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    • 2. 发明授权
    • Microgyroscope with vibratory structure having a multitude of grooves
    • 具有振动结构的微型陀螺仪具有多个凹槽
    • US5753817A
    • 1998-05-19
    • US773989
    • 1996-12-26
    • Kyu-yeon ParkChong-won LeeYoung-ho ChoCi-moo Song
    • Kyu-yeon ParkChong-won LeeYoung-ho ChoCi-moo Song
    • G01C19/00G01C19/56G01C19/5755G01P9/00
    • G01C19/5755
    • A microgyroscope includes a substrate, a first sensor where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel on the substrate, a driver arranged to be perpendicular to a stripe length direction of the first sensor on the substrate and where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel, a vibratory structure having a plurality of first grooves of a stripe shape vertically spaced from a plane of the first sensor and the driver at a predetermined height and formed in a direction congruous with a stripe length direction of first sensor and a plurality of second grooves of a stripe shape formed in a direction congruous with a stripe length direction of the driver, a support portion formed on the substrate for maintaining the vibratory structure from the substrate at a predetermined height, and elastic members for elastically connecting the vibratory structure and the support portion.
    • 微陀螺仪包括基板,第一传感器,其中多个条形阳极和阴极在基板上并行排列成阵列,驱动器布置成垂直于基板上的第一传感器的条带长度方向,并且其中多个 条状阳极和阴极交替排列成平行的振动结构,该振动结构具有与第一传感器的平面垂直间隔开的条形状的多个第一凹槽和驱动器在预定高度处并沿与 第一传感器的条带长度方向和沿着与驱动器的条带长度方向一致的方向形成的条纹形状的多个第二槽;形成在基板上的支撑部分,用于将来自基板的振动结构保持在预定高度, 以及用于弹性地连接振动结构和支撑部分的弹性构件。
    • 3. 发明授权
    • Method of adjusting natural frequency of dual-axis vibratory structure
    • 调整双轴振动结构固有频率的方法
    • US5804087A
    • 1998-09-08
    • US646817
    • 1996-05-21
    • Ki-bang LeeYoung-ho ChoCi-moo Song
    • Ki-bang LeeYoung-ho ChoCi-moo Song
    • G01C19/56G01C19/5755G01C19/5769G01H13/00H03H3/04H01L22/027
    • G01C19/5769
    • There is provided a method of adjusting the natural frequency of a dual-axis vibratory structure having: a first spring member having a lengthwise direction coinciding to a first axis direction receiving an electrostatic force; a second spring member having a lengthwise direction coinciding to a second direction perpendicular to the first axis direction and having a width narrower than that of the first spring member; and a mass portion, the method comprising the steps of: measuring the natural frequencies relative to the first axis direction of the vibratory structure and a third axis direction perpendicular to a plane formed by the first and second axes; varying the thickness of the first spring member so as to adjust the natural frequency of the third axis direction while fixing the natural frequency of the first axis direction; and repeating the measuring step and the thickness varying step until the natural frequency of the first and third axes directions are within the scope of a permissible error. The method can be adjusted to coincide the natural frequency of the vibratory structure with a design value, so that linearity and the sensitivity of a sensor are improved and operation bandwidth increases.
    • 提供了一种调节双轴振动结构的固有频率的方法,其具有:第一弹簧构件,其具有与接收静电力的第一轴线方向一致的纵向方向; 第二弹簧构件,其纵向方向与垂直于第一轴线方向的第二方向重合,并且具有比第一弹簧构件的宽度窄的宽度; 和质量部分,该方法包括以下步骤:测量相对于振动结构的第一轴方向的固有频率和垂直于由第一和第二轴形成的平面的第三轴线方向; 改变第一弹簧构件的厚度,以便固定第一轴线方向的固有频率来调节第三轴方向的固有频率; 并且重复测量步骤和厚度变化步骤,直到第一和第三轴向方向的固有频率在容许误差的范围内。 可以调整该方法以使振动结构的固有频率与设计值一致,使得传感器的线性和灵敏度提高,并且操作带宽增加。
    • 5. 发明授权
    • Tuning fork type gyroscope
    • 调音叉式陀螺仪
    • US5757103A
    • 1998-05-26
    • US646814
    • 1996-05-21
    • Byung-leul LeeYoung-ho ChoCi-moo Song
    • Byung-leul LeeYoung-ho ChoCi-moo Song
    • G01C19/00G01C19/56G01C19/574G01P15/00
    • G01C19/574
    • A tuning fork type gyroscope includes a vibratory structure arranged to be spaced from a plane formed by a first axis and a second axis perpendicular thereto in a third axial direction perpendicular to the plane, driving means for vibrating the vibratory structure in the second axial direction by an electrostatic force, sensor electrode means arranged on said plane so as to sense displacement of the vibratory structure in the third axial direction while the vibratory structure moves with an angular velocity in the first axis, upper torque electrode means for balancing the force, arranged over the vibratory structure so as to control displacement of the vibratory structure in the third axial direction, and lower torque electrode means for balancing the force, arranged under the vibratory structure so as to control displacement of the vibratory structure in the third axial direction. Therefore, the distortion of the vibratory structure can be efficiently prevented, and an angular velocity can be accurately measured.
    • 音叉式陀螺仪包括:振动结构,其布置成与垂直于该平面的第三轴向方向上与第一轴线垂直的平面与第二轴线间隔开;驱动装置,用于使振动结构沿第二轴向振动, 静电力传感器电极装置,其布置在所述平面上,以便在振动结构以第一轴的角速度移动时感测振动结构在第三轴向方向上的位移,用于平衡力的上扭矩电极装置 所述振动结构用于控制所述振动结构在所述第三轴向方向上的位移;以及下扭矩电极装置,用于平衡所述振动结构下方的力,以便控制所述振动结构在所述第三轴向方向上的位移。 因此,可以有效地防止振动结构的变形,能够精确地测定角速度。
    • 6. 发明授权
    • Microactuator and method for controlling resonant frequency thereof
    • 微致动器及其谐振频率的控制方法
    • US6144545A
    • 2000-11-07
    • US65721
    • 1998-04-24
    • Ki-bang LeeCi-moo SongYoung-ho Cho
    • Ki-bang LeeCi-moo SongYoung-ho Cho
    • G01P15/08H02N1/00H02N15/00
    • H02N1/008
    • A microactuator is provided. The microactuator includes a substrate, a support fixed to an upper surface of the substrate, an elastic member connected to the support, an inertial member connected to the elastic member and spaced apart from the upper surface of the substrate by a predetermined distance, to be vibrated in a first direction parallel to the substrate, moving electrodes protruding from both sides of the inertial member in a second direction perpendicular to the first direction, fixed electrodes fixed on the substrate, facing the moving electrodes, spaced apart from the moving electrodes by a predetermined distance, and supplying an electrostatic repulsive force in the first direction to the moving electrodes when an electric potential is applied, common electrodes fixed on the substrate in the first direction, spaced apart from the moving electrodes and the fixed electrodes by a predetermined distance, and a power supply applying an electric potential to the moving electrodes, the fixed electrodes and the common electrodes.
    • 提供微型致动器。 微致动器包括基板,固定到基板的上表面的支撑件,连接到支撑件的弹性构件,连接到弹性构件并与基板的上表面间隔开预定距离的惯性构件,为 在与所述基板平行的第一方向上振动,从与所述第一方向垂直的第二方向从所述惯性构件的两侧突出的移动电极,固定在所述基板上的与所述移动电极间隔开的固定电极与所述移动电极间隔开 当施加电位时,向移动电极提供第一方向上的静电斥力,沿着第一方向固定在基板上的公共电极,与移动电极和固定电极间隔预定距离, 以及向移动电极,固定电极施加电位的电源 公共电极。