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1. 发明授权

US07084073B2 Method of forming a via hole through a glass wafer 有权
标题翻译：通过玻璃晶片形成通孔的方法
公开(公告)号：US07084073B2
公开(公告)日：2006-08-01
申请号：US10681217
申请日：2003-10-09
申请人： Moon-chul Lee , Hyung Choi , Kyu-dong Jung , Mi Jang , Seog-woo Hong , Seok-whan Chung , Chan-bong Jun , Seok-jin Kang
发明人： Moon-chul Lee , Hyung Choi , Kyu-dong Jung , Mi Jang , Seog-woo Hong , Seok-whan Chung , Chan-bong Jun , Seok-jin Kang
IPC分类号： H01L21/302
CPC分类号： B81C1/00087 , H01L21/486 , H01L23/13 , H01L2924/0002 , H01L2924/00
摘要： A method of forming a via hole through a glass wafer includes depositing a material layer on an outer surface of the glass wafer, the material layer having a selection ratio higher than that of the glass wafer, forming a via-patterned portion on one side of the material layer, performing a first etching in which the via-patterned portion is etched to form a preliminary via hole, eliminating any remaining patterning material used in the formation of the via-patterned portion, performing a second etching in which the preliminary via hole is etched to form a via hole having a smooth surface and extending through the glass wafer, and eliminating the material layer. The method according to the present invention is able to form a via hole through a glass wafer without allowing formation of an undercut or minute cracks, thereby increasing the yield and reliability of MEMS elements.
摘要翻译：通过玻璃晶片形成通孔的方法包括在玻璃晶片的外表面上沉积材料层，该材料层的选择比率高于玻璃晶片的选择比，在玻璃晶片的一侧上形成通孔图案部分所述材料层进行蚀刻所述通路图案部分以形成预备通孔的第一蚀刻，消除在形成所述通路图案部分中使用的剩余图案材料，进行第二蚀刻，其中所述预通孔被蚀刻以形成具有光滑表面并延伸穿过玻璃晶片的通孔，并且消除材料层。根据本发明的方法能够通过玻璃晶片形成通孔，而不会形成底切或微小的裂缝，从而提高MEMS元件的成品率和可靠性。

2. 发明申请

US20050132798A1 Method for gyroscope using SMS wafer and gyroscope fabricated by the same 有权
标题翻译：使用SMS晶圆和陀螺仪制作的陀螺仪的方法
公开(公告)号：US20050132798A1
公开(公告)日：2005-06-23
申请号：US11002241
申请日：2004-12-03
申请人： Moon-chul Lee , Hyung Choi , Seok-jin Kang
发明人： Moon-chul Lee , Hyung Choi , Seok-jin Kang
IPC分类号： G01C19/56 , B81B3/00 , B81C1/00 , G01C19/5783 , H01R13/52 , G01P15/14
CPC分类号： G01C19/5769 , B81B3/0035 , B81B2201/0242 , B81C1/00579 , B81C1/0092 , B81C1/00936 , H01R13/52 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T74/12 , Y10T74/1229
摘要： Method for fabricating a gyroscope including: fabricating a SMS wafer where a first wafer, a metal film, and a second wafer are sequentially stacked; forming a cantilever or a bridge shaped-structure on the relevant portion of the first wafer through the photolithography process; attaching to the surface of the first wafer, a first cap made of glass and having a predetermined space for sealing the movable structure in a vacuum state; separating and removing the metal film and the second wafer from the first wafer; and attaching to the backside of the first wafer, the second cap which is structurally and materially symmetric to the first cap. The SMS wafer is fabricated by depositing the metal film on the second wafer and bonding the first wafer on the metal film using metal paste or material of polymer series. With lower material costs, improvements in performance and characteristics can be achieved.
摘要翻译：制造陀螺仪的方法，包括：制造顺序堆叠第一晶片，金属膜和第二晶片的SMS晶片; 通过光刻工艺在第一晶片的相关部分上形成悬臂或桥形结构; 附接到第一晶片的表面，由玻璃制成的第一盖，并且具有用于在真空状态下密封可移动结构的预定空间; 从第一晶片分离和去除金属膜和第二晶片; 并且附接到所述第一晶片的所述背面，所述第二盖在所述第一盖结构和物理上对称。通过在第二晶片上沉积金属膜并使用金属浆料或聚合物系列材料将第一晶片接合在金属膜上来制造SMS晶片。随着材料成本的降低，可以实现性能和特性的提高。

3. 发明授权

US07172916B2 Method and apparatus for vacuum-mounting a micro electro mechanical system on a substrate 失效
标题翻译：将微机电系统真空安装在基板上的方法和装置
公开(公告)号：US07172916B2
公开(公告)日：2007-02-06
申请号：US10701552
申请日：2003-11-06
申请人： Kyu-dong Jung , Chan-Bong Jun , Hyung Choi , Seok-jin Kang , Seog-woo Hong , Seok-whan Chung , Moon-chul Lee , Eun-sung Lee
发明人： Kyu-dong Jung , Chan-Bong Jun , Hyung Choi , Seok-jin Kang , Seog-woo Hong , Seok-whan Chung , Moon-chul Lee , Eun-sung Lee
IPC分类号： H01L21/00
CPC分类号： B81C1/00285
摘要： A method and apparatus for vacuum-mounting at least one micro electro mechanical system (MEMS) on a substrate includes a gas injecting section for injecting an inert gas into a vacuum chamber; a substrate aligning section for aligning a semiconductor substrate and a cover, the cover having a cavity formed therein and a getter attached to an interior surface of the cavity; a bonding section for bonding the semiconductor substrate and the cover together; and a controlling section for controlling the substrate aligning section to align the semiconductor and the cover, for controlling the gas injecting section to inject the inert gas into the vacuum chamber, and for controlling the bonding section to bond the semiconductor substrate and the cover together after the inert gas is injected.
摘要翻译：用于真空安装至少一个微机电系统（MEMS）在基板上的方法和装置包括用于将惰性气体注入真空室的气体注入部分; 用于对准半导体衬底和盖的衬底对准部分，所述盖具有形成在其中的空腔和附着到腔的内表面的吸气剂; 用于将半导体衬底和盖结合在一起的接合部分; 以及控制部分，用于控制衬底对准部分以对准半导体和盖子，用于控制气体注入部分以将惰性气体注入真空室中，并且用于控制接合部分将半导体衬底和盖子结合在一起，之后注入惰性气体。

4. 发明授权

US07225524B2 Method for fabricating a gyroscope 有权
标题翻译：制造陀螺仪的方法
公开(公告)号：US07225524B2
公开(公告)日：2007-06-05
申请号：US11002241
申请日：2004-12-03
申请人： Moon-chul Lee , Hyung Choi , Seok-jin Kang
发明人： Moon-chul Lee , Hyung Choi , Seok-jin Kang
IPC分类号： H04R31/00
CPC分类号： G01C19/5769 , B81B3/0035 , B81B2201/0242 , B81C1/00579 , B81C1/0092 , B81C1/00936 , H01R13/52 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T74/12 , Y10T74/1229
摘要： Method for fabricating a gyroscope including: fabricating a SMS wafer where a first wafer, a metal film, and a second wafer are sequentially stacked; forming a cantilever or a bridge shaped-structure on the relevant portion of the first wafer through the photolithography process; attaching to the surface of the first wafer, a first cap made of glass and having a predetermined space for sealing the movable structure in a vacuum state; separating and removing the metal film and the second wafer from the first wafer; and attaching to the backside of the first wafer, the second cap which is structurally and materially symmetric to the first cap. The SMS wafer is fabricated by depositing the metal film on the second wafer and bonding the first wafer on the metal film using metal paste or material of polymer series. With lower material costs, improvements in performance and characteristics can be achieved.
摘要翻译：制造陀螺仪的方法，包括：制造顺序堆叠第一晶片，金属膜和第二晶片的SMS晶片; 通过光刻工艺在第一晶片的相关部分上形成悬臂或桥形结构; 附接到第一晶片的表面，由玻璃制成的第一盖，并且具有用于在真空状态下密封可移动结构的预定空间; 从第一晶片分离和去除金属膜和第二晶片; 并且附接到所述第一晶片的所述背面，所述第二盖在所述第一盖结构和物理上对称。通过在第二晶片上沉积金属膜并使用金属浆料或聚合物系列材料将第一晶片接合在金属膜上来制造SMS晶片。随着材料成本的降低，可以实现性能和特性的提高。

5. 发明授权

US06835594B2 Metal wiring method for an undercut 有权
公开(公告)号：US06835594B2
公开(公告)日：2004-12-28
申请号：US10686769
申请日：2003-10-17
申请人： Ci-moo Shong , Seok-jin Kang , Seok-whan Chung , Moon-chul Lee , Kyu-dong Jung , Jong-seok Kim , Chan-bong Jun , Seog-woo Hong , Jung-ho Kang
发明人： Ci-moo Shong , Seok-jin Kang , Seok-whan Chung , Moon-chul Lee , Kyu-dong Jung , Jong-seok Kim , Chan-bong Jun , Seog-woo Hong , Jung-ho Kang
IPC分类号： H01L2144
CPC分类号： B81B7/0006 , H01L21/76877 , H01L23/5226 , H01L2924/0002 , H01L2924/00
摘要： A metal wiring method for an undercut in a MEMS packaging process includes disposing a MEMS element on a silicon substrate, welding a glass wafer to an upper portion of the silicon substrate having the MEMS element disposed thereon, the glass wafer having a hole formed therein for connecting a metal wiring, depositing a thin metal film for the metal wiring in the hole, and ion-mealing the deposited thin metal film. By the ion-mealing, the method is capable of connecting a metal wiring to a via hole having an undercut.

6. 发明授权

US06952965B2 Vertical MEMS gyroscope by horizontal driving 有权
标题翻译：垂直MEMS陀螺仪通过水平驱动
公开(公告)号：US06952965B2
公开(公告)日：2005-10-11
申请号：US10744099
申请日：2003-12-24
申请人： Seok-jin Kang , Seok-whan Chung , Moon-chul Lee , Kyu-dong Jung , Seog-soo Hong
发明人： Seok-jin Kang , Seok-whan Chung , Moon-chul Lee , Kyu-dong Jung , Seog-soo Hong
IPC分类号： B81B7/00 , B81B3/00 , B81B5/00 , B81C1/00 , G01C19/56 , G01C19/5762 , G01C19/5769 , G01P9/04
CPC分类号： G01C19/5762 , B81B3/0059 , B81B2201/0242 , B81B2203/051 , B81B2203/053
摘要： A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate, a detecting structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to the substrate, a cap wafer bonded with the substrate positioned above the driving structure and the detecting structure, and a fixed vertical displacement detection electrode formed at a predetermined location of an underside of the cap wafer, for detecting displacement of the detecting structure in the vertical direction.
摘要翻译：通过水平驱动的垂直MEMS陀螺仪包括基板，固定在基板的区域的上表面上的支撑层，浮动在基板上方并具有固定到支撑层的上表面的部分的驱动结构，平行于固定部分，驱动结构具有能够在与基板平行的预定方向上振动的预定区域;检测结构，其在与驱动结构相同的平面上固定到驱动结构，并且具有能够振动的预定区域在相对于基板的垂直方向上，与位于驱动结构上方的基板接合的盖晶片和检测结构，以及形成在盖晶片的下侧的预定位置处的固定垂直位移检测电极，用于检测位移的检测结构。

7. 发明授权

US08525862B2 Light emitting diode array integrated with lens, line printer head, and method of manufacturing the light emitting diode array 有权
标题翻译：集成了透镜，线路打印机头的发光二极管阵列和制造发光二极管阵列的方法
公开(公告)号：US08525862B2
公开(公告)日：2013-09-03
申请号：US12923719
申请日：2010-10-05
申请人： Seok-jin Kang , Hyung Choi , Eung-yeoul Yoon
发明人： Seok-jin Kang , Hyung Choi , Eung-yeoul Yoon
IPC分类号： B41J2/45 , B41J27/00 , B41J2/435
CPC分类号： B41J2/451 , H01L2224/16
摘要： A lens integrated light emitting diode array, a line printer head using the light emitting diode array, and a method of manufacturing the light emitting diode array. The light emitting diode array includes a plurality of light emitting diodes formed on a surface of a transparent substrate and a plurality of lenses formed on another surface opposite to the surface of the transparent substrate, wherein the plurality of light emitting diodes are divided into a plurality of groups to be arranged to respectively correspond to the plurality of lenses.
摘要翻译：透镜集成发光二极管阵列，使用发光二极管阵列的行式打印头，以及制造发光二极管阵列的方法。发光二极管阵列包括形成在透明基板的表面上的多个发光二极管和形成在与透明基板的表面相对的另一表面上的多个透镜，其中多个发光二极管被分成多个的组被分别对应于多个透镜。

8. 发明申请

US20110097113A1 Light emitting diode array integrated with lens, line printer head, and method of manufacturing the light emitting diode array 有权
标题翻译：集成了透镜，线路打印机头的发光二极管阵列和制造发光二极管阵列的方法
公开(公告)号：US20110097113A1
公开(公告)日：2011-04-28
申请号：US12923719
申请日：2010-10-05
申请人： Seok-jin Kang , Hyung Choi , Eung-yeoul Yoon
发明人： Seok-jin Kang , Hyung Choi , Eung-yeoul Yoon
IPC分类号： G03G15/04 , H01L33/08 , H01L33/60
CPC分类号： B41J2/451 , H01L2224/16
摘要： A lens integrated light emitting diode array, a line printer head using the light emitting diode array, and a method of manufacturing the light emitting diode array. The light emitting diode array includes a plurality of light emitting diodes formed on a surface of a transparent substrate and a plurality of lenses formed on another surface opposite to the surface of the transparent substrate, wherein the plurality of light emitting diodes are divided into a plurality of groups to be arranged to respectively correspond to the plurality of lenses.
摘要翻译：透镜集成发光二极管阵列，使用发光二极管阵列的行式打印头，以及制造发光二极管阵列的方法。发光二极管阵列包括形成在透明基板的表面上的多个发光二极管和形成在与透明基板的表面相对的另一表面上的多个透镜，其中多个发光二极管被分成多个的组被分别对应于多个透镜。

9. 发明申请

US20070284964A1 MICRO-ELECTRO MECHANICAL SYSTEM DEVICE AND METHOD OF FORMING COMB ELECTRODES OF THE SAME 审中-公开
标题翻译：微电子机械系统装置及其组合电极的形成方法
公开(公告)号：US20070284964A1
公开(公告)日：2007-12-13
申请号：US11754414
申请日：2007-05-29
申请人： Seok-whan Chung , Seok-jin Kang , Hyung Choi , Hyun-ku Jeong
发明人： Seok-whan Chung , Seok-jin Kang , Hyung Choi , Hyun-ku Jeong
IPC分类号： H01G9/00 , H02N1/00
CPC分类号： G02B26/0841 , B81B3/0086 , B81B2203/0136 , B81C1/00698
摘要： A micro-electro mechanical system (MEMS) device and a method of forming comb electrodes of the MEMS device are provided. The method includes forming a plurality of parallel trenches at regular intervals in one side of a first silicon substrate so as to define alternating first and second regions at different heights on the one side of the first silicon substrate, oxidizing the first silicon substrate in order to form an oxide layer in the first and second regions having different heights, forming a polysilicon layer on the oxide layer to at least fill up the trenches so as to level the oxide layer having different heights, bonding a second silicon substrate directly to a top surface of the polysilicon layer, selectively etching the second silicon substrate and the polysilicon layer using a first mask so as to form upper comb electrodes vertically aligned with the first regions, selectively etching the first silicon substrate using a second mask so as to form lower comb electrodes vertically aligned with the second regions, and removing the oxide layer interposed between the upper comb electrodes and the lower comb electrodes.
摘要翻译：提供了微电子机械系统（MEMS）装置和形成MEMS装置的梳状电极的方法。该方法包括在第一硅衬底的一侧中以规则的间隔形成多个平行的沟槽，以便在第一硅衬底的一侧上限定不同高度的交替的第一和第二区域，氧化第一硅衬底，以便在具有不同高度的第一和第二区域中形成氧化物层，在氧化物层上形成多晶硅层以至少填充沟槽，以使具有不同高度的氧化物层平坦化，将第二硅衬底直接接合到顶表面使用第一掩模选择性地蚀刻第二硅衬底和多晶硅层，以形成与第一区域垂直对准的上梳状电极，使用第二掩模选择性地蚀刻第一硅衬底，从而形成下梳状电极与第二区域垂直对准，以及去除介于上梳状电极和上梳状电极之间的氧化物层下梳电极。

10. 发明申请

US20080013132A1 Two-axis scanner 审中-公开
标题翻译：双轴扫描仪
公开(公告)号：US20080013132A1
公开(公告)日：2008-01-17
申请号：US11589226
申请日：2006-10-30
申请人： Seok-jin Kang
发明人： Seok-jin Kang
IPC分类号： H04N1/46
CPC分类号： G02B26/0841
摘要： A two-axis scanner includes: a base; a stage disposed on the base on an auxiliary frame; and a stage actuator between the base and the stage. The stage actuator includes: a first stationary part; a horizontally movable frame surrounded by the auxiliary frame; a first horizontal deformable torsion spring disposed between the first stationary part and the horizontally movable frame; and a horizontal driver actuating the horizontally movable frame. A first vertical deformable torsion spring is disposed between the horizontally movable frame and the auxiliary frame; a vertically movable frame surrounds the auxiliary frame, a second horizontal deformable torsion spring is disposed between the auxiliary frame and the vertically movable frame; wherein a second vertical deformable torsion spring is between the vertically movable frame and a second stationary part at sides of the vertically movable frame; and a vertical driver actuates the vertically movable frame.
摘要翻译：一个双轴扫描仪包括：一个基座; 在辅助框架上设置在基座上的台阶; 以及在基座和台架之间的平台致动器。舞台致动器包括：第一静止部分; 由辅助框架包围的水平移动框架; 设置在所述第一静止部分和所述水平移动框架之间的第一水平可变形扭转弹簧; 以及驱动水平移动框架的水平驾驶员。第一垂直可变形扭转弹簧设置在水平移动框架和辅助框架之间; 一个可垂直移动的框架围绕辅助框架，第二水平可变形扭转弹簧设置在辅助框架和可垂直移动的框架之间; 其中第二垂直可变形扭转弹簧在所述可垂直移动的框架和位于所述可垂直移动的框架的侧面处的第二固定部分之间; 并且垂直驱动器致动可垂直移动的框架。

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