专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US6122059A Scanning exposure apparatus and device fabrication method in which multiple laser interferometers use a respective laser head 失效
标题翻译：多个激光干涉仪使用相应的激光头的扫描曝光装置和装置制造方法
公开(公告)号：US6122059A
公开(公告)日：2000-09-19
申请号：US961222
申请日：1997-10-30
申请人： Mitsuru Inoue , Toshiaki Yamazaki
发明人： Mitsuru Inoue , Toshiaki Yamazaki
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027 , G01B9/02
CPC分类号： G03F7/70358 , G03F7/70716
摘要： The position of an original plate stage for moving an original plate and the position of a substrate stage for moving a substrate are measured by using an original plate laser interferometer and a substrate laser interferometer, respectively. While control is performed on the basis of the measured values, the pattern of the original plate is transferred onto the substrate by scan exposure by moving the original plate stage and the substrate stage in a scan direction. The measurements of the stage positions by the original plate laser interferometer and the substrate laser interferometer are performed by using light from a single laser head. If each of the original plate laser interferometer and the substrate laser interferometer includes a laser interferometer in the Y direction as the scan direction and a laser interferometer in the X direction perpendicular to the Y direction, the measurements by the original plate and substrate Y-direction laser interferometers are performed by using light from a single Y-direction laser head, and the measurements by the original plate and substrate X-direction laser interferometers are performed by using light from a single X-direction laser head.
摘要翻译：通过使用原版激光干涉仪和基板激光干涉仪来测量用于移动原版的原稿台的位置和用于移动基板的基板台的位置。当基于测量值进行控制时，通过在扫描方向上移动原稿台和基板台，通过扫描曝光将原版图案转印到基板上。通过使用来自单个激光头的光来进行原版激光干涉仪和基板激光干涉仪的阶段位置的测量。如果原版激光干涉仪和基板激光干涉仪中的每一个在Y方向上包括激光干涉仪作为扫描方向，并且激光干涉仪在X方向垂直于Y方向，则原始板和基板Y方向的测量通过使用来自单个Y方向激光头的光来执行激光干涉仪，并且通过使用来自单个X方向激光头的光来执行原始板和衬底X方向激光干涉仪的测量。

2. 发明申请

US20100315803A1 OPTICAL SHEET, SURFACE LIGHT SOURCE DEVICE AND TRANSMISSION-TYPE DISPLAY DEVICE 有权
标题翻译：光学片，表面光源器件和透射型显示器件
公开(公告)号：US20100315803A1
公开(公告)日：2010-12-16
申请号：US12918834
申请日：2009-07-17
申请人： Mitsuru Inoue , Amane Koike , Akiko Tomita , Hiroshi Kojima , Akinobu Ushiyama , Satoshi Goishihara
发明人： Mitsuru Inoue , Amane Koike , Akiko Tomita , Hiroshi Kojima , Akinobu Ushiyama , Satoshi Goishihara
IPC分类号： G02F1/13357 , F21V5/04 , F21V5/00
CPC分类号： G02B3/0068 , G02B5/0231 , G02B5/0278 , G02F1/1303 , G02F2001/133607
摘要： An optical sheet including a fly-eye lens is provided. This optical sheet can exhibit excellent optical functions, including desired light condensing ability, light diffusing ability and ability for rendering a light source image substantially invisible, as well as can be produced with high reproducibility. In one example, the optical sheet (40) includes: a sheet-like main body (45); first unit shaped elements (50) arranged on one surface (46) of the main body and constituting together the fly-eye lens; and second unit shaped elements (55) arranged on the one surface of the main body and extending in parallel with one direction on the sheet surface of the main body. In this case, the first unit shaped elements are arranged, with a space provided therebetween, on the one surface of the main body, while the second unit shaped elements are arranged, between the first unit shaped elements, on the one surface of the main body.
摘要翻译：提供了包括飞眼镜片的光学片。该光学片可以表现出优异的光学功能，包括期望的聚光能力，光漫射能力和使光源图像基本上不可见的能力，并且可以以高再现性制造。在一个示例中，光学片（40）包括：片状主体（45）; 第一单元形元件（50），布置在主体的一个表面（46）上，并构成飞眼透镜; 以及第二单元形元件（55），其布置在主体的一个表面上并且在主体的片材表面上与一个方向平行地延伸。在这种情况下，第一单元形状元件在主体的一个表面上设置有间隔开的空间，而第二单元形状元件布置在第一单元形状元件之间，主体的一个表面上身体。

3. 发明授权

US07454216B2 in-facility information provision system and in-facility information provision method 失效
标题翻译：设施内信息提供系统和设施信息提供方法
公开(公告)号：US07454216B2
公开(公告)日：2008-11-18
申请号：US11071342
申请日：2005-03-04
申请人： Hiroaki Shikano , Naohiko Irie , Atsushi Ito , Junji Inaba , Mitsuru Inoue , Kazutaka Sakai
发明人： Hiroaki Shikano , Naohiko Irie , Atsushi Ito , Junji Inaba , Mitsuru Inoue , Kazutaka Sakai
IPC分类号： H04Q7/20
CPC分类号： G06Q30/00
摘要： To enable an appropriate change of a path according to a situation of a user and a situation of a target store and the path without having a special terminal when the user of a facility utilizes the target store and an appropriate guidance, spatial recognition nodes respectively provided with a sensor and information processing equipment are installed in each location in the facility and connected via a network. The nodes recognize the position, the action and the behavior of a user of the facility. A server controlling a system manages the recognition result and constantly grasps the situation of the user. The situation of the user is recognized by the node installed at a destination and on a path, and notified to the server. The server displays appropriate path information based on the recognition result on any of plural information displays installed in the facility when the user approaches.
摘要翻译：为了在设施的用户利用目标存储和适当的指导的情况下，根据用户的情况和目标存储的情况以及路径而不具有特殊终端的路径的适当改变，分别提供了空间识别节点传感器和信息处理设备安装在设施的每个位置并通过网络连接。节点识别设施的用户的位置，动作和行为。控制系统的服务器管理识别结果并且不断掌握用户的情况。用户的情况由安装在目的地和路径上的节点识别，并通知给服务器。当用户接近时，服务器基于在设施中安装的多个信息显示器中的任一个上的识别结果来显示适当的路径信息。

4. 发明申请

US20080158530A1 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20080158530A1
公开(公告)日：2008-07-03
申请号：US11959197
申请日：2007-12-18
申请人： Hirofumi Fujii , Hiroshi Ito , Mitsuru Inoue
发明人： Hirofumi Fujii , Hiroshi Ito , Mitsuru Inoue
IPC分类号： G03B27/42
CPC分类号： G03B27/58 , G03F7/70725 , G03F7/709
摘要： An exposure apparatus including a projection optical system and configured to expose a substrate to light via the projection optical system includes a support configured to support the projection optical system, an object supported by the support and movable relative the support, an actuator configured to drive the object, a detector configured to detect a relative position between the object and the support, and a controller configured to perform a control of the actuator based on an output of the detector to cause the object to follow the support. The controller is configured to perform an estimation of a vibration of the support based on an output of the detector in parallel with the control to cause the object to follow the support.
摘要翻译：包括投影光学系统并经配置以经由投影光学系统将基板曝光于光的曝光装置包括：支撑构件，用于支撑投影光学系统;由支撑件支撑并可相对于支撑件移动的物体;致动器，物体，被配置为检测物体和支撑体之间的相对位置的检测器，以及被配置为基于检测器的输出执行致动器的控制以使物体跟随支撑件的控制器。控制器被配置为基于检测器的输出与控制并行地执行对支撑件的振动的估计，以使对象遵循支撑。

5. 发明申请

US20080068603A1 ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：防振装置，曝光装置和装置制造方法
公开(公告)号：US20080068603A1
公开(公告)日：2008-03-20
申请号：US11846904
申请日：2007-08-29
申请人： Ryo Nawata , Mitsuru Inoue , Hiroshi Ito , Makoto Mizuno
发明人： Ryo Nawata , Mitsuru Inoue , Hiroshi Ito , Makoto Mizuno
IPC分类号： G01N21/01 , G03B27/62 , H01S4/00
CPC分类号： G03B27/53 , G03F7/70833 , G03F7/709 , Y10T29/49002
摘要： An anti-vibration apparatus includes a target object, a reference object, a measuring device which measures the position of the target object relative to the reference object, a driving mechanism to drive the target object based on the measurement result obtained by the measuring device, a Lorentz's force actuator which supports the reference object, and a power supply device which supplies a constant current to the Lorentz's force actuator. The actuator which supports the reference object uses a Lorentz's force actuator or an actuator which supports the reference object by the pressure of a gas.
摘要翻译：防振装置包括目标物体，参考物体，测量目标物体相对于基准物体的位置的测量装置，基于由测量装置获得的测量结果来驱动目标物体的驱动机构，支撑参考对象的洛伦兹力致动器，以及向洛伦兹力致动器提供恒定电流的电源装置。支撑参考对象的致动器使用洛仑兹力致动器或通过气体压力支撑参考对象的致动器。

6. 发明申请

US20060098320A1 Storage control device and method for detecting write errors to storage media 失效
公开(公告)号：US20060098320A1
公开(公告)日：2006-05-11
申请号：US11022781
申请日：2004-12-28
申请人： Tsutomu Koga , Mitsuru Inoue
发明人： Tsutomu Koga , Mitsuru Inoue
IPC分类号： G11B5/09
CPC分类号： G06F11/1004 , G06F12/0866
摘要： There are provided a cache region that stores write data from a host device, storage media, a data storage region for the storage media, and a comparison unit. A first comparison object is generated for N items of write data on the cache region and the N items of write data are transferred to the data storage region. Write data is read from a designated address of the data storage region and this write data is written to the storage media. When N items of write data have been read, a second comparison object is generated in respect of the write data. The comparison unit compares the first comparison object and the second comparison object, and if the result of the comparison is a mismatch, the N items of write data on the cache region are again transferred to the data storage region.

7. 发明授权

US06320645B1 Stage system and exposure apparatus, and device manufacturing method using the same 有权
标题翻译：舞台系统和曝光装置以及使用其的装置制造方法
公开(公告)号：US06320645B1
公开(公告)日：2001-11-20
申请号：US09324652
申请日：1999-06-03
申请人： Mitsuru Inoue , Nobushige Korenaga , Yukio Tokuda
发明人： Mitsuru Inoue , Nobushige Korenaga , Yukio Tokuda
IPC分类号： G03B2742
CPC分类号： G03F7/70691 , G03B27/42 , Y10T74/20354
摘要： A stage system includes a movable stage, a guide mechanism for guiding the stage with respect to a predetermined direction, and a preloading mechanism for producing a magnetic attraction force with which the rigidity of the guide mechanism can be increased, wherein a portion to be attracted by the magnetic attraction force is made of a material having a product of a residual magnetic flux density Br and a holding force Hc in a hysteresis curve, not greater than 100 J/m3, this being very effective to reduce the hysteresis force, which is resistance due to the residual magnetic force, as compared with the preloading attraction force, whereby high precision positioning of the stage is accomplished.
摘要翻译：舞台系统包括可动台，用于相对于预定方向引导舞台的引导机构，以及用于产生引力机构的刚性的磁吸引力的预加载机构，其中吸引的部分通过磁吸引力由具有残余磁通密度Br和滞后曲线中的保持力Hc的乘积的材料制成，不大于100J / m 3，这对减小滞后力是非常有效的，这是非常有效的与预载吸引力相比，由于剩余磁力产生的阻力，从而实现了台的高精度定位。

8. 发明授权

US5301933A Sample moving device 失效
标题翻译：样品移动装置
公开(公告)号：US5301933A
公开(公告)日：1994-04-12
申请号：US71225
申请日：1993-06-02
申请人： Mitsuru Inoue
发明人： Mitsuru Inoue
IPC分类号： B23Q5/40 , F16H25/24 , B23Q3/18
CPC分类号： F16H25/24 , B23Q5/408 , F16H2025/2445
摘要： A moving device includes a moving table for mounting an object thereon and for moving the object, a guiding mechanism for regulating the movement of the moving table, a driving mechanism for generating a force to move the moving table, and a transmission mechanism for transmitting the driving force to the moving table. The transmission mechanism includes at least one set of parallel leaf springs having an oscillation-damping material disposed therebetween.
摘要翻译：移动装置包括用于在其上安装物体并用于移动物体的移动台，用于调节移动台的移动的引导机构，用于产生移动移动台的力的驱动机构，以及用于传送移动台的传动机构驱动力到移动台。传动机构包括至少一组平行的板簧，其中设置有摆动阻尼材料。

9. 发明申请

US20090295113A1 VEHICULAR SUSPENSION ARM 失效
标题翻译：车用悬挂臂
公开(公告)号：US20090295113A1
公开(公告)日：2009-12-03
申请号：US12063601
申请日：2006-08-16
申请人： Mitsuru Inoue , Fumio Kikuchi , Yutaka Hozumi , Jun Matsuike
发明人： Mitsuru Inoue , Fumio Kikuchi , Yutaka Hozumi , Jun Matsuike
IPC分类号： B60G7/00
CPC分类号： B60G7/001 , B60G2200/144 , B60G2204/129 , B60G2204/1431 , B60G2206/014 , B60G2206/017 , B60G2206/122 , B60G2206/722 , B60G2206/8103 , B60G2206/8201
摘要： A vehicular suspension arm is provided in which an arm main body (1) includes a main plate (2) press-formed as a main part of the arm main body and having a short cylindrical part (EB) provided integrally with one end by flanging, and a reinforcing plate (H) superimposed on one of upper and lower faces of the main plate (2) and reinforcing the main plate (2). The reinforcing plate (H) has an eye-shaped head part (Ha) formed in an annular shape and arranged coaxially with the short cylindrical part (EB), and a tail part (Hb) extending integrally from the eye-shaped head part (Ha) along the longitudinal direction of the main plate (2), is formed from a single plate material that is thicker than the main plate (2), and has at least the tail part (Hb) welded to the main plate (2). A bush press-fit portion (P1) is formed from an inner peripheral face of the eye-shaped head part (Ha) and an inner peripheral face of the short cylindrical part (EB). This ensures that the cross-sectional shape of a transition section from the bush press-fit portion to the plate-type arm main body is adequate, thus enabling the rigidity and strength required for the transition section to be easily guaranteed and, furthermore, it becomes possible to meet a requirement for increasing the strength of the arm without specially increasing the space around the outer periphery of the bush press-fit portion.
摘要翻译：提供一种车辆悬架臂，其中臂主体（1）包括主压板（2）作为臂主体的主要部分，该主板（2）具有通过折边与一端一体设置的短圆柱形部分（EB），以及叠加在主板（2）的上表面和下表面之一上并加强主板（2）的加强板（H）。所述加强板（H）具有与所述短圆筒部（EB）同轴配置的环状的眼形头部（Ha），和从所述眼形头部（ Ha）沿着主板（2）的纵向方向由与板（2）相比厚的单个板材形成，并且至少具有焊接到主板（2）的尾部（Hb）。衬套压入部（P1）由眼形头部（Ha）的内周面和短圆筒部（EB）的内周面形成。这确保了从衬套压合部到板式臂主体的过渡部的横截面形状是足够的，因此能够容易地保证过渡部所需的刚性和强度，此外，可以满足增加臂的强度的要求，而不会特别地增加衬套压合部的外周周围的空间。

10. 发明申请

US20080246939A1 EXPOSURE APPARATUS AND ORIGINAL 失效
标题翻译：曝光装置及原产地
公开(公告)号：US20080246939A1
公开(公告)日：2008-10-09
申请号：US12056770
申请日：2008-03-27
申请人： Masami Yonekawa , Mitsuru Inoue
发明人： Masami Yonekawa , Mitsuru Inoue
IPC分类号： G03B27/42
CPC分类号： G03F1/62 , B82Y10/00 , B82Y40/00 , G03F1/24 , G03F7/70916 , G03F7/70983
摘要： An exposure apparatus configured to expose a pattern of an original onto a substrate includes a wire electrode row that includes plural parallel wire electrodes, and that is opposed to the original, and a power source that applies an AC voltage to the plural wire electrodes, wherein the wire electrode row includes a first electrode group, and a second wire electrode group to which an AC voltage having a phase different from that of an AC voltage applied to the first electrode group is applied.
摘要翻译：被配置为将原稿的图案曝光到基板上的曝光装置包括：包括多个平行的线电极并且与原稿相对的线电极列和向多个线电极施加AC电压的电源，其中线电极列包括第一电极组和施加了与施加到第一电极组的AC电压的相位不同的AC电压的第二线电极组。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式