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    • 1. 发明授权
    • Capacitive device
    • 电容器件
    • US06785117B2
    • 2004-08-31
    • US10386100
    • 2003-03-12
    • Minekazu SakaiToshiyuki TsuchiyaHirofumi FunabashiNorio FujitsukaYasuichi Mitsushima
    • Minekazu SakaiToshiyuki TsuchiyaHirofumi FunabashiNorio FujitsukaYasuichi Mitsushima
    • H01G700
    • G01P15/125G01P15/18G01P2015/0814G01P2015/082
    • A capacitive device includes a substrate, a movable electrode, and a fixed electrode. The movable electrode is located above a surface of the substrate and is movable with respect to the substrate along directions that are substantially orthogonal to the surface. The fixed electrode is stationary with respect to the substrate. When the movable electrode is displaced in a first direction that is substantially orthogonal to the surface, the total sum of area-distance quotients in the overlap between the electrodes remains substantially unchanged or decreases to provide a first reduction rate that is substantially zero or more. On the other hand, when the movable electrode is displaced in a second direction that is substantially opposite to the first direction, the total sum of area-distance quotients remains substantially unchanged or decreases to provide a second reduction rate that is substantially zero or more. The reduction rates are different from each other.
    • 电容器件包括衬底,可动电极和固定电极。 可移动电极位于基板的表面上方并且能够沿与基板正交的方向相对于基板移动。 固定电极相对于基板是静止的。 当可移动电极在基本上与表面正交的第一方向上位移时,电极之间的重叠中的面积 - 距离商的总和基本上保持不变或减小,以提供基本为零或更大的第一减小率。 另一方面,当可移动电极在与第一方向基本相反的第二方向上移位时,面积 - 距离商的总和基本上保持不变或减小,从而提供基本为零或更大的第二减小率。 缩减率彼此不同。
    • 4. 发明授权
    • Detector for detecting angular velocities about perpendicular axes
    • 用于检测关于垂直轴的角速度的检测器
    • US6158280A
    • 2000-12-12
    • US218151
    • 1998-12-22
    • Yutaka NonomuraMotohiro FujiyoshiYoshiteru OmuraNorio Fujitsuka
    • Yutaka NonomuraMotohiro FujiyoshiYoshiteru OmuraNorio Fujitsuka
    • G01C19/56G01P9/04
    • G01C19/5719
    • A detector has first and second excitation beams extending along X-axis and Y-axis directions. These beams are fixed to a substrate via an intersecting portion. Mass portions are disposed at free ends of the beams. Sensing electrodes are disposed at the central portions of the mass portions to face the mass portions. By electrostatic force generated between the excitation electrodes and the mass portions, two mass portions vibrate in the Y-axis direction, while the remaining two mass portions vibrate in the X-axis direction. When an angular velocity .OMEGA..sub.x acts about the X axis, Z-axis Coriolis forces F.sub.1a and F.sub.1b act on the mass portions that are vibrating in the Y-axis direction. When an angular velocity .OMEGA..sub.y acts about the Y axis, Z-axis Coriolis forces F.sub.2a and F.sub.2b act on the mass portions that are vibrating in the X-axis direction. These vibrations are detected by the sensing electrodes in order to detect the angular velocities .OMEGA..sub.x and .OMEGA..sub.y.
    • 检测器具有沿X轴和Y轴方向延伸的第一和第二激发光束。 这些光束经由交叉部分固定在基板上。 质量部分设置在梁的自由端。 传感电极设置在质量部分的中心部分以面对质量部分。 通过在激励电极和质量部分之间产生的静电力,两个质量部分在Y轴方向上振动,而剩余的两个质量部分在X轴方向上振动。 当角速度OMEGA x围绕X轴作用时,Z轴科里奥利力F1a和F1b作用在沿Y轴方向振动的质量部分上。 当角速度OMEGA y围绕Y轴作用时,Z轴科里奥利力F2a和F2b作用在沿X轴方向振动的质量部分上。 这些振动由感测电极检测,以便检测角速度OMEGA x和OMEGA y。
    • 7. 发明授权
    • Resonance type angular velocity sensor
    • 共振型角速度传感器
    • US5945599A
    • 1999-08-31
    • US989911
    • 1997-12-12
    • Motohiro FujiyoshiYoshiteru OmuraYutaka NonomuraNorio Fujitsuka
    • Motohiro FujiyoshiYoshiteru OmuraYutaka NonomuraNorio Fujitsuka
    • G01C19/5719G01P9/04
    • G01C19/5719
    • A resonance type angular velocity sensor is provided with a mass displacement supporting beam (20, 21, 22, 23) for supporting a vibration in a detecting direction due to a Coriolis force of a mass portion (1) and a mass excitation supporting beam for supporting a mass displacement supporting base portion (24, 25) in such a manner as to allow the mass portion (1) to vibrate away from the beam in an excitation direction. When the mass displacement supporting base portion (24) is excited in the excitation direction by an opposing comb exciting electrode (51), the mass portion (1) vibrates. A projecting electrode (31) is provided in a side surface of the Coriolis force detecting direction of the mass portion (1) and capacity detecting electrodes (30, 32) are disposed in such a manner as to oppose this. When the Coriolis force acts on the mass portion (1) vibrating in the excitation direction, the mass portion (1) vibrates also in the detecting direction so that the capacity change is detected by the capacity detecting electrodes (30, 32). In such a case, it is possible to provide a mechanism for applying a stress to the beam members (10, 11, 12, 13, 14, 15, 16, 17) so as to adjust the exciting frequency.
    • 共振型角速度传感器设有质量位移支撑梁(20,21,22,23),用于由于质量部分(1)的科里奥利力和用于支撑梁的质量激励支撑梁而支撑在检测方向上的振动 支撑质量位移支撑基部(24,25),以允许质量部分(1)在激励方向上离开光束振动。 当质量位移支撑基部(24)通过相对的梳齿形激励电极(51)在激励方向被激发时,质量部分(1)振动。 在质量部(1)的科里奥利力检测方向的侧面设置有突出电极(31),并且以相反的方式设置容量检测电极(30,32)。 当科里奥利力作用于在激励方向上振动的质量部分(1)时,质量部分(1)也沿检测方向振动,从而通过容量检测电极(30,32)检测容量变化。 在这种情况下,可以提供一种用于向梁构件(10,11,12,13,14,15,16,17)施加应力以调节激励频率的机构。