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    • 1. 发明授权
    • Surface acoustic wave filter
    • 表面声波滤波器
    • US09473104B2
    • 2016-10-18
    • US14541242
    • 2014-11-14
    • Murata Manufacturing Co., Ltd.
    • Yuji Toyota
    • H03H9/64H03H9/02H03H9/05
    • H03H9/02992H03H9/02897H03H9/6469
    • A surface acoustic wave filter includes a piezoelectric substrate, a lower-layer wiring line, an upper-layer wiring line, and an interlayer insulating film. The lower-layer wiring line is disposed on the piezoelectric substrate. The upper-layer wiring line crosses the lower-layer wiring line. The upper-layer wiring line has a potential that is different from the potential of the lower-layer wiring line. The interlayer insulating film is disposed between the lower-layer wiring line and the upper-layer wiring line. The interlayer insulating film has a portion that has a width that is not greater than the width of the upper-layer wiring line in a cross-sectional view taken along a direction in which the lower-layer wiring line extends.
    • 表面声波滤波器包括压电基板,下层布线,上层布线和层间绝缘膜。 下层布线配置在压电基板上。 上层布线穿过下层布线。 上层布线具有与下层布线的电位不同的电位。 层间绝缘膜设置在下层布线和上层布线之间。 层间绝缘膜在沿着下层布线延伸的方向截取的截面图中具有宽度不大于上层布线的宽度的部分。