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1. 发明授权

US5759424A Plasma processing apparatus and processing method 失效
标题翻译：等离子体处理装置及处理方法
公开(公告)号：US5759424A
公开(公告)日：1998-06-02
申请号：US409077
申请日：1995-03-22
申请人： Mitsuko Imatake , Ichiro Sasaki , Toru Otsubo , Hitoshi Tamura , Takashi Kamimura
发明人： Mitsuko Imatake , Ichiro Sasaki , Toru Otsubo , Hitoshi Tamura , Takashi Kamimura
IPC分类号： H01J37/32 , H05H1/00 , G01N21/00
CPC分类号： H01J37/32935 , H01J37/3299
摘要： A plasma processing apparatus is provided with a processing chamber having at least a pair of opposing windows to allow observation of the interior thereof, a plasma generation unit for generating a plasma in the processing chamber, a plasma light emission monitoring unit arranged externally of the processing chamber for monitoring the light emission of the plasma through one of the pair of opposing windows, a reference light irradiation unit for irradiating a reference light to the plasma light emission monitoring unit from that window of the pair of opposing windows which is opposite to the plasma light emission monitoring unit through the pair of opposing windows, and a control for controlling a plasma processing state of the substrate to be processed by comparing the data on the light emission of the plasma monitored by the plasma light emission unit and the reference light.
摘要翻译：等离子体处理装置具有处理室，该处理室具有至少一对相对的窗口以允许观察其内部;等离子体产生单元，用于在所述处理室中产生等离子体;等离子体发光监测单元，其布置在所述处理的外部用于通过所述一对相对窗口中的一个监视等离子体的发光的参考光照射单元，用于从与所述等离子体相对的所述一对相对窗口的所述窗口向等离子体发光监测单元照射参考光通过一对相对窗口的发光监视单元，以及用于通过比较由等离子体发光单元监视的等离子体的发光的数据和参考光来控制待处理的基板的等离子体处理状态的控制。

2. 发明授权

US06245190B1 Plasma processing system and plasma processing method 失效
标题翻译：等离子体处理系统和等离子体处理方法
公开(公告)号：US06245190B1
公开(公告)日：2001-06-12
申请号：US09048075
申请日：1998-03-26
申请人： Toshio Masuda , Katsuhiko Mitani , Tetsunori Kaji , Jun'ichi Tanaka , Katsuya Watanabe , Shigeru Shirayone , Toru Otsubo , Ichiro Sasaki , Hideshi Fukumoto , Makoto Koizumi
发明人： Toshio Masuda , Katsuhiko Mitani , Tetsunori Kaji , Jun'ichi Tanaka , Katsuya Watanabe , Shigeru Shirayone , Toru Otsubo , Ichiro Sasaki , Hideshi Fukumoto , Makoto Koizumi
IPC分类号： H05H146
CPC分类号： H01J37/32091 , H01J37/32082 , H01J37/32165 , H01J37/32623 , H01J37/3266 , H01J37/32678
摘要： A plasma processing apparatus and a method therefor which can achieve a preferred process rate, a fine pattern process capability, a selectivity and uniformity of processing at the same time compatibly for a large size wafer, which effects are achieved by controlling the plasma state and the dissociation state of etching gas through control of the electron resonance through application of a magnetic field thereto. A high frequency power at 20-300 MHz is applied across a pair of electrodes in a vacuum process chamber, and a magnetic field is formed parallel to the plane of the electrodes in the space between the electrodes. By controlling the intensity of the magnetic field in a range of 100 gauss or smaller, formation of electron cyclotron resonance and electron sheath resonance occurring from interaction between the electrical field and the magnetic field in the electrode sheath portion is controlled. Thereby, the plasma state, i.e., the electron density, electron energy distribution and dissociation state of the process gas in the plasma, can be controlled. The magnetic field is generated by a plurality of coils, an outer shield, and pendant yoke to form magnetic field parallel to the plane of the electrodes in the space between the upper and the bottom electrodes.
摘要翻译：一种等离子体处理装置及其方法，其能够通过控制等离子体状态和等离子体状态来实现对于大尺寸晶片同时实现优选的处理速率，精细图案处理能力，同时处理的选择性和均匀性，通过对其施加磁场来控制电子共振来蚀刻气体的解离状态。在真空处理室中的一对电极上施加20-300MHz的高频功率，并且在电极之间的空间中形成平行于电极平面的磁场。通过控制100高斯或更小范围内的磁场的强度，控制由电场鞘部分中的电场和磁场之间的相互作用产生的电子回旋共振和电子鞘共振的形成。由此，可以控制等离子体状态，即等离子体中的处理气体的电子密度，电子能量分布和解离状态。磁场由多个线圈，外屏蔽和悬挂磁轭产生，以在上电极和下电极之间的空间中形成平行于电极平面的磁场。

3. 发明授权

US06422172B1 Plasma processing apparatus and plasma processing method 失效
标题翻译：等离子体处理装置和等离子体处理方法
公开(公告)号：US06422172B1
公开(公告)日：2002-07-23
申请号：US09040404
申请日：1998-03-18
申请人： Jyunichi Tanaka , Toru Otsubo , Toshio Masuda , Ichiro Sasaki , Tetsunori Kaji , Katsuya Watanabe
发明人： Jyunichi Tanaka , Toru Otsubo , Toshio Masuda , Ichiro Sasaki , Tetsunori Kaji , Katsuya Watanabe
IPC分类号： C23F102
CPC分类号： H01J37/32082 , C23C16/505 , H01J37/32422
摘要： A plasma processing apparatus has plasma generating means including a means for generating capacitive coupled discharge and a means for radiating electromagnetic waves, so that the energy state of electrons is independently controlled by a combination of a plasma due to capacitive coupled discharge and a plasma due to radiation of electromagnetic waves of a high-frequency, to thereby control the occurrence of radical species, and thereby establishing a compatibility, for example, between high selective etching and high accuracy and high speed in etching or between film quality and film formation rate. Since the density distribution of the plasma can be controlled without any change in hardware configuration by adjusting distributions of the power for capacitive coupled discharge and the power for radiation of electromagnetic waves, the entire surface of a large-sized substrate can be etched at a high accuracy into a fine pattern. The apparatus is also intended to prevent the occurrence of dust caused by plasma processing and changes in characteristics of plasma processing, and hence to enhance productivity of semiconductor devices and/or liquid crystal display elements.
摘要翻译：等离子体处理装置具有等离子体产生装置，其包括用于产生电容耦合放电的装置和用于辐射电磁波的装置，从而由于电容耦合放电引起的等离子体和等离子体的组合独立地控制电子的能量状态，由于辐射高频的电磁波，从而控制自由基物质的发生，从而在高选择性蚀刻和高精度和高速蚀刻或膜质量和成膜速率之间建立兼容性。由于可以通过调节用于电容耦合放电的功率的分布和电磁波的辐射功率来控制等离子体的密度分布而没有硬件配置的任何变化，因此可以将高尺寸基板的整个表面以高精确到精细模式。该装置还旨在防止等离子体处理引起的灰尘的发生和等离子体处理的特性的变化，从而提高半导体器件和/或液晶显示元件的生产率。

4. 发明授权

US08553248B2 Image forming apparatus 失效
标题翻译：图像形成装置
公开(公告)号：US08553248B2
公开(公告)日：2013-10-08
申请号：US11435652
申请日：2006-05-17
申请人： Shigemi Kumagai , Yasuo Fukatsu , Ichiro Sasaki , Hiroaki Tomiyasu , Shunsuke Nishimura , Yuzuru Yano
发明人： Shigemi Kumagai , Yasuo Fukatsu , Ichiro Sasaki , Hiroaki Tomiyasu , Shunsuke Nishimura , Yuzuru Yano
IPC分类号： G06F3/12
CPC分类号： G06F3/1264 , G06F3/1211 , G06F3/1263 , G06F3/1286
摘要： An image forming apparatus accumulates the number of input print jobs when a control circuit of the image forming apparatus recognizes that, during the execution of the first print job having a sheet post-processing setting, a subsequent new print job having no sheet post-processing settings is input. If the accumulated number of input print jobs is less than or equal to a predetermined value, the image forming apparatus allows the interruption of the first print job by the subsequent new job.
摘要翻译：当图像形成装置的控制电路识别到在具有片材后处理设置的第一打印作业的执行期间，没有片材后处理的后续新的打印作业时，图像形成装置累积输入打印作业的数量输入设置。如果输入打印作业的累积数量小于或等于预定值，则图像形成装置允许随后的新作业中断第一打印作业。

5. 发明授权

US08200103B2 Image forming system 有权
标题翻译：图像形成系统
公开(公告)号：US08200103B2
公开(公告)日：2012-06-12
申请号：US11469810
申请日：2006-09-01
申请人： Ichiro Sasaki , Akinobu Nishikata , Mitsuhiko Sato , Hidenori Sunada , Manabu Yamauchi , Takayuki Fujii , Naoto Watanabe , Shunsuke Nishimura
发明人： Ichiro Sasaki , Akinobu Nishikata , Mitsuhiko Sato , Hidenori Sunada , Manabu Yamauchi , Takayuki Fujii , Naoto Watanabe , Shunsuke Nishimura
IPC分类号： G03G15/00
CPC分类号： G03G15/6564 , G03G15/235
摘要： An image forming system executes image forming with pages kept continuous by controlling supplying of sheets corresponding to pages for which sheets have not fed in consideration of pages for which sheets have already been fed, even if image forming processing is temporally suspended.
摘要翻译：即使图像形成处理暂时停止，图像形成系统也可以通过控制提供与尚未馈送纸张的纸张的纸张相对应的纸张来保持连续的图像，从而执行图像形成。

6. 发明授权

US07821526B2 Image forming apparatus 有权
标题翻译：图像形成装置
公开(公告)号：US07821526B2
公开(公告)日：2010-10-26
申请号：US11745017
申请日：2007-05-07
申请人： Naohisa Nagata , Ichiro Sasaki , Akinobu Nishikata , Satoru Yamamoto , Hiroshi Matsumoto
发明人： Naohisa Nagata , Ichiro Sasaki , Akinobu Nishikata , Satoru Yamamoto , Hiroshi Matsumoto
IPC分类号： G03G15/04
CPC分类号： G03G15/0131 , B41J29/393 , G03G15/0194 , G03G15/041 , G03G15/5058 , G03G2215/00059 , G03G2215/00063 , G03G2215/0161 , H04N1/0402 , H04N1/0408 , H04N1/0443 , H04N1/047 , H04N1/1135 , H04N1/12 , H04N1/506 , H04N2201/0082 , H04N2201/04722
摘要： An image forming apparatus is configured, in performing changing of a rotation speed of a scanner motor and forming of an image density adjustment patch in the same page interval, to change the rotation speed of the scanner motor before forming the image density adjustment patch.
摘要翻译：图像形成装置被配置为在形成图像浓度调节贴片之前，在执行扫描器电机的旋转速度的改变和同一页面间隔中的图像浓度调整贴片的形成时，改变扫描器电动机的旋转速度。

7. 发明授权

US07715736B2 Image forming apparatus that displays process information requiring execution relating to exchanged components,controlling method of the same 有权
标题翻译：显示需要与交换的部件相关的执行的处理信息的图像形成装置，其控制方法
公开(公告)号：US07715736B2
公开(公告)日：2010-05-11
申请号：US11470222
申请日：2006-09-05
申请人： Naohisa Nagata , Ichiro Sasaki , Akinobu Nishikata , Satoru Yamamoto , Hiroshi Matsumoto
发明人： Naohisa Nagata , Ichiro Sasaki , Akinobu Nishikata , Satoru Yamamoto , Hiroshi Matsumoto
IPC分类号： G03G15/00
CPC分类号： G03G15/55 , G03G15/502
摘要： An image forming apparatus determines process items needed as exchanged components and an order of executing the process items needed for a plurality of kinds of exchanged components based on priority order information of the process items and causes a display unit to control a display for ordering to execute process items needed for the components according to the determined order of execution.
摘要翻译：图像形成装置基于处理项目的优先级顺序信息来确定所交换的组件所需的处理项目和执行多种交换的组件所需的处理项目的顺序，并使显示单元控制显示以进行排序根据确定的执行顺序，组件所需的处理项目。

8. 发明授权

US07686300B2 Driving device 失效
标题翻译：驱动装置
公开(公告)号：US07686300B2
公开(公告)日：2010-03-30
申请号：US11860907
申请日：2007-09-25
申请人： Naoto Watanabe , Takayuki Fujii , Shunsuke Nishimura , Toshiyuki Miyake , Takashi Yokoya , Ichiro Sasaki , Akinobu Nishikata , Hiroshi Matsumoto , Mitsuhiko Sato , Akihiko Sakai
发明人： Naoto Watanabe , Takayuki Fujii , Shunsuke Nishimura , Toshiyuki Miyake , Takashi Yokoya , Ichiro Sasaki , Akinobu Nishikata , Hiroshi Matsumoto , Mitsuhiko Sato , Akihiko Sakai
IPC分类号： B65H9/16
CPC分类号： B65H9/16 , B65H2220/09 , B65H2403/514 , B65H2404/14 , B65H2404/1442 , B65H2511/212 , B65H2513/51 , B65H2220/02 , B65H2220/11 , B65H2220/01
摘要： A sheet processing apparatus is disclosed which is capable of preventing a motor from losing synchronization when initializing a roller position at power-up time, even if a diagonal feed mechanism does not have a sensor for detecting a position of a diagonal feed roller pair.
摘要翻译：公开了一种纸张处理装置，其能够防止马达在上电时初始化滚轴位置时失去同步，即使对角线进给机构没有用于检测对角线进给辊对的位置的传感器。

9. 外观设计

USD576163S1 Case for hard disc drive 有权
标题翻译：硬盘驱动器盒
公开(公告)号：USD576163S1
公开(公告)日：2008-09-02
申请号：US29272601
申请日：2007-02-13
申请人： Ichiro Sasaki
设计人： Ichiro Sasaki

10. 发明授权

US07389084B2 Image forming system with temporary storage trays between sheet storage units and image forming apparatus 失效
标题翻译：图像形成系统，在片材存储单元和成像设备之间具有临时存储托盘
公开(公告)号：US07389084B2
公开(公告)日：2008-06-17
申请号：US11378476
申请日：2006-03-20
申请人： Naoto Watanabe , Hitoshi Kato , Takahiro Watanabe , Keita Takahashi , Masahiro Serizawa , Ichiro Sasaki , Takuya Kawamura
发明人： Naoto Watanabe , Hitoshi Kato , Takahiro Watanabe , Keita Takahashi , Masahiro Serizawa , Ichiro Sasaki , Takuya Kawamura
IPC分类号： G03G15/00 , B65H5/00
CPC分类号： G03G15/6558 , B65H2402/10 , G03G15/235
摘要： An image forming system has a sheet deck assembly, an image forming apparatus, and a feeding buffering apparatus with plural feeding buffer trays for temporarily storing sheets of printing paper fed from plural printing paper decks of the sheet deck assembly. The feeding buffering apparatus feeds the temporarily stored sheets to the image forming apparatus.
摘要翻译：图像形成系统具有片材组合件，图像形成装置和具有多个供给缓冲托盘的进料缓冲装置，用于临时存储从片材甲板组件的多个打印纸张片材供给的打印纸张。进给缓冲装置将临时存储的纸张馈送到图像形成装置。

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