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1. 发明授权

US07507346B2 Method for manufacturing electronic component, and electronic component 失效
标题翻译：电子部件的制造方法以及电子部件
公开(公告)号：US07507346B2
公开(公告)日：2009-03-24
申请号：US12020729
申请日：2008-01-28
申请人： Muneharu Yamashita , Atsushi Mikado
发明人： Muneharu Yamashita , Atsushi Mikado
IPC分类号： H01L21/302
CPC分类号： G01P1/023 , B81B7/0048 , B81B2207/092 , B81C1/00301 , G01P15/0802 , G01P15/123 , G01P2015/0831 , H01L21/4853 , H01L23/13 , H01L23/3128 , H01L23/315 , H01L23/49805 , H01L24/80 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/16 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01033 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/10157 , H01L2924/15311 , H01L2924/181 , Y10T29/4913 , Y10T29/49135 , Y10T428/24917 , H01L2924/00 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： A method for manufacturing an electronic component includes preparing an element substrate having a function section for providing a function of an electronic component, and an external-connection electrode; bonding a low-sandblast-resistant case plate to the element substrate through a high-sandblast-resistant adhesive layer; forming, by sandblast processing, a hole in the case plate above the external-connection electrode so that the adhesive layer is exposed to the outside; removing, by etching, an adhesive layer portion that is exposed in the hole; forming an electrode film so as to be electrically connected to the exposed external-connection electrode; and forming, by mechanical machining, a projection having a leading end surface on which a terminal electrode resulting from the electrode film is defined.
摘要翻译：一种电子部件的制造方法，其特征在于，具有：准备具有提供电子部件的功能的功能部的元件基板和外部连接用电极; 通过高耐喷砂粘合剂层将低耐喷砂外壳板粘合到元件基板上; 通过喷砂处理形成在外部连接电极上方的壳板中的孔，使得粘合剂层暴露于外部; 通过蚀刻去除暴露在孔中的粘合剂层部分; 形成电极膜，以便与暴露的外部连接电极电连接; 并且通过机械加工形成具有前端面的突起，所述前端面由所述电极膜形成的端子电极被限定在所述前端面上。

2. 发明申请

US20060162453A1 Acceleration sensor 有权
公开(公告)号：US20060162453A1
公开(公告)日：2006-07-27
申请号：US10540240
申请日：2004-07-01
申请人： Atsushi Mikado , Jun Tabota
发明人： Atsushi Mikado , Jun Tabota
IPC分类号： G01P15/08 , G01P3/44
CPC分类号： G01P15/09 , G01P15/097
摘要： A compact, high-sensitivity acceleration sensor that is prevented from being affected by factors other than acceleration, such as a change in temperature, has a bimorph acceleration-sensor element including first and second resonators attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end of the acceleration-sensor element is fixed such that the first and second resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the first and second resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. The acceleration-sensor element is bendable about a central bending plane in response to the acceleration, the central bending plane being positioned at a central portion of the base plate with respect to the application direction of acceleration. A vibrating section of each of the first and second resonators is disposed close to the fixed end of the acceleration-sensor element.

3. 发明申请

US20060144145A1 Acceleration sensor 有权
标题翻译：加速度传感器
公开(公告)号：US20060144145A1
公开(公告)日：2006-07-06
申请号：US10540238
申请日：2004-07-01
申请人： Atsushi Mikado , Jun Tabota
发明人： Atsushi Mikado , Jun Tabota
IPC分类号： G01P15/09
CPC分类号： G01P15/09 , G01P15/097
摘要： A compact, highly sensitive acceleration sensor that is not affected by factors other than acceleration, such as a change in temperature, includes a bimorph acceleration-sensor element including first and second resonators and attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end or both longitudinal ends of the acceleration-sensor element is/are fixed such that the resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. The acceleration-sensor element is bendable about a central bending plane N1 in response to the acceleration, the central bending plane N1 being positioned at a central portion of the base plate with respect to the application direction of acceleration. Electrodes are disposed on main surfaces of the resonators, the main surfaces being substantially perpendicular to the application direction of acceleration. The height H1 of the resonators in a direction that is substantially perpendicular to the application direction of acceleration is smaller than the height H2 of the base plate in the direction that is substantially perpendicular to the application direction of acceleration.
摘要翻译：不受诸如温度变化之类的加速度以外的因素影响的紧凑，高灵敏度的加速度传感器包括双压电晶片加速度传感器元件，包括第一和第二谐振器，并且相对于方向连接到基板的相对侧其中施加加速度。加速度传感器元件的一个纵向端部或两个纵向端部被固定，使得谐振器响应于加速度沿相同的方向弯曲。为了检测加速度，差分地检测由加速度传感器元件的弯曲引起的谐振器的频率变化或阻抗变化。加速度传感器元件响应于加速度而围绕中心弯曲平面N1弯曲，中心弯曲平面N1相对于加速度的施加方向位于基板的中心部分。电极设置在谐振器的主表面上，主表面基本上垂直于加速度的施加方向。谐振器的基本上垂直于加速度的施加方向的方向的高度H 1 1小于基板的高度H 2 2 基本垂直于加速度的施加方向。

4. 发明授权

US07194906B2 Acceleration sensor having resonators with reduced height 有权
标题翻译：具有降低高度的谐振器的加速度传感器
公开(公告)号：US07194906B2
公开(公告)日：2007-03-27
申请号：US10540238
申请日：2004-07-01
申请人： Atsushi Mikado , Jun Tabota
发明人： Atsushi Mikado , Jun Tabota
IPC分类号： G01P15/10
CPC分类号： G01P15/09 , G01P15/097
摘要： A compact, highly sensitive acceleration sensor that is not affected by factors other than acceleration, such as a change in temperature, includes a bimorph acceleration-sensor element including first and second resonators and attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end or both longitudinal ends of the acceleration-sensor element is/are fixed such that the resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. The acceleration-sensor element is bendable about a central bending plane N1 in response to the acceleration, the central bending plane N1 being positioned at a central portion of the base plate with respect to the application direction of acceleration. Electrodes are disposed on main surfaces of the resonators, the main surfaces being substantially perpendicular to the application direction of acceleration. The height H1 of the resonators in a direction that is substantially perpendicular to the application direction of acceleration is smaller than the height H2 of the base plate in the direction that is substantially perpendicular to the application direction of acceleration.
摘要翻译：不受诸如温度变化之类的加速度以外的因素影响的紧凑，高灵敏度的加速度传感器包括双压电晶片加速度传感器元件，包括第一和第二谐振器，并且相对于方向连接到基板的相对侧其中施加加速度。加速度传感器元件的一个纵向端部或两个纵向端部被固定，使得谐振器响应于加速度沿相同的方向弯曲。为了检测加速度，差分地检测由加速度传感器元件的弯曲引起的谐振器的频率变化或阻抗变化。加速度传感器元件可以响应于加速度而围绕中心弯曲平面N 1弯曲，中心弯曲平面N 1相对于加速度的施加方向位于基板的中心部分。电极设置在谐振器的主表面上，主表面基本上垂直于加速度的施加方向。谐振器的基本上垂直于加速度的施加方向的方向的高度H 1 1小于基板的高度H 2 2 基本垂直于加速度的施加方向。

5. 发明授权

US07134339B2 Acceleration sensor 有权
标题翻译：加速度传感器
公开(公告)号：US07134339B2
公开(公告)日：2006-11-14
申请号：US10540240
申请日：2004-07-01
申请人： Atsushi Mikado , Jun Tabota
发明人： Atsushi Mikado , Jun Tabota
IPC分类号： G01P15/10
CPC分类号： G01P15/09 , G01P15/097
摘要： A compact, high-sensitivity acceleration sensor that is prevented from being affected by factors other than acceleration, such as a change in temperature, has a bimorph acceleration-sensor element including first and second resonators attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end of the acceleration-sensor element is fixed such that the first and second resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the first and second resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. The acceleration-sensor element is bendable about a central bending plane in response to the acceleration, the central bending plane being positioned at a central portion of the base plate with respect to the application direction of acceleration. A vibrating section of each of the first and second resonators is disposed close to the fixed end of the acceleration-sensor element.
摘要翻译：一种紧凑的，高灵敏度的加速度传感器被防止受加速度以外的因素（例如温度变化）的影响，具有双压电晶片加速度传感器元件，包括第一和第二谐振器，该谐振器相对于基板施加加速度的方向。加速度传感器元件的一个纵向端被固定为使得第一和第二谐振器响应于加速度在相同的方向弯曲。为了检测加速度，差异地检测由加速度传感器元件的弯曲引起的第一和第二谐振器的频率变化或阻抗变化。加速度传感器元件响应于加速度而围绕中心弯曲平面弯曲，中心弯曲平面相对于加速度的施加方向位于基板的中心部分。第一和第二谐振器中的每一个的振动部分靠近加速度传感器元件的固定端设置。

6. 发明授权

US07353707B2 Acceleration sensor 有权
标题翻译：加速度传感器
公开(公告)号：US07353707B2
公开(公告)日：2008-04-08
申请号：US10540239
申请日：2004-07-01
申请人： Atsushi Mikado , Jun Tabota
发明人： Atsushi Mikado , Jun Tabota
IPC分类号： G01P15/10
CPC分类号： G01P15/097 , G01P15/09
摘要： An acceleration sensor in which a difference in resonance characteristics between two resonators can be easily adjusted even when casing components are already attached to an acceleration-sensor element includes a bimorph acceleration-sensor element having first and second resonators attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end or both longitudinal ends of the acceleration-sensor element is/are fixed such that the first and second resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the first and second resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. Opposite sides of the acceleration-sensor element with respect to the application direction of acceleration are respectively covered with a pair of casing components. Electrodes disposed on the main surfaces of the respective first and second resonators face one of opposite open planes defined by a combination of the acceleration-sensor element and the casing components with respect to a direction perpendicular to the application direction of acceleration. Accordingly, a trimming process for the electrodes can be readily performed.
摘要翻译：即使在壳体部件已经附接到加速度传感器元件的情况下也可以容易地调节两个谐振器之间的谐振特性的差异的加速度传感器，其包括：双压电晶片加速度传感器元件，其具有安装在基板的相对侧的第一和第二谐振器相对于施加加速度的方向。加速度传感器元件的一个纵向端部或两个纵向端部被固定，使得第一和第二谐振器响应于加速度在相同的方向弯曲。为了检测加速度，差异地检测由加速度传感器元件的弯曲引起的第一和第二谐振器的频率变化或阻抗变化。加速度传感器元件相对于加速度的施加方向的相对侧分别被一对壳体部件覆盖。设置在相应的第一和第二谐振器的主表面上的电极相对于垂直于加速度的施加方向的方向面对由加速度传感器元件和壳体部件的组合限定的相对开口面之一。因此，可以容易地进行电极的修整处理。

7. 发明申请

US20060081048A1 Acceleration sensor 有权
标题翻译：加速度传感器
公开(公告)号：US20060081048A1
公开(公告)日：2006-04-20
申请号：US10540239
申请日：2004-07-01
申请人： Atsushi Mikado , Jun Tabota
发明人： Atsushi Mikado , Jun Tabota
IPC分类号： G01P15/09
CPC分类号： G01P15/097 , G01P15/09
摘要： An acceleration sensor in which a difference in resonance characteristics between two resonators can be easily adjusted even when casing components are already attached to an acceleration-sensor element includes a bimorph acceleration-sensor element having first and second resonators attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end or both longitudinal ends of the acceleration-sensor element is/are fixed such that the first and second resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the first and second resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. Opposite sides of the acceleration-sensor element with respect to the application direction of acceleration are respectively covered with a pair of casing components. Electrodes disposed on the main surfaces of the respective first and second resonators face one of opposite open planes defined by a combination of the acceleration-sensor element and the casing components with respect to a direction perpendicular to the application direction of acceleration. Accordingly, a trimming process for the electrodes can be readily performed.
摘要翻译：即使在壳体部件已经附接到加速度传感器元件的情况下也可以容易地调节两个谐振器之间的谐振特性的差异的加速度传感器，其包括：双压电晶片加速度传感器元件，其具有安装在基板的相对侧的第一和第二谐振器相对于施加加速度的方向。加速度传感器元件的一个纵向端部或两个纵向端部被固定，使得第一和第二谐振器响应于加速度在相同的方向弯曲。为了检测加速度，差异地检测由加速度传感器元件的弯曲引起的第一和第二谐振器的频率变化或阻抗变化。加速度传感器元件相对于加速度的施加方向的相对侧分别被一对壳体部件覆盖。设置在相应的第一和第二谐振器的主表面上的电极相对于垂直于加速度的施加方向的方向面对由加速度传感器元件和壳体部件的组合限定的相对开口面之一。因此，可以容易地进行电极的修整处理。

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