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1. 发明授权

US5780740A Vibratory structure, method for controlling natural frequency thereof, and actuator, sensor, accelerator, gyroscope and gyroscope natural frequency controlling method using vibratory structure 失效
标题翻译：振动结构，控制其自身频率的方法以及使用振动结构的致动器，传感器，加速器，陀螺仪和陀螺仪固有频率控制方法
公开(公告)号：US5780740A
公开(公告)日：1998-07-14
申请号：US735695
申请日：1996-10-23
申请人： Ki Bang Lee , Byung-leul Lee , Young-ho Cho , Ci-moo Song
发明人： Ki Bang Lee , Byung-leul Lee , Young-ho Cho , Ci-moo Song
IPC分类号： G01L1/10 , B06B1/02 , G01C19/56 , G01C19/5726 , G01C19/574 , G01P15/093 , G01P15/097 , G01P15/10 , G01P15/125 , G01P15/14 , G05D19/00 , G01P9/00
CPC分类号： G01R33/0286 , B06B1/0292 , G01C19/5755 , G01P15/093 , G01P15/097 , G01P15/125
摘要： A vibratory structure and a method for controlling the natural frequency thereof are provided. The device has at least one elastic member supported by a first support end, an inertial object which vibrates by the elastic force of the elastic member, a moving electrode coupled to the inertial object, at least one effective stiffness controlling electrode supported by a second support end, and a power supplier for applying a voltage to generate an electric force between the moving electrode and the effective stiffness controlling electrode. This vibratory structure can contribute to controlling and improving the performance of a sensor, an actuator or a gyroscope, which employs the vibratory structure.
摘要翻译：提供了振动结构和控制其固有频率的方法。该装置具有至少一个由第一支撑端支撑的弹性构件，由弹性构件的弹力而振动的惯性物体，耦合到该惯性物体的移动电极，至少一个由第二支撑件支撑的有效刚度控制电极以及用于施加电压以在移动电极和有效刚度控制电极之间产生电力的电源。该振动结构可以有助于控制和改善采用振动结构的传感器，致动器或陀螺仪的性能。

2. 发明授权

US5757103A Tuning fork type gyroscope 失效
标题翻译：调音叉式陀螺仪
公开(公告)号：US5757103A
公开(公告)日：1998-05-26
申请号：US646814
申请日：1996-05-21
申请人： Byung-leul Lee , Young-ho Cho , Ci-moo Song
发明人： Byung-leul Lee , Young-ho Cho , Ci-moo Song
IPC分类号： G01C19/00 , G01C19/56 , G01C19/574 , G01P15/00
CPC分类号： G01C19/574
摘要： A tuning fork type gyroscope includes a vibratory structure arranged to be spaced from a plane formed by a first axis and a second axis perpendicular thereto in a third axial direction perpendicular to the plane, driving means for vibrating the vibratory structure in the second axial direction by an electrostatic force, sensor electrode means arranged on said plane so as to sense displacement of the vibratory structure in the third axial direction while the vibratory structure moves with an angular velocity in the first axis, upper torque electrode means for balancing the force, arranged over the vibratory structure so as to control displacement of the vibratory structure in the third axial direction, and lower torque electrode means for balancing the force, arranged under the vibratory structure so as to control displacement of the vibratory structure in the third axial direction. Therefore, the distortion of the vibratory structure can be efficiently prevented, and an angular velocity can be accurately measured.
摘要翻译：音叉式陀螺仪包括：振动结构，其布置成与垂直于该平面的第三轴向方向上与第一轴线垂直的平面与第二轴线间隔开;驱动装置，用于使振动结构沿第二轴向振动，静电力传感器电极装置，其布置在所述平面上，以便在振动结构以第一轴的角速度移动时感测振动结构在第三轴向方向上的位移，用于平衡力的上扭矩电极装置所述振动结构用于控制所述振动结构在所述第三轴向方向上的位移;以及下扭矩电极装置，用于平衡所述振动结构下方的力，以便控制所述振动结构在所述第三轴向方向上的位移。因此，可以有效地防止振动结构的变形，能够精确地测定角速度。

3. 发明授权

US6127767A Complementary electrostatic driving apparatus for microactuator with parasitic capacitances offset 失效
标题翻译：具有寄生电容偏移的微致动器的互补静电驱动装置
公开(公告)号：US6127767A
公开(公告)日：2000-10-03
申请号：US959922
申请日：1997-10-29
申请人： Byung-leul Lee , Yong-soo Oh , Ci-moo Song
发明人： Byung-leul Lee , Yong-soo Oh , Ci-moo Song
IPC分类号： G01H11/06 , G01C19/56 , H02N1/00 , H03K3/00
CPC分类号： G01C19/5755 , G01C19/5726 , H02N1/008
摘要： An electrostatic driving apparatus for a microactuator is provided, in which a parasitic capacitance is offset to improve the performance thereof. According to the complementary electrostatic driving apparatus for the microactuator, in order to prevent an excitation signal from being mixed with a sensing signal via the parasitic path formed of parasitic capacitance according to the structure of the microactuator and vibration characteristics thereof, which cause noise, signals having opposite polarities are applied to activating vibration plates using an inverter such that the activating vibration signals of each plate, which cause noise, are offset, thereby markedly improving the signal-to-noise ratio. Also, the vibration displacement can be easily detected by a circuit which is not integrated with an actuator. In addition, a sensing unit is simplified, reducing the initial costs. Further, when the excitation signals are applied at the both sides of the vibration direction of the suspended vibration plate, only the AC component, i.e., the .omega. component, of the electrostatic force acts, so that the resonant characteristics can be improved without an offset of the displacement.
摘要翻译：提供一种用于微致动器的静电驱动装置，其中寄生电容被偏移以提高其性能。根据微致动器的互补静电驱动装置，为了防止激励信号通过根据微致动器的结构和振动特性由寄生电容形成的寄生路径与感测信号混合，从而产生噪声，信号使用逆变器将具有相反极性的激励振动板应用于使得产生噪声的每个板的激活振动信号偏移，从而显着提高信噪比。此外，通过不与致动器集成的电路可以容易地检测振动位移。此外，感测单元被简化，降低了初始成本。此外，当在悬挂振动板的振动方向的两侧施加激励信号时，仅静电力的AC分量即ω分量作用，使得可以在没有偏移的情况下提高谐振特性的位移。

4. 发明授权

US5780739A Tuning fork type gyroscope 失效
标题翻译：调音叉式陀螺仪
公开(公告)号：US5780739A
公开(公告)日：1998-07-14
申请号：US653235
申请日：1996-05-24
申请人： Myung-seok Kang , Young-ho Cho , Ci-moo Song , Sung-kie Youn
发明人： Myung-seok Kang , Young-ho Cho , Ci-moo Song , Sung-kie Youn
IPC分类号： G01C19/00 , G01C19/56 , G01C19/574 , G01C19/5769 , G01P9/04
CPC分类号： G01C19/574
摘要： A tuning fork type gyroscope including plate members spaced apart from each other, vibration elements for vibrating the plate members, suspension members for suspending the plate members, and electrodes arranged in the lower portion of the plate members, wherein the suspension members comprises: main bars connected to the plate members by connection members; fixing members connected to both ends of each of said main bars so as to support the main bars and reduce (a) restoring tensile forces(s) along the length of the main bars; and a supporting member connected to (a) central portion(s) of the main bars so as to support the main bars. The gyroscope reduces the restoring tensile force of the main bars and provides flexibility to the main bars.
摘要翻译：音叉型陀螺仪包括彼此间隔开的板构件，用于振动板构件的振动元件，用于悬挂板构件的悬架构件和布置在板构件下部的电极，其中悬架构件包括：主杆通过连接构件连接到板构件; 固定构件连接到每个所述主杆的两端以便支撑主杆并且减小（a）沿主杆的长度恢复拉力; 以及连接到主杆的（a）中心部分以支撑主杆的支撑构件。陀螺仪降低了主杆的恢复张力，并为主杆提供了灵活性。

5. 发明授权

US5753817A Microgyroscope with vibratory structure having a multitude of grooves 失效
标题翻译：具有振动结构的微型陀螺仪具有多个凹槽
公开(公告)号：US5753817A
公开(公告)日：1998-05-19
申请号：US773989
申请日：1996-12-26
申请人： Kyu-yeon Park , Chong-won Lee , Young-ho Cho , Ci-moo Song
发明人： Kyu-yeon Park , Chong-won Lee , Young-ho Cho , Ci-moo Song
IPC分类号： G01C19/00 , G01C19/56 , G01C19/5755 , G01P9/00
CPC分类号： G01C19/5755
摘要： A microgyroscope includes a substrate, a first sensor where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel on the substrate, a driver arranged to be perpendicular to a stripe length direction of the first sensor on the substrate and where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel, a vibratory structure having a plurality of first grooves of a stripe shape vertically spaced from a plane of the first sensor and the driver at a predetermined height and formed in a direction congruous with a stripe length direction of first sensor and a plurality of second grooves of a stripe shape formed in a direction congruous with a stripe length direction of the driver, a support portion formed on the substrate for maintaining the vibratory structure from the substrate at a predetermined height, and elastic members for elastically connecting the vibratory structure and the support portion.
摘要翻译：微陀螺仪包括基板，第一传感器，其中多个条形阳极和阴极在基板上并行排列成阵列，驱动器布置成垂直于基板上的第一传感器的条带长度方向，并且其中多个条状阳极和阴极交替排列成平行的振动结构，该振动结构具有与第一传感器的平面垂直间隔开的条形状的多个第一凹槽和驱动器在预定高度处并沿与第一传感器的条带长度方向和沿着与驱动器的条带长度方向一致的方向形成的条纹形状的多个第二槽;形成在基板上的支撑部分，用于将来自基板的振动结构保持在预定高度，以及用于弹性地连接振动结构和支撑部分的弹性构件。

6. 发明授权

US5804087A Method of adjusting natural frequency of dual-axis vibratory structure 失效
标题翻译：调整双轴振动结构固有频率的方法
公开(公告)号：US5804087A
公开(公告)日：1998-09-08
申请号：US646817
申请日：1996-05-21
申请人： Ki-bang Lee , Young-ho Cho , Ci-moo Song
发明人： Ki-bang Lee , Young-ho Cho , Ci-moo Song
IPC分类号： G01C19/56 , G01C19/5755 , G01C19/5769 , G01H13/00 , H03H3/04 , H01L22/027
CPC分类号： G01C19/5769
摘要： There is provided a method of adjusting the natural frequency of a dual-axis vibratory structure having: a first spring member having a lengthwise direction coinciding to a first axis direction receiving an electrostatic force; a second spring member having a lengthwise direction coinciding to a second direction perpendicular to the first axis direction and having a width narrower than that of the first spring member; and a mass portion, the method comprising the steps of: measuring the natural frequencies relative to the first axis direction of the vibratory structure and a third axis direction perpendicular to a plane formed by the first and second axes; varying the thickness of the first spring member so as to adjust the natural frequency of the third axis direction while fixing the natural frequency of the first axis direction; and repeating the measuring step and the thickness varying step until the natural frequency of the first and third axes directions are within the scope of a permissible error. The method can be adjusted to coincide the natural frequency of the vibratory structure with a design value, so that linearity and the sensitivity of a sensor are improved and operation bandwidth increases.
摘要翻译：提供了一种调节双轴振动结构的固有频率的方法，其具有：第一弹簧构件，其具有与接收静电力的第一轴线方向一致的纵向方向; 第二弹簧构件，其纵向方向与垂直于第一轴线方向的第二方向重合，并且具有比第一弹簧构件的宽度窄的宽度; 和质量部分，该方法包括以下步骤：测量相对于振动结构的第一轴方向的固有频率和垂直于由第一和第二轴形成的平面的第三轴线方向; 改变第一弹簧构件的厚度，以便固定第一轴线方向的固有频率来调节第三轴方向的固有频率; 并且重复测量步骤和厚度变化步骤，直到第一和第三轴向方向的固有频率在容许误差的范围内。可以调整该方法以使振动结构的固有频率与设计值一致，使得传感器的线性和灵敏度提高，并且操作带宽增加。

7. 发明授权

US6144545A Microactuator and method for controlling resonant frequency thereof 失效
标题翻译：微致动器及其谐振频率的控制方法
公开(公告)号：US6144545A
公开(公告)日：2000-11-07
申请号：US65721
申请日：1998-04-24
申请人： Ki-bang Lee , Ci-moo Song , Young-ho Cho
发明人： Ki-bang Lee , Ci-moo Song , Young-ho Cho
IPC分类号： G01P15/08 , H02N1/00 , H02N15/00
CPC分类号： H02N1/008
摘要： A microactuator is provided. The microactuator includes a substrate, a support fixed to an upper surface of the substrate, an elastic member connected to the support, an inertial member connected to the elastic member and spaced apart from the upper surface of the substrate by a predetermined distance, to be vibrated in a first direction parallel to the substrate, moving electrodes protruding from both sides of the inertial member in a second direction perpendicular to the first direction, fixed electrodes fixed on the substrate, facing the moving electrodes, spaced apart from the moving electrodes by a predetermined distance, and supplying an electrostatic repulsive force in the first direction to the moving electrodes when an electric potential is applied, common electrodes fixed on the substrate in the first direction, spaced apart from the moving electrodes and the fixed electrodes by a predetermined distance, and a power supply applying an electric potential to the moving electrodes, the fixed electrodes and the common electrodes.
摘要翻译：提供微型致动器。微致动器包括基板，固定到基板的上表面的支撑件，连接到支撑件的弹性构件，连接到弹性构件并与基板的上表面间隔开预定距离的惯性构件，为在与所述基板平行的第一方向上振动，从与所述第一方向垂直的第二方向从所述惯性构件的两侧突出的移动电极，固定在所述基板上的与所述移动电极间隔开的固定电极与所述移动电极间隔开当施加电位时，向移动电极提供第一方向上的静电斥力，沿着第一方向固定在基板上的公共电极，与移动电极和固定电极间隔预定距离，以及向移动电极，固定电极施加电位的电源公共电极。

8. 发明授权

US5780948A Vibratory structure, method for controlling natural frequency thereof and sensor and actuator adopting the vibratory structure 失效
标题翻译：振动结构，控制其固有频率的方法和采用振动结构的传感器和致动器
公开(公告)号：US5780948A
公开(公告)日：1998-07-14
申请号：US731964
申请日：1996-10-23
申请人： Ki Bang Lee , Young-ho Cho , Ci-moo Song
发明人： Ki Bang Lee , Young-ho Cho , Ci-moo Song
IPC分类号： G01L1/10 , B06B1/02 , F16F7/10 , F16F15/03 , G01C19/56 , G01C19/5726 , G01C19/5755 , G01P1/00 , G01P15/00 , G01P15/14 , G05D19/00 , H02N1/00 , H02K7/06
CPC分类号： F16F15/03 , F16F7/1011 , G01C19/56 , G01P1/00 , H02N1/008
摘要： A vibratory structure and a method for controlling the natural frequency thereof are provided. The vibratory structure has an elastic member one end portion of which is fixed to a first support end, an inertial object for vibrating by the elastic force of the elastic member, a moving electrode attached integrally to the inertial object, an effective stiffness controlling electrode fixed to a second support end, and a power supplier for generating electric force between the moving electrode and the effective stiffness controlling electrode. The moving electrode and the effective stiffness controlling electrode are formed into a predetermined shape, so that the electric force varies linearly according to the displacement of the inertial object. Thus, the natural frequency of the vibratory structure is controlled by changing the voltage applied across the moving electrode and the effective stiffness controlling electrode.
摘要翻译：提供了振动结构和控制其固有频率的方法。振动结构具有弹性构件，其一端固定到第一支撑端，弹性构件的弹力使振动的惯性物体，与惯性物体一体地附接的移动电极，固定有效刚度控制电极到第二支撑端，以及用于在移动电极和有效刚度控制电极之间产生电力的电源。移动电极和有效刚度控制电极形成为预定形状，使得电力根据惯性物体的位移而线性变化。因此，通过改变施加在移动电极和有效刚度控制电极上的电压来控制振动结构的固有频率。

9. 发明授权

US5747690A Vibratory microgyroscope 失效
标题翻译：振动微镜
公开(公告)号：US5747690A
公开(公告)日：1998-05-05
申请号：US773990
申请日：1996-12-26
申请人： Kyu-yeon Park , Chong-won Lee , Young-ho Cho , Ci-moo Song
发明人： Kyu-yeon Park , Chong-won Lee , Young-ho Cho , Ci-moo Song
IPC分类号： G01P3/44 , G01C19/00 , G01C19/56 , G01C19/5755 , G01C19/5769 , G01P9/00
CPC分类号： G01C19/5755
摘要： A microgyroscope includes a substrate, a vibratory structure having two stripe portions, a plurality of connection portions, and a comb, an elastic member for elastically maintaining the vibratory structure, a driver for applying the vibratory structure, a sensor for sensing the one directional action of the vibratory structure, and a plurality of sensing electrodes for sensing displacement by Coriolis force.
摘要翻译：微陀螺仪包括基板，具有两个条纹部分的振动结构，多个连接部分和梳子，用于弹性地保持振动结构的弹性部件，用于施加振动结构的驱动器，用于感测一个方向动作的传感器的振动结构，以及用于感测科里奥利力的位移的多个感测电极。

10. 发明授权

US5748172A Mirror driving method and apparatus of micro-mirror array 失效
标题翻译：微镜阵列的镜面驱动方法和装置
公开(公告)号：US5748172A
公开(公告)日：1998-05-05
申请号：US591785
申请日：1996-01-25
申请人： Ci-moo Song , Chul-woo Lee , Han-ki Cho
发明人： Ci-moo Song , Chul-woo Lee , Han-ki Cho
IPC分类号： G02B26/00 , G02B26/08 , G09F9/37 , G09F19/16 , H04N5/74 , G09G3/34
CPC分类号： G02B26/085 , G02B26/0841 , H04N5/7458
摘要： In a mirror driving method of a micro-mirror array and an apparatus thereof, each of a plurality of mirrors is pivotally supported by hinges fixed to a substrate, and a permanent magnet is attached beneath the substrate to form a magnetic field about the mirrors. A coiled conductive layer is formed on the rear surface of each mirror to be selectively applied with current according to a video signal, and the selected mirror pivots in correspondence with the electrostatic force operative between the conductive layer to which the current is applied and the magnetic field. Thus, a light beam irradiating the micro-mirror array can be modulated according to an image, and mass production is made possible due to a simple structure which provides for a stable driving action.
摘要翻译：在微反射镜阵列的镜驱动方法及其装置中，多个反射镜中的每一个由固定在基板上的铰链枢转地支撑，永久磁铁安装在基板的下方，以形成围绕反射镜的磁场。在每个反射镜的后表面上形成螺旋导电层，以根据视频信号选择性地施加电流，并且所选择的反射镜对应于在施加电流的导电层与磁体之间的静电力对应地枢转领域。因此，照射微镜阵列的光束可以根据图像进行调制，并且由于提供稳定的驱动动作的简单结构使得批量生产成为可能。

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