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    • 1. 发明授权
    • Wafer transfer system having vertical lifting capability
    • 具有垂直提升能力的晶圆传送系统
    • US5741109A
    • 1998-04-21
    • US651395
    • 1996-05-22
    • Mordechai WieslerMitchell Weiss
    • Mordechai WieslerMitchell Weiss
    • B65G49/07H01L21/677H01L21/687B65B1/06
    • H01L21/68707H01L21/67778H01L21/67781Y10S414/137
    • A wafer transfer system is operable with a front or side loading wafer carrier to move one or more wafers in a straight line from the carrier to a position in which the wafers are accessible for further processing by movement along the same straight line. The transfer system provides a wafer extractor which employs a plurality of paired fingers of a size and configuration to fit between the spaced, stacked wafers in the carrier. After insertion between the wafers, the fingers are movable by a small amount vertically to lift the wafers off the shoulders of the carrier. The fingers, now supporting the wafers, are movable generally horizontally along a straight line to remove the wafers from the carrier. The fingers are supported from a support structure in a manner which provides clearance for the wafers to pass through the support structure for further processing along the same straight line path.
    • 晶片传送系统可操作与前或侧加载晶片载体,以将一个或多个晶片从载体移动到直线,从而可以通过沿着相同直线的运动进一步处理晶片,从而可以访问晶片。 转移系统提供了晶片提取器,其采用尺寸和构型的多个成对的手指配合在载体中的间隔堆积的晶片之间。 在晶片之间插入之后,手指可以垂直移动少量,以将晶片从载体的肩部提起。 现在支撑晶片的指状物可沿着直线大致水平地移动,以从载体上移除晶片。 手指以支撑结构的方式被支撑,该方式为晶片通过支撑结构提供间隙,以便沿同一条直线路径进一步处理。
    • 2. 发明授权
    • Wafer transfer system having rotational capability
    • 具有旋转能力的晶片传送系统
    • US5615988A
    • 1997-04-01
    • US651715
    • 1996-05-22
    • Mordechai WieslerMitchell Weiss
    • Mordechai WieslerMitchell Weiss
    • H01L21/677H01L21/687B65G1/06
    • H01L21/68707H01L21/67778H01L21/67781Y10S414/137Y10S414/138
    • A wafer transfer system is operable with a front or side loading wafer carrier to move one or more horizontally oriented wafers out of the carrier and to rotate the wafers to a vertical orientation in which the wafers are accessible for further processing. The transfer system provides a wafer extractor which employs a plurality of paired fingers of a size and configuration to fit between the spaced, stacked wafers in the carrier for lifting the wafers off the shoulders of the carrier. The fingers are then movable generally horizontally to remove the wafers from the carrier into two angled combs having ledges for receiving wafers. The fingers and combs are rotated to a vertical orientation in which the wafers are supported along their edges by the combs. The fingers are shifted horizontally a small amount relative to the combs to disengage from the wafers, either by a translation following the rotation or by rotating the fingers and combs about different axes. In this manner, the wafers are in a position from which they can be accessed by a robot arm according to the particular process. In a further embodiment, the fingers and combs are also translated forward during the rotation, thereby minimizing the floor space or footprint required by the system.
    • 晶片传送系统可操作与前或侧加载晶片载体,以将一个或多个水平取向的晶片移出载体并将晶片旋转至垂直取向,其中晶片可接近进一步处理。 转移系统提供晶片提取器,其采用尺寸和构型的多个成对的指状物,以装配在载体中的间隔堆积的晶片之间,用于将晶片从载体的肩部提升。 然后手指大体水平地移动,以将晶片从载体移除成具有用于接收晶片的凸缘的两个成角度的梳子。 手指和梳子被旋转到垂直取向,其中晶片沿着其边缘被梳子支撑。 手指相对于梳子水平移动一小部分以与晶片脱离,无论是通过旋转之后的平移还是通过旋转手指并围绕不同的轴梳理。 以这种方式,晶片处于根据特定工艺可由机器人臂访问的位置。 在另一个实施例中,手指和梳子在旋转期间也向前平移,从而最小化系统所需的占地面积或占地面积。
    • 3. 发明授权
    • Straight line wafer transfer system
    • 直线晶圆转印系统
    • US5647718A
    • 1997-07-15
    • US651724
    • 1996-05-22
    • Mordechai WieslerMitchell Weiss
    • Mordechai WieslerMitchell Weiss
    • B65G49/07H01L21/677H01L21/687B65G1/04
    • H01L21/67781H01L21/67778H01L21/68707Y10S414/137
    • A wafer transfer system is operable with a front or side loading wafer carrier to move one or more wafers in a straight line from the carrier to a position in which the wafers are accessible for further processing by movement along the same straight line. The transfer system provides a wafer extractor which employs a plurality of paired fingers of a size and configuration to fit between the spaced, stacked wafers in the carrier. After insertion between the wafers, the fingers are movable by a small amount vertically to lift the wafers off the shoulders of the carrier. The fingers, now supporting the wafers, are movable generally horizontally along a straight line to remove the wafers from the carrier. The fingers are supported from a support structure in a manner which provides clearance for the wafers to pass through the support structure for further processing along the same straight line path.
    • 晶片传送系统可操作与前或侧加载晶片载体,以将一个或多个晶片从载体移动到直线,从而可以通过沿着相同直线的运动进一步处理晶片,从而可以访问晶片。 转移系统提供了晶片提取器,其采用尺寸和构型的多个成对的手指配合在载体中的间隔堆积的晶片之间。 在晶片之间插入之后,手指可以垂直移动少量,以将晶片从载体的肩部提起。 现在支撑晶片的指状物可沿着直线大致水平地移动,以从载体上移除晶片。 手指以支撑结构的方式被支撑,该方式为晶片通过支撑结构提供间隙,以便沿同一条直线路径进一步处理。
    • 4. 发明授权
    • Precision positioning device
    • 精密定位装置
    • US4258928A
    • 1981-03-31
    • US34355
    • 1979-04-30
    • Mordechai Wiesler
    • Mordechai Wiesler
    • B23B31/12B23B31/30B23B31/16
    • B23B31/12B23B31/30Y10T279/11Y10T279/1913Y10T279/26
    • A precision positioning device with a pair of relatively movable plates defining a carriage for four relatively movable guides. A centering port having a rectangular profile is formed by the guides which are constrained for mutually coating movement on the plates. The relative positions of the movable plates define the geometric shape of the centering port and the relative locations of the guides determine the size of the centering port. A pedestal configured to carry the article to be centered is positioned at the center of the centering port. A driver momentarily moves the guides and opens the centering port for reception of the article. Bias elements urge the guides against the item for centering the article on the collet.
    • 一种精密定位装置,具有一对相对可移动的板,其限定用于四个相对移动的导向件的托架。 具有矩形轮廓的对中端口由限制为在板上相互涂覆运动的引导件形成。 可移动板的相对位置限定了对中端口的几何形状,并且导向件的相对位置确定了定心端口的尺寸。 配置成携带待定中心的物品的基座位于定心口的中心。 驾驶员会立刻移动导轨并打开用于接收物品的定中心。 偏倚元素敦促导引件反对物品,使物品在夹头上居中。
    • 5. 发明授权
    • Precision centering device
    • 精密定心装置
    • US4174847A
    • 1979-11-20
    • US859734
    • 1977-12-12
    • Mordechai Wiesler
    • Mordechai Wiesler
    • B23B31/12B23B31/30B23B31/16
    • B23B31/30B23B31/12Y10T279/11Y10T279/1913Y10T279/26
    • A precision centering device with a pair of relatively movable plates forming a guideway for four relatively movable guides. A tapered centering port having a rectangular profile is formed by the guides which are constrained for mutual coacting movement by the plates. The relative positions of the movable plates define the geometric shape of the centering port and the relative locations of the guides determine the size of the centering port. A reciprocating collet configured to carry a semiconductor chip is received within the centering port at the center thereof. As the collet moves downwardly, the chip is guided through the tapered port and is centered on the collet.
    • 一种具有一对相对移动板的精密定心装置,其形成用于四个相对移动的导向件的导轨。 具有矩形轮廓的锥形对中端口通过被限制用于板的相互协调运动的引导件形成。 可移动板的相对位置限定了对中端口的几何形状,并且导向件的相对位置确定了定心端口的尺寸。 构造成承载半导体芯片的往复夹头在其中心处被接纳在定心口内。 当夹头向下移动时,芯片被引导通过锥形端口并且在夹头上居中。