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    • 5. 发明授权
    • Probe-on-substrate
    • 探针在衬底上
    • US09057741B2
    • 2015-06-16
    • US13554382
    • 2012-07-20
    • David M. AudetteKevin BocashS. Jay CheySteven A. CordesDustin M. Fregeau
    • David M. AudetteKevin BocashS. Jay CheySteven A. CordesDustin M. Fregeau
    • G01R3/00G01R1/067G01R1/073
    • G01R1/06744G01R1/07314G01R3/00
    • Probes are directly patterned on a test substrate, thereby eliminating a need for an interposer. Probe contact structures are formed as a two-level structure having a greater lateral dimension for a lower level portion than for an upper level portion. First cavities are formed in a masking layer applied to a test substrate, filling the cavities with a conductive material, and planarizing the top surfaces of the conductive material portions to form lower level portions. Another masking layer is applied over the lower level portions and patterned to define second cavities having a smaller lateral dimension that the lower level portions. The second cavities are filled with at least one conductive material to form upper level portions of the probe contact structures. The upper level portion of each probe contact structure can be employed to penetrate a surface oxide of solder balls.
    • 探针直接在测试基板上图案化,从而不需要插入器。 探针接触结构形成为具有较低水平部分的较大横向尺寸的上部水平部分的两级结构。 在施加到测试基板的掩模层中形成第一空腔,用导电材料填充空腔,并且平坦化导电材料部分的顶表面以形成较低的水平部分。 另一掩蔽层被施加在较低层部分上并被图案化以限定具有较小横向尺寸的第二空腔,下部水平部分。 第二腔被至少一个导电材料填充以形成探针接触结构的上部分。 可以使用每个探针接触结构的上部部分来穿透焊球的表面氧化物。