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    • 5. 发明授权
    • Method of forming on a semiconductor substrate a capacitor electrode having hemispherical grains
    • 在半导体衬底上形成具有半球形晶粒的电容器电极的方法
    • US06362044B1
    • 2002-03-26
    • US09665134
    • 2000-09-19
    • Akira ShimizuYukihiro MoriSatoshi Takahashi
    • Akira ShimizuYukihiro MoriSatoshi Takahashi
    • H01L218242
    • H01L28/84
    • An improved capacitor electrode made of polysilicon having a rough surface on a semiconductor substrate is formed by (a) removing a spontaneous oxidation film adhering to an amorphous silicon surface; (b) heating the amorphous silicon to a designated temperature; (c) spraying SiH4 at a designated temperature on the amorphous silicon to form an amorphous silicon/polysilicon mixed-phase active layer on the surface; (d) annealing at a designated temperature to form an HSG so as to roughen the amorphous silicon surface; (e) PH3-annealing the HSG-forming polysilicon, wherein PH3 is introduced at a designated concentration at the start of heating to a designated temperature; and (f) nitriding the amorphous silicon surface at the stated temperature by continuously introducing NH3 gas instead of PH3.
    • 通过(a)去除附着在非晶硅表面上的自发氧化膜,形成由半导体衬底上具有粗糙表面的多晶硅制成的改进的电容器电极; (b)将非晶硅加热至指定温度; (c)在指定温度下在非晶硅上喷涂SiH4,以在表面上形成非晶硅/多晶硅混合相活性层; (d)在指定温度退火以形成HSG,以粗化非晶硅表面; (e)对形成HSG的多晶硅进行PH3退火,其中在加热开始时以指定浓度引入PH3至指定温度; 和(f)通过连续引入NH 3气体代替PH 3,在所述温度下氮化非晶硅表面。
    • 9. 发明授权
    • Printer with frame produced by press-forming sheet metal
    • 具有由压制成型金属板制成的框架的打印机
    • US08087839B2
    • 2012-01-03
    • US12078944
    • 2008-04-08
    • Yoshinari TakabatakeTadashi OhtakaYukihiro Mori
    • Yoshinari TakabatakeTadashi OhtakaYukihiro Mori
    • B41J29/02B41J13/10
    • B41J2/32B41J11/04B41J15/042B41J29/02B41J29/38
    • A disclosed printer includes a frame; a thermal head attached to the frame; a platen roller drive motor attached to the frame; a reduction gear train attached to the frame and configured to reduce the speed of rotation generated by the platen roller drive motor; and a platen roller detachably attached to the frame and configured to be driven by the platen roller drive motor via the reduction gear train and to feed paper while pressing the paper against the thermal head. The frame is produced by press-forming sheet metal and includes a horizontal plate part, a backboard part rising vertically from a back edge of the horizontal plate part, sideboard parts rising vertically from corresponding side edges of the horizontal plate part, and a projecting part protruding outward from an edge of one of the sideboard parts and forming a surrounding part of a gearbox.
    • 所公开的打印机包括框架; 附着在框架上的热敏头; 安装在框架上的压纸辊驱动马达; 附接到所述框架并且被构造成减小由所述压纸辊驱动电动机产生的旋转速度的减速齿轮系; 以及压板辊,其可拆卸地附接到所述框架并且构造成由所述压纸辊驱动电动机经由所述减速齿轮系驱动,并且在将所述纸压在所述热敏头上的同时进给纸。 该框架由冲压成形金属板制成,包括水平板部分,从水平板部分的后边缘竖直升起的背板部分,从水平板部分的相应侧边缘竖直升起的侧板部分,以及突出部分 从侧板部件之一的边缘向外突出并形成齿轮箱的周围部分。