ShukuriSatoshi ShimizuTaku Ogura
    • H01L29/792H01L21/336
    • H01L27/11568G11C16/0441G11C16/0491H01L21/26586H01L29/792
    • A non-volatile semiconductor device includes an n type well formed in a semiconductor substrate having a surface, the surface having a plurality of stripe shaped grooves and a plurality of stripe shaped ribs, a plurality of stripe shaped p type diffusion regions formed in upper parts of each of the plurality of ribs, the plurality of stripe shaped p type diffusion regions being parallel to a longitudinal direction of the ribs, a tunneling insulation film formed on the grooves and the ribs, a charge storage layer formed on the tunneling insulating film, a gate insulation film formed on the charge storage layer, and a plurality of stripe shaped conductors formed on the gate insulating film, the plurality of stripe shaped conductors arranged in a direction intersecting the longitudinal direction of the ribs with a predetermined interval wherein an impurity diffusion structure in the ribs are asymmetric.
    • 非易失性半导体器件包括在具有表面的半导体衬底中形成的n型阱,表面具有多个条形槽和多个条状肋,多个条形p型扩散区形成在上部 所述多个条状p型扩散区域与所述肋的长度方向平行,形成在所述槽和所述肋上的隧道绝缘膜,形成在所述隧道绝缘膜上的电荷存储层, 形成在电荷存储层上的栅极绝缘膜和形成在栅极绝缘膜上的多个条状导体,所述多个条状导体沿着与肋的纵向相交的方向以预定间隔布置,其中杂质扩散 肋骨中的结构是不对称的。
    • 2. 发明授权
    • Non-volatile semiconductor memory device and manufacturing method thereof
    • 非易失性半导体存储器件及其制造方法
    • US08492826B2
    • 2013-07-23
    • US12782378
    • 2010-05-18
    • Natsuo AjikaShoji ShukuriSatoshi ShimizuTaku Ogura
    • Natsuo AjikaShoji ShukuriSatoshi ShimizuTaku Ogura
    • H01L29/788
    • H01L29/792G11C16/0441G11C16/0491H01L21/26586H01L27/11568H01L29/66833
    • A non-volatile semiconductor device includes an n type well formed in a semiconductor substrate having a surface, the surface having a plurality of stripe shaped grooves and a plurality of stripe shaped ribs, a plurality of stripe shaped p type diffusion regions formed in upper parts of each of the plurality of ribs, the plurality of stripe shaped p type diffusion regions being parallel to a longitudinal direction of the ribs, a tunneling insulation film formed on the grooves and the ribs, a charge storage layer formed on the tunneling insulating film, a gate insulation film formed on the charge storage layer, and a plurality of stripe shaped conductors formed on the gate insulating film, the plurality of stripe shaped conductors arranged in a direction intersecting the longitudinal direction of the ribs with a predetermined interval wherein an impurity diffusion structure in the ribs are asymmetric.
    • 非易失性半导体器件包括在具有表面的半导体衬底中形成的n型阱,表面具有多个条形槽和多个条状肋,多个条形p型扩散区形成在上部 所述多个条状p型扩散区域与所述肋的长度方向平行,形成在所述槽和所述肋上的隧道绝缘膜,形成在所述隧道绝缘膜上的电荷存储层, 形成在电荷存储层上的栅极绝缘膜和形成在栅极绝缘膜上的多个条状导体,所述多个条状导体沿着与肋的纵向相交的方向以预定间隔布置,其中杂质扩散 肋骨中的结构是不对称的。
    • 5. 发明授权
    • Non-volatile semiconductor memory device
    • 非易失性半导体存储器件
    • US08106443B2
    • 2012-01-31
    • US12246193
    • 2008-10-06
    • Natsuo AjikaShoji ShukuriSatoshi ShimizuTaku Ogura
    • Natsuo AjikaShoji ShukuriSatoshi ShimizuTaku Ogura
    • H01L29/792H01L21/336
    • H01L27/11568G11C16/0441G11C16/0491H01L21/26586H01L29/792
    • A non-volatile semiconductor device includes an n type well formed in a semiconductor substrate having a surface, the surface having a plurality of stripe shaped grooves and a plurality of stripe shaped ribs, a plurality of stripe shaped p type diffusion regions formed in upper parts of each of the plurality of ribs, the plurality of stripe shaped p type diffusion regions being parallel to a longitudinal direction of the ribs, a tunneling insulation film formed on the grooves and the ribs, a charge storage layer formed on the tunneling insulating film, a gate insulation film formed on the charge storage layer, and a plurality of stripe shaped conductors formed on the gate insulating film, the plurality of stripe shaped conductors arranged in a direction intersecting the longitudinal direction of the ribs with a predetermined interval wherein an impurity diffusion structure in the ribs are asymmetric.
    • 非易失性半导体器件包括在具有表面的半导体衬底中形成的n型阱,表面具有多个条形槽和多个条状肋,多个条形p型扩散区形成在上部 所述多个条状p型扩散区域与所述肋的长度方向平行,形成在所述槽和所述肋上的隧道绝缘膜,形成在所述隧道绝缘膜上的电荷存储层, 形成在电荷存储层上的栅极绝缘膜和形成在栅极绝缘膜上的多个条状导体,所述多个条状导体沿着与肋的纵向相交的方向以预定间隔布置,其中杂质扩散 肋骨中的结构是不对称的。