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    • 3. 发明申请
    • Moving Body Posture Angle Detecting Apparatus
    • 移动体姿势检测仪
    • US20100138180A1
    • 2010-06-03
    • US11989767
    • 2006-08-01
    • Hisayoshi SugiharaYutaka NonomuraMotohiro Fujiyoshi
    • Hisayoshi SugiharaYutaka NonomuraMotohiro Fujiyoshi
    • G06F19/00G01P21/00G01P15/00G01P3/00
    • B25J9/163G05B2219/37024G05B2219/37388G05B2219/40536G05B2219/41166G05B2219/42152
    • An angular velocity detected by an angular velocity sensor (10) is integrated by a small angle matrix calculator (12) and a matrix adding calculator (14), and then restored as a posture angle (angular velocity posture angle) by a matrix posture angle calculator (16). A posture matrix is calculated by a tilt angle calculator (22) and an acceleration matrix calculator (24) and an acceleration detected by an acceleration sensor (20) is restored as a posture angle (acceleration posture angle) by a matrix posture angle calculator (26). Low pass filters (18, 28) each extract a low range component, the difference between the two is calculated by a differencer (30), and only the drift amount is extracted. A subtracter (32) removes the drift amount from the angular velocity posture angle and the result is output from an output device (34). In addition, a posture angle matrix calculator (36) converts the result to a posture matrix, which it feeds back to the matrix adding calculator (14).
    • 由角速度传感器(10)检测的角速度由小角度矩阵计算器(12)和矩阵加法运算器(14)积分,然后以姿势角(角速度姿态角)恢复矩阵姿态角 计算器(16)。 由倾斜角计算器(22)和加速度矩阵运算器(24)计算姿势矩阵,并且由矩阵姿态角计算器(20)将加速度传感器(20)检测出的加速度恢复为姿势角(加速姿势角) 26)。 低通滤波器(18,28)各自提取低范围分量,两者之间的差异由差分器(30)计算,并且仅提取漂移量。 减法器(32)从角速度姿态角度去除漂移量,结果从输出装置(34)输出。 此外,姿势角矩阵计算器(36)将结果转换成姿势矩阵,其将其反馈到矩阵添加计算器(14)。
    • 4. 发明申请
    • Displacement sensor
    • 位移传感器
    • US20050241364A1
    • 2005-11-03
    • US11075332
    • 2005-03-09
    • Motohiro FujiyoshiYutaka NonomuraHisayoshi Sugihara
    • Motohiro FujiyoshiYutaka NonomuraHisayoshi Sugihara
    • G01B3/30G01B21/00G01P15/08G01P15/125G01P21/00
    • G01P15/125G01P15/0802
    • A structure is presented in which it is easy to adjust, to a determined value, distance between electrodes of a condenser formed in an electrostatic capacity-type displacement sensor. A displacement sensor has a conductive lower layer, an insulating layer stacked on the conductive lower layer and a conductive upper layer stacked on the insulating layer. The conductive lower layer is divided into a first lower region and a second lower region by a groove penetrating the conductive lower layer. The insulating layer is stacked on the conductive lower layer at selected portions. The conductive upper layer is stacked on the insulating layer at selected portions. The conductive upper layer has a beam connected via the insulating layer to the first lower region and the second lower region at a pair of ends of the beam. The conductive upper layer has a first upper portion forming one of electrodes of a first condenser. The first upper portion extends from a position above the first lower region to a position above the second lower region. The insulating layer is not formed between the first upper portion and the first lower region, but is formed between the first upper portion and the second lower region.
    • 提出了一种结构,其中易于将静电电容式位移传感器中形成的电容器的电极之间的距离调整到确定的值。 位移传感器具有导电性下层,层叠在导电性下层上的绝缘层和层叠在绝缘层上的导电性上层。 导电性下层通过穿透导电性下层的沟槽被分割为第一下部区域和第二下部区域。 绝缘层在选定的部分堆叠在导电性下层上。 导电上层在选定部分堆叠在绝缘层上。 导电上层具有通过绝缘层连接到梁的一对端部处的第一下部区域和第二下部区域的梁。 导电上层具有形成第一冷凝器的电极之一的第一上部。 第一上部从第一下部区域上方的位置延伸到第二下部区域上方的位置。 绝缘层不形成在第一上部和第一下部区域之间,而是形成在第一上部和第二下部区域之间。
    • 6. 发明申请
    • Angular Velocity Sensor
    • 角速度传感器
    • US20090158847A1
    • 2009-06-25
    • US12318015
    • 2008-12-19
    • Motohiro FujiyoshiYutaka Nonomura
    • Motohiro FujiyoshiYutaka Nonomura
    • G01P3/44
    • G01C19/5719
    • Beams 70a, 70b, 70c and, 70d. of an angular velocity sensor 100 is provided with a folded type beam 73 that has a spring constant which is smaller along the excitation direction (x-axis direction) than along a detecting direction (y-axis direction), and a straight type beam 75 that has a spring constant which is smaller along the detecting direction (y-axis direction) than along the excitation direction (x-axis direction). The folded type beam 73 is arranged closer to the mass portion 40 than the straight type beam 75. The detecting member 60 is disposed on a farther beam portion of the beam 70b, wherein the farther beam portion is arranged farther away from the mass portion 40 than the folded type beam 73.
    • 梁70a,70b,70c和70d。 角速度传感器100设置有沿着激励方向(x轴方向)比沿着检测方向(y轴方向)更小的弹簧常数的折叠型梁73和直线型梁75 具有沿着检测方向(y轴方向)比沿着激励方向(x轴方向)更小的弹簧常数。 折叠型光束73比直线型光束75更靠近质量部分40.检测部件60设置在光束70b的更远的光束部分上,其中更远的光束部分布置得更远离质量部分40 比折叠型梁73。
    • 7. 发明授权
    • Displacement sensor
    • 位移传感器
    • US07501835B2
    • 2009-03-10
    • US11075332
    • 2005-03-09
    • Motohiro FujiyoshiYutaka NonomuraHisayoshi Sugihara
    • Motohiro FujiyoshiYutaka NonomuraHisayoshi Sugihara
    • G01R27/26G01P15/125
    • G01P15/125G01P15/0802
    • A structure is presented in which it is easy to adjust, to a determined value, distance between electrodes of a condenser formed in an electrostatic capacity-type displacement sensor.A displacement sensor has a conductive lower layer, an insulating layer stacked on the conductive lower layer and a conductive upper layer stacked on the insulating layer. The conductive lower layer is divided into a first lower region and a second lower region by a groove penetrating the conductive lower layer. The insulating layer is stacked on the conductive lower layer at selected portions. The conductive upper layer is stacked on the insulating layer at selected portions. The conductive upper layer has a beam connected via the insulating layer to the first lower region and the second lower region at a pair of ends of the beam. The conductive upper layer has a first upper portion forming one of electrodes of a first condenser. The first upper portion extends from a position above the first lower region to a position above the second lower region. The insulating layer is not formed between the first upper portion and the first lower region, but is formed between the first upper portion and the second lower region.
    • 提出了一种结构,其中易于将静电电容式位移传感器中形成的电容器的电极之间的距离调整到确定的值。 位移传感器具有导电性下层,层叠在导电性下层上的绝缘层和层叠在绝缘层上的导电性上层。 导电性下层通过穿透导电性下层的沟槽被分割为第一下部区域和第二下部区域。 绝缘层在选定的部分堆叠在导电性下层上。 导电上层在选定部分堆叠在绝缘层上。 导电上层具有通过绝缘层连接到梁的一对端部处的第一下部区域和第二下部区域的梁。 导电上层具有形成第一冷凝器的电极之一的第一上部。 第一上部从第一下部区域上方的位置延伸到第二下部区域上方的位置。 绝缘层不形成在第一上部和第一下部区域之间,而是形成在第一上部和第二下部区域之间。
    • 8. 发明授权
    • Resonance type angular velocity sensor
    • 共振型角速度传感器
    • US5945599A
    • 1999-08-31
    • US989911
    • 1997-12-12
    • Motohiro FujiyoshiYoshiteru OmuraYutaka NonomuraNorio Fujitsuka
    • Motohiro FujiyoshiYoshiteru OmuraYutaka NonomuraNorio Fujitsuka
    • G01C19/5719G01P9/04
    • G01C19/5719
    • A resonance type angular velocity sensor is provided with a mass displacement supporting beam (20, 21, 22, 23) for supporting a vibration in a detecting direction due to a Coriolis force of a mass portion (1) and a mass excitation supporting beam for supporting a mass displacement supporting base portion (24, 25) in such a manner as to allow the mass portion (1) to vibrate away from the beam in an excitation direction. When the mass displacement supporting base portion (24) is excited in the excitation direction by an opposing comb exciting electrode (51), the mass portion (1) vibrates. A projecting electrode (31) is provided in a side surface of the Coriolis force detecting direction of the mass portion (1) and capacity detecting electrodes (30, 32) are disposed in such a manner as to oppose this. When the Coriolis force acts on the mass portion (1) vibrating in the excitation direction, the mass portion (1) vibrates also in the detecting direction so that the capacity change is detected by the capacity detecting electrodes (30, 32). In such a case, it is possible to provide a mechanism for applying a stress to the beam members (10, 11, 12, 13, 14, 15, 16, 17) so as to adjust the exciting frequency.
    • 共振型角速度传感器设有质量位移支撑梁(20,21,22,23),用于由于质量部分(1)的科里奥利力和用于支撑梁的质量激励支撑梁而支撑在检测方向上的振动 支撑质量位移支撑基部(24,25),以允许质量部分(1)在激励方向上离开光束振动。 当质量位移支撑基部(24)通过相对的梳齿形激励电极(51)在激励方向被激发时,质量部分(1)振动。 在质量部(1)的科里奥利力检测方向的侧面设置有突出电极(31),并且以相反的方式设置容量检测电极(30,32)。 当科里奥利力作用于在激励方向上振动的质量部分(1)时,质量部分(1)也沿检测方向振动,从而通过容量检测电极(30,32)检测容量变化。 在这种情况下,可以提供一种用于向梁构件(10,11,12,13,14,15,16,17)施加应力以调节激励频率的机构。