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    • 5. 发明授权
    • Method of manufacturing an aluminum nitride structure
    • 制造氮化铝结构的方法
    • US5204080A
    • 1993-04-20
    • US545691
    • 1990-06-29
    • Mitsuo KasoriAkihiro HoriguchiYoshiko GotoFumio Ueno
    • Mitsuo KasoriAkihiro HoriguchiYoshiko GotoFumio Ueno
    • C04B35/581C04B37/00
    • C04B35/581
    • An aluminum nitride structure is prepared by placing an oxygen-trapping substance at at least one position on an aluminum nitride substrate having a first concentration of solution oxygen, and heating the resultant structure in a non-oxidizing atmosphere to locally reduce the first concentration of solution oxygen in said aluminum nitride substrate under said oxygen-trapping substance to a second concentration of solution oxygen by trapping the solution oxygen in the oxygen-trapping substance, thereby forming an aluminum nitride structure in which at least one region of the aluminum nitride structure corresponding to the position of said oxygen-trapping substance, which position has said second oxygen concentration, is integrally formed with aluminum nitride regions having said first concentration of solution oxygen. The aluminum nitride structure of the present invention exhibits anisotropic physical properties.
    • 通过在具有第一浓度溶液氧的氮化铝衬底上的至少一个位置放置氧捕获物质并在非氧化性气氛中加热所得结构以局部地降低溶液的第一浓度来制备氮化铝结构 在所述氧捕获物质下的所述氮化铝衬底中的氧气通过捕集氧吸收物质中的氧气而捕获到第二浓度的溶液氧,由此形成氮化铝结构,其中至少一个氮化铝结构区域对应于 所述氧捕获物质的位置具有所述第二氧浓度,与具有所述第一浓度溶液氧的氮化铝区域一体形成。 本发明的氮化铝结构显示出各向异性的物理性质。