会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Cleaning system and cleaning method
    • 清洁系统和清洁方法
    • US09142424B2
    • 2015-09-22
    • US13575042
    • 2011-05-26
    • Minoru UchidaToru Otsu
    • Minoru UchidaToru Otsu
    • B08B3/00H01L21/311C25B1/28C25B9/08H01L21/67
    • H01L21/31133C25B1/285C25B9/08H01L21/67017
    • Provided are a system and method capable of providing a sulfuric acid solution containing peroxosulfuric acid for use in cleaning even in an installation-limited space such as a clean room while suppressing the fluid pressure in a heating part such as a rapid heating heater.The system comprises: an electrolytic part for electrolyzing a sulfuric acid solution to produce peroxosulfuric acid; a first reservoir for storing the sulfuric acid solution; a circulation line for circulating the sulfuric acid solution between the electrolytic part and the first reservoir; a cleaning apparatus for cleaning a cleaning object by use of the sulfuric acid solution containing peroxosulfuric acid; a supply line for sending the sulfuric acid solution electrolyzed in the electrolytic part to the cleaning apparatus; a heating part for heating the sulfuric acid solution to be used in the cleaning apparatus, the heating part being interposed in the supply line on the upstream side of the cleaning apparatus; and a second reservoir which is interposed in the supply line on the upstream side of the heating part. Since the second reservoir and the heating parts are positioned spatially above the level of the first reservoir, the electrolytic part and the circulation line, the device can be disposed with good space efficiency while preventing application of a high fluid pressure to the heating part or the like.
    • 提供一种能够提供含有过硫酸的硫酸溶液的系统和方法,即使在诸如清洁室的安装受限的空间中也可以用于清洁,同时抑制诸如快速加热器的加热部件中的流体压力。 该系统包括:用于电解硫酸溶液以产生过氧硫酸的电解部分; 用于存储硫酸溶液的第一储存器; 用于使硫酸溶液在电解部分和第一储存器之间循环的循环管线; 用于使用含有过硫酸的硫酸溶液清洗清洁物体的清洁装置; 用于将电解部分中电解的硫酸溶液送至清洗装置的供给管线; 用于加热清洗装置中使用的硫酸溶液的加热部分,加热部分插入清洁装置的上游侧的供给管线中; 以及第二储存器,其被插入在所述加热部的上游侧的供给管线中。 由于第二储存器和加热部件位于空间上位于第一储存器,电解部分和循环管线的高度之上,所以可以以良好的空间效率设置装置,同时防止对加热部件施加高流体压力或 喜欢。
    • 2. 发明申请
    • CLEANING SYSTEM AND CLEANING METHOD
    • 清洁系统和清洁方法
    • US20120291806A1
    • 2012-11-22
    • US13575042
    • 2011-05-26
    • Minoru UchidaToru Otsu
    • Minoru UchidaToru Otsu
    • B08B3/00B08B7/04
    • H01L21/31133C25B1/285C25B9/08H01L21/67017
    • Provided are a system and method capable of providing a sulfuric acid solution containing peroxosulfuric acid for use in cleaning even in an installation-limited space such as a clean room while suppressing the fluid pressure in a heating part such as a rapid heating heater.The system comprises: an electrolytic part for electrolyzing a sulfuric acid solution to produce peroxosulfuric acid; a first reservoir for storing the sulfuric acid solution; a circulation line for circulating the sulfuric acid solution between the electrolytic part and the first reservoir; a cleaning apparatus for cleaning a cleaning object by use of the sulfuric acid solution containing peroxosulfuric acid; a supply line for sending the sulfuric acid solution electrolyzed in the electrolytic part to the cleaning apparatus; a heating part for heating the sulfuric acid solution to be used in the cleaning apparatus, the heating part being interposed in the supply line on the upstream side of the cleaning apparatus; and a second reservoir which is interposed in the supply line on the upstream side of the heating part. Since the second reservoir and the heating parts are positioned spatially above the level of the first reservoir, the electrolytic part and the circulation line, the device can be disposed with good space efficiency while preventing application of a high fluid pressure to the heating part or the like.
    • 提供一种能够提供含有过硫酸的硫酸溶液的系统和方法,即使在诸如清洁室的安装受限的空间中也可以用于清洁,同时抑制诸如快速加热器的加热部件中的流体压力。 该系统包括:用于电解硫酸溶液以产生过氧硫酸的电解部分; 用于存储硫酸溶液的第一储存器; 用于使硫酸溶液在电解部分和第一储存器之间循环的循环管线; 用于使用含有过硫酸的硫酸溶液清洗清洁物体的清洁装置; 用于将电解部分中电解的硫酸溶液送至清洗装置的供给管线; 用于加热清洗装置中使用的硫酸溶液的加热部分,加热部分插入清洁装置的上游侧的供给管线中; 以及第二储存器,其被插入在所述加热部的上游侧的供给管线中。 由于第二储存器和加热部件位于空间上位于第一储存器,电解部分和循环管线的高度之上,所以可以以良好的空间效率设置装置,同时防止对加热部件施加高流体压力或 喜欢。
    • 3. 发明申请
    • SUPPLY SYSTEM AND SUPPLY METHOD FOR FUNCTIONAL SOLUTION
    • 供应系统和功能解决方案的供应方法
    • US20130092553A1
    • 2013-04-18
    • US13259848
    • 2010-03-16
    • Haruyoshi YamakawaMinoru UchidaToru Otsu
    • Haruyoshi YamakawaMinoru UchidaToru Otsu
    • H01L21/02C25B9/00C25B1/22
    • H01L21/02041C25B1/22C25B1/28C25B9/00H01L21/67017
    • Provided are an electrolyzing unit (electrolyzing device 1) that electrolyzes a sulfuric acid solution having a sulfuric acid concentration of 75 to 96% by weight to generate peroxosulfuric acid, a gas-liquid separation unit (gas-liquid separation tank 10) that subjects the sulfuric acid solution thus electrolyzed to gas-liquid separation, a circulation line 11 that causes a portion of the sulfuric acid solution subjected to gas-liquid separation in the gas-liquid separation unit to circulate between it and the electrolyzing unit, a supply line 20 that supplies a portion of the sulfuric acid solution subjected to gas-liquid separation in the gas-liquid separation unit to an application side (single-wafer cleaning device 100), and a heating unit 22 that is provided in the supply line 20 and heats the sulfuric acid solution to 120 to 190° C., in which a transit time after the sulfuric acid solution is introduced to an inlet of the heating unit until being used in the application side is set so as to be less than 1 minute.
    • 提供一种电解装置(电解装置1),其电解硫酸浓度为75〜96重量%的硫酸溶液以生成过氧硫酸,气液分离装置(气液分离罐10) 硫酸溶液进行气液分离,循环管线11使气液分离装置中气液分离的一部分硫酸溶液在其与电解装置之间循环,供给管线20 将在气液分离单元中进行气液分离的硫酸溶液的一部分供给到使用侧(单晶片清洗装置100),以及设置在供给管线20中的加热单元22 将硫酸溶液引入到加热单元的入口直到在使用一侧使用之后,将硫酸溶液加热至120〜190℃,其中将硫酸溶液的通过时间引入加热单元的入口 设置为不到1分钟。