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    • 6. 发明申请
    • Optical Interferometric Apparatus for Real-Time Full-Field Thickness Inspection and Method Thereof
    • 用于实时全场厚度检测的光学干涉仪及其方法
    • US20150204655A1
    • 2015-07-23
    • US14461548
    • 2014-08-18
    • National Tsing Hua University
    • Wei-Chung WangChi-Hung HuangPo-Chi SungMeng-Hsiu Li
    • G01B11/06
    • G01B11/0675
    • A device for real-time thickness inspection is provided. An optical interferometric technique is used. Measurement requirements in rapid online thickness inspection can be satisfied. An object is measured in a non-contact and non-destructive way. For measuring, an optical spherical wavefront is radiated on the object in an oblique angle. The interference fringe pattern (IFP) thus imaged on a screen is directly related to the thickness distribution of the object. The phase difference on the same horizontal cross section in the IFP monotonically decreases from the light source side to the other side. Accordingly, phase unwrapping can be effectively performed without using phase shift. The present invention achieves rapid on-line thickness inspection through the optical path of interference without using optical lens groups and special optical elements. The present invention radiates a high-coherence point-expanded spherical-wavefront light beam in an oblique angle for an instantaneous and wide-area full-field thickness measurement.
    • 提供了一种用于实时厚度检测的设备。 使用光学干涉技术。 可以满足快速在线厚度检测的测量要求。 以非接触和非破坏性方式测量物体。 对于测量,光学球面波前以倾斜角辐射在物体上。 因此在屏幕上成像的干涉条纹图案(IFP)与物体的厚度分布直接相关。 IFP中相同水平截面上的相位差从光源侧单调减小到另一侧。 因此,可以在不使用相移的情况下有效地执行相位展开。 本发明通过干涉光路实现快速在线厚度检测,而不使用光学透镜组和特殊光学元件。 本发明为了实现瞬时和广域全场厚度测量以斜角辐射高相干点扩展的球面波前光束。