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    • 1. 发明申请
    • Sterilization/Aseptization Apparatus
    • 灭菌/消毒装置
    • US20100221155A1
    • 2010-09-02
    • US12084038
    • 2006-10-24
    • Naohiro ShimizuMasahiro WakitaYuichiro Imanishi
    • Naohiro ShimizuMasahiro WakitaYuichiro Imanishi
    • A61L2/02B01J19/12A61L2/10A61L2/14
    • A61L2/10A61L2/14
    • An aseptization apparatus 1 includes a sealed container 11 forming an aseptization space 191, a nitrogen gas supplying system 12 for converting atmosphere of the aseptization space 191 into nitrogen atmosphere, an electrode pair 13 disposed in the aseptization space 191, a pulse power supply 14 for repeatedly applying an electric pulse to the electrode pair 13, and a mirror 15 for returning a short-wavelength ultraviolet ray going from inside of the aseptization space 191 to outside to inside of the aseptization space 191. In a state where an aseptization object substance ST1 is present in a plasma generation region 192 between the electrode pair 13, the aseptization apparatus 1 causes a pulse electric field generated by electric pulse application to the electrode pair 13, a nitrogen radical 195 contained in plasma generated in nitrogen atmosphere resulting from fine streamer discharge, and a short-wavelength ultraviolet ray 196 emitted by nitrogen atmosphere resulting from fine streamer discharge to act on bacteria for aseptization of the aseptization object substance ST1.
    • 无菌化装置1包括形成无菌空间191的密闭容器11,将无菌空间191的气氛转换成氮气的氮气供给系统12,设置在无菌空间191内的电极对13,用于 向电极对13反复施加电脉冲,以及将从无菌化空间191的内部返回的短波长的紫外线返回到无菌化空间191的外部至内部的反射镜15.在无菌化物质ST1 存在于电极对13之间的等离子体产生区域192中,无菌化装置1使通过电脉冲施加到电极对13产生的脉冲电场,由氮气气氛中产生的等离子体中产生的细流光放电产生的氮自由基195 和由细流引起的氮气气体发射的短波长紫外线196 排出作用于细菌以对无菌物质ST1进行无菌化处理。
    • 2. 发明申请
    • Surface treatment apparatus
    • 表面处理装置
    • US20080245478A1
    • 2008-10-09
    • US12081913
    • 2008-04-23
    • Eiki HottaNaohiro ShimizuYuichiro Imanishi
    • Eiki HottaNaohiro ShimizuYuichiro Imanishi
    • C23F1/00C23C16/448
    • H01J37/32706H01J37/32009H01J37/3233H05H1/2406H05H2001/2412
    • A surface treatment apparatus encompasses a gas introducing system configured to introduce a process gas from downstream end of a tubular treatment object; a vacuum evacuating system configured to evacuate the process gas from other end of the treatment object; an excited particle supplying system disposed at upstream side of the treatment object, configured to supply excited particles for inducing initial discharge in a main body of the treatment object; and a first main electrode and a second main electrode disposed oppositely to each other, defining a treating region of the treatment object as a main plasma generating region disposed therebetween, wherein the excited particle supplying system is driven at least until generation of main plasma, and main pulse of duty ratio of 10−7 to 10−1 is applied across the first main electrode and second main electrode, to generate a non-thermal equilibrium plasma flow in the inside of the treatment object, and thereby an inner surface of the treatment object is treated.
    • 表面处理装置包括:气体导入系统,其构造成从管状处理对象的下游端引入处理气体; 真空排气系统,其构造成从处理对象的另一端抽出处理气体; 设置在处理对象的上游侧的激发粒子供给系统,被配置为在被处理体的主体内供给用于引发初始排出的激发粒子; 以及相对设置的第一主电极和第二主电极,将处理对象的处理区域设定为设置在其间的主等离子体产生区域,其中所述激发粒子供给系统至少被驱动至主等离子体的产生,以及 在第一主电极和第二主电极上施加10 -7至10 -6的主脉冲占空比,以在第一主电极和第二主电极中产生非热平衡等离子体流 在处理对象内部,从而处理对象的内表面。
    • 4. 发明申请
    • surface treatment apparatus
    • 表面处理装置
    • US20080193330A1
    • 2008-08-14
    • US11826957
    • 2007-07-19
    • Eiki HottaNaohiro ShimizuYuichiro Imanishi
    • Eiki HottaNaohiro ShimizuYuichiro Imanishi
    • A61L2/14
    • H01J37/3244H01J37/32009
    • A surface treatment apparatus encompasses a gas introducing system configured to introduce a process gas from one end of a tubular treatment object; a vacuum evacuating system configured to evacuate the process gas from other end of the treatment object; an excited particle supplying system disposed at the gas supply upstream side to the treatment object, configured to supply excited particles for inducing initial discharge in a main body of the treatment object; and a first main electrode and a second main electrode disposed oppositely to each other, defining a treating region of the treatment object as a main plasma generating region disposed therebetween, wherein the excited particle supplying system is driven at least until generation of main plasma, and main pulse of duty ratio of 10−7 to 10−1 is applied between the first main electrode and second main electrode, to generate a non-thermal equilibrium plasma flow inside the treatment object, and thereby an inner surface of the treatment object is treated.
    • 表面处理装置包括:气体导入系统,其构造成从管状处理物体的一端引入处理气体; 真空排气系统,其构造成从处理对象的另一端抽出处理气体; 设置在处理对象的气体供给上游侧的激发粒子供给系统,被配置为在被处理体的主体中供给用于引发初始排出的激发粒子; 以及相对设置的第一主电极和第二主电极,将处理对象的处理区域设定为设置在其间的主等离子体产生区域,其中所述激发粒子供给系统至少被驱动至主等离子体的产生,以及 在第一主电极和第二主电极之间施加占空比为10 -7至10 -1的主脉冲,以在第一主电极和第二主电极之间产生非热平衡等离子体流 处理对象,从而处理对象的内表面。
    • 9. 发明授权
    • Semiconductor device with reverse conducting faculty
    • 具有反向传导技术的半导体器件
    • US06403988B2
    • 2002-06-11
    • US09776577
    • 2001-02-02
    • Katsuji IidaTakeshi SakumaYuichiro ImanishiNaohiro Shimizu
    • Katsuji IidaTakeshi SakumaYuichiro ImanishiNaohiro Shimizu
    • H01L2974
    • H01L27/0817
    • A semiconductor device constructed as a reverse conducting static induction thyristor including a thyristor section 114 formed by an n− silicon substrate 101, p+ gate regions 102, 104 formed in one surface of the substrate, a p+ anode region 111 formed in the other surface of the substrate, a main diode section 134 having a cathode region formed by the silicon substrate and an anode region 131 formed in the one surface of the substrate, and a series arrangement 145 of diodes including plural p+ anode regions 142, plural n+ cathode contact regions 143 formed in the first surface of the substrate, and plural conductive layers 144 connecting these anode regions and cathode contact legions successively. An anode and a cathode of the series arrangement of diodes are connected to a cathode electrode 110 and an anode electrode 113 of the thyristor section. Each of diodes in the series arrangement has a breakdown voltage lower than that of the thyristor section.
    • 构成为反向导电静电感应晶闸管的半导体器件,包括形成在衬底的一个表面中的由n-硅衬底101,p +栅极区102,104形成的晶闸管部114,形成在衬底的另一个表面中的p +阳极区111 基板,具有由硅基板形成的阴极区域的主二极管部分134和形成在基板的一个表面中的阳极区域131以及包括多个p +阳极区域142的二极管的串联布置145,多个n +阴极接触区域 143和形成在基板的第一表面中的多个导体层144,以及连接这些阳极区域和阴极接触部分的多个导电层144。 二极管串联布置的阳极和阴极连接到晶闸管部分的阴极电极110和阳极电极113。 串联装置中的每个二极管的击穿电压低于晶闸管部分的击穿电压。
    • 10. 发明授权
    • Reverse conducting thyristor with a planar-gate, buried-gate, or
recessed-gate structure
    • 具有平面栅极,掩埋栅极或凹入栅极结构的反向导通晶闸管
    • US5682044A
    • 1997-10-28
    • US591420
    • 1996-01-19
    • Takashige TamamushiKimihiro MuraokaYoshiaki IkedaKeun Sam LeeNaohiro ShimizuMasashi YuraKinji Yoshioka
    • Takashige TamamushiKimihiro MuraokaYoshiaki IkedaKeun Sam LeeNaohiro ShimizuMasashi YuraKinji Yoshioka
    • H01L29/74H01L31/111
    • H01L29/7416
    • The present invention provides a reverse conducting (RC) thyristor of a planar-gate structure for low-and-medium power use which is relatively simple in construction because of employing a planar structure for each of thyristor and diode regions, permits simultaneous formation of the both region and have high-speed performance and a RC thyristor of a buried-gate or recessed-gate structure which has a high breakdown voltage by the use of a buried-gate or recessed-gate structure, permits simultaneous formation of thyristor and diode regions and high-speed, high current switching performance, and the RC thyristor of the planar-gate structure has a construction which comprises an SI thyristor or miniaturized GTO of a planar-gate structure in the thyristor region and an SI diode of a planar structure in the diode region, the diode region having at its cathode side a Schottky contact between n emitters or diode cathode shorted region and the thyristor region having at its anode side an SI anode shorted structure formed by p.sup.+ anode layers, wave-shaped anode layers or anode n.sup.+ layers; in the case of a high breakdown device, an n buffer layer is added; similarly the RC thyristor of the buried-gate or recessed-gate structure has a construction which comprises an SI thyristor of a buried-gate or recessed-gate structure at the thyristor region and an SI diode of the buried or recessed structure.
    • 本发明提供了一种用于中低功率使用的平面栅极结构的反向导通(RC)晶闸管,由于采用晶体管和二极管区域中的每一个的平面结构,其结构相对简单,允许同时形成 具有高速性能和通过使用掩埋栅极或凹入栅极结构具有高击穿电压的掩埋栅极或凹入栅极结构的RC晶闸管,允许同时形成晶闸管和二极管区域 和高速,高电流开关性能,并且平面栅极结构的RC晶闸管具有在晶闸管区域中包括SI晶闸管或平面栅极结构的小型化GTO以及平面结构的SI二极管的结构 二极管区域,二极管区域在其阴极侧具有n个发射极或二极管阴极短路区域之间的肖特基接触,并且在其阳极侧具有SI a的晶闸管区域 由p +阳极层,波形阳极层或阳极n +层形成的短路结构; 在高击穿装置的情况下,添加n缓冲层; 类似地,埋入栅极或凹入栅极结构的RC晶闸管具有包括在晶闸管区域处的掩埋栅极或凹入栅极结构的SI晶闸管和埋入或凹陷结构的SI二极管的结构。