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    • 9. 发明授权
    • Unit for vaporizing liquid materials
    • 用于蒸发液体材料的单元
    • US6074487A
    • 2000-06-13
    • US21153
    • 1998-02-10
    • Naoki YoshiokaSeiji Ito
    • Naoki YoshiokaSeiji Ito
    • C23C16/448C23C16/00
    • C23C16/4485C23C16/4486
    • The object of the invention is to provide a unit for vaporizing liquid materials which can adjust not only a mixing rate but also a concentration of the mixed liquid easily and accurately and which can effectively vaporize a large amount of the liquid material.A unit for vaporizing liquid materials in accordance with the invention is for mixing a plurality of liquid materials and comprises a plurality of containers each of which contains a different liquid material which is made by dissolving a material into a solvent, a container exclusive for solvent which contains the same or the same kind of solvent used for the liquid materials, a liquid conveying means which conveys the liquid materials from the containers and the solvent from the container exclusive for solvent, and a vaporizing means which sprays the liquid materials and the solvent conveyed by the liquid conveying means and vaporizes the sprayed liquid materials and the sprayed solvent.
    • 本发明的目的是提供一种用于蒸发液体材料的单元,其不仅可以容易且精确地调节混合液体的混合速率而且可以调节浓度,并且可以有效地蒸发大量的液体材料。 用于蒸发根据本发明的液体材料的单元是用于混合多种液体材料,并且包括多个容器,每个容器包含通过将材料溶解在溶剂中而制成的不同液体材料,专用于溶剂的容器 含有与液体材料相同或相同种类的溶剂,将来自容器的液体材料和来自专用于溶剂的容器的溶剂输送的液体输送装置和喷射液体材料和溶剂的蒸发装置 通过液体输送装置蒸发喷射的液体材料和喷雾溶剂。