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    • 9. 发明授权
    • Energy beam irradiating apparatus
    • 能量束照射装置
    • US07184382B2
    • 2007-02-27
    • US10806119
    • 2004-03-23
    • Katsuyuki NakadaMitsuru Takai
    • Katsuyuki NakadaMitsuru Takai
    • G11B7/00
    • G11B7/261G11B5/84G11B17/025G11B23/00G11B25/04
    • An energy beam irradiating apparatus includes a substrate holder, a moving stage, an energy beam irradiating mechanism, and a control unit. A disc-like substrate is attached to the substrate holder which includes a holder main part on which the disc-like substrate is mounted and a pressing plate, the disc-like substrate being held between the holder main part and the pressing plate with a formation region of an irradiation pattern on the disc-like substrate and a partial region of at least one of an outer edge and an inner edge of the disc-like substrate being exposed. The moving stage moves the substrate holder. The energy beam irradiating mechanism irradiates a surface of the disc-like substrate attached to the substrate holder with an energy beam. The control unit causes the moving stage to move based on a movement pattern with a reference point set in advance on the moving stage as a reference so that an irradiation pattern is formed on the surface of the disc substrate by irradiation with the energy beam. During formation of the irradiation pattern, the control unit calculates a center of the disc-like substrate based on at least one part of an outline of the exposed outer edge or inner edge of the disc-like substrate and sets the calculated center as the reference point.
    • 能量束照射装置包括基板保持件,移动台,能量束照射机构和控制单元。 盘状基板安装在基板保持器上,该基板保持器包括安装有盘状基板的保持器主体部分和压板,该盘状基板保持在保持器主体部分和压板之间,其形成 盘状基板上的照射图案的区域和盘状基板的外边缘和内边缘中的至少一个的部分区域露出。 移动台移动衬底支架。 能量束照射机构用能量束照射安装在基板保持架上的盘状基板的表面。 控制单元基于在移动台上预先设定的基准点的移动图案作为基准使移动台移动,使得通过用能量束照射在盘基板的表面上形成照射图案。 在形成照射图案期间,控制单元基于盘状基板的暴露的外边缘或内边缘的轮廓的至少一部分来计算盘状基板的中心,并将计算的中心设置为基准 点。