专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US10114212B2 Deflector 有权
公开(公告)号：US10114212B2
公开(公告)日：2018-10-30
申请号：US13899077
申请日：2013-05-21
申请人： Isao Aoyagi , Kanae Murata , Takashi Ozaki , Norio Fujitsuka , Yutaka Nonomura , Teruhisa Akashi
发明人： Isao Aoyagi , Kanae Murata , Takashi Ozaki , Norio Fujitsuka , Yutaka Nonomura , Teruhisa Akashi
IPC分类号： G02B26/08 , G02B26/10 , G02B26/12 , B81B5/00 , H04N1/113 , G02B7/182 , G02B6/35
摘要： The present application discloses a deflector including a substrate portion, a movable portion, a reflective portion, a support portion, and a moving mechanism. The movable portion is supported by a first end of the support portion. A second end of the support portion is supported by the substrate portion. An end of the movable portion is capable of coming into contact with the substrate portion. The reflective portion is formed on the movable portion. The moving mechanism is capable of driving the movable portion so as to bring the movable portion into at least any one of a first state, a second state, a third state, and a fourth state.

2. 发明授权

US08698315B2 Semiconductor device 有权
标题翻译：半导体器件
公开(公告)号：US08698315B2
公开(公告)日：2014-04-15
申请号：US13596859
申请日：2012-08-28
申请人： Yoshiyuki Hata , Yutaka Nonomura , Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yoshiteru Omura
发明人： Yoshiyuki Hata , Yutaka Nonomura , Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yoshiteru Omura
IPC分类号： H01L23/48 , H01L23/52 , H01L29/40
CPC分类号： B81C1/00825 , B81B2201/0235 , B81B2203/033 , B81B2203/0392 , G01C19/5762 , G01C19/5769 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/084
摘要： When forming a trench of a narrow width in a thick semiconductor layer, a trench can be formed without the occurrence of semiconductor residue. In this Specification, a semiconductor device in which a trench is formed in a semiconductor layer is disclosed. In the semiconductor layer of the semiconductor device, a compensation pattern which compensates for sudden changes in the width of the trench is formed at a place at which the width of the trench changes suddenly. In the semiconductor layer of the above-described semiconductor device, since a compensation pattern is formed at a place at which the trench width changes suddenly, in the case where forming the trench using a deep RIE method, the occurrence of steep inclined portions arising from semiconductor residue can be prevented. Consequently, when forming a trench of a narrow width in a thick semiconductor layer, the occurrence of semiconductor residue can be prevented.
摘要翻译：当在厚半导体层中形成窄宽度的沟槽时，可以形成沟槽而不会发生半导体残渣。在本说明书中，公开了在半导体层中形成沟槽的半导体器件。在半导体器件的半导体层中，在沟槽宽度急剧变化的地方形成补偿沟槽宽度突然变化的补偿图案。在上述半导体器件的半导体层中，由于在沟槽宽度突然变化的地方形成补偿图案，所以在使用深RIE法形成沟槽的情况下，由于可以防止半导体残渣。因此，当在厚半导体层中形成窄宽度的沟槽时，可以防止发生半导体残渣。

3. 发明授权

US08368196B2 Micro device having a movable structure 有权
标题翻译：具有可移动结构的微型装置
公开(公告)号：US08368196B2
公开(公告)日：2013-02-05
申请号：US12710571
申请日：2010-02-23
申请人： Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yutaka Nonomura
发明人： Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yutaka Nonomura
IPC分类号： H01L23/02
CPC分类号： B81B3/001 , B81B2201/025 , G01P15/125 , G01P15/18
摘要： The micro device includes a support substrate, and a movable structure configured to move with respect to the support substrate. At least one of the support substrate and the movable structure is provided with at least one protrusion protruding towards the other of the support substrate and the movable structure. Further, a base portion extending into the one of the support substrate and the movable structure is provided integrally with the at least one protrusion. With this configuration, the protrusion is securely held by the base portion, and the detachment of the protrusion can therefore be prevented even after repeated collisions between the support substrate and the movable structure via the protrusion.
摘要翻译：微型装置包括支撑基板和被配置为相对于支撑基板移动的可移动结构。支撑基板和可移动结构中的至少一个设置有至少一个朝着支撑基板和可移动结构中的另一个突出的突起。此外，延伸到支撑基板和可移动结构中的一个的基部与所述至少一个突起一体设置。通过这种构造，突起被基部牢固地保持，并且因此即使在支撑基板和可移动结构经由突起重复碰撞之后也能够防止突起的分离。

4. 发明授权

US08707784B2 Laminated structure provided with movable portion 有权
标题翻译：层压结构设有可动部分
公开(公告)号：US08707784B2
公开(公告)日：2014-04-29
申请号：US13047274
申请日：2011-03-14
申请人： Teruhisa Akashi , Yutaka Nonomura , Motohiro Fujiyoshi , Hirofumi Funabashi , Yoshiyuki Hata , Yoshiteru Omura
发明人： Teruhisa Akashi , Yutaka Nonomura , Motohiro Fujiyoshi , Hirofumi Funabashi , Yoshiyuki Hata , Yoshiteru Omura
IPC分类号： G01C19/56
CPC分类号： G01C19/574 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A structure having a first movable portion displaced perpendicular to a substrate surface and a second movable portion displaced parallel to the substrate surface is realized by a laminated structure employing a nested structure for the first portion and the second portion. The laminated structure is provided with inner and outer movable portions. A y spring is connected to the outer portion, and the outer portion is supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner portion, and the inner portion is supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer portion at a height apart from the outer movable portion.
摘要翻译：具有垂直于基板表面移动的第一可移动部分和平行于基板表面移动的第二可移动部分的结构通过采用用于第一部分和第二部分的嵌套结构的层压结构实现。层叠结构设置有内部和外部可移动部分。 y弹簧连接到外部，并且外部部分通过y弹簧以与外部基板隔开的高度在y轴方向上支撑。 z弹簧连接到内部，并且内部通过z弹簧以与外基板隔开的高度在z轴方向上支撑。外部部分和z弹簧与基板处于不同的高度，并且z弹簧在与外部可移动部分分开的高度处超过外部部分。

5. 发明授权

US08816451B2 MEMS structure and manufacturing method thereof 有权
标题翻译： MEMS结构及其制造方法
公开(公告)号：US08816451B2
公开(公告)日：2014-08-26
申请号：US13035186
申请日：2011-02-25
申请人： Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Motohiro Fujiyoshi , Teruhisa Akashi , Yoshiteru Omura
发明人： Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Motohiro Fujiyoshi , Teruhisa Akashi , Yoshiteru Omura
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： H01L21/02 , H01L29/84
摘要： In a MEMS structure, a first trench which penetrates the first layer, the second layer and the third layer is formed, and a second trench which penetrates the fifth layer, the forth layer and the third layer is formed. The first trench forms a first part of an outline of the movable portion in a view along the stacked direction. The second trench forms a second part of the outline of the movable portion in the view along the stacked direction. At least a part of the first trench overlaps with the first extending portion in the view along the stacked direction.
摘要翻译：在MEMS结构中，形成贯穿第一层，第二层和第三层的第一沟槽，形成贯穿第五层，第四层和第三层的第二沟槽。第一沟槽沿着堆叠的方向形成可动部分的轮廓的第一部分。第二沟槽沿着堆叠方向在视图中形成可动部分的轮廓的第二部分。第一沟槽的至少一部分沿着堆叠方向在视图中与第一延伸部分重叠。

6. 发明授权

US08365597B2 Apparatus having a movable body 有权
标题翻译：装置具有可动体
公开(公告)号：US08365597B2
公开(公告)日：2013-02-05
申请号：US12723971
申请日：2010-03-15
申请人： Teruhisa Akashi , Yutaka Nonomura , Motohiro Fujiyoshi , Hirofumi Funabashi
发明人： Teruhisa Akashi , Yutaka Nonomura , Motohiro Fujiyoshi , Hirofumi Funabashi
IPC分类号： G01P15/00
CPC分类号： G01C19/5719 , G01P2015/082
摘要： An apparatus with a second movable portion that moves along an x-axis direction and a z-axis direction and a first movable portion that only moves along the z-axis direction is disclosed. The apparatus is provided with a fixed portion fixed to a support portion, a plurality of first spring portions connected to the fixed portion, a first movable portion connected to the plurality of first spring portions, a second spring portion connected to the first movable portion, and a second movable portion connected to the second spring portion. A spring constant of each of the plurality of first spring portions in the z-axis direction is lower than spring constants of each of the plurality of first spring portions in the x-axis and a y-axis directions respectively, and a spring constant of the second spring portion in the x-axis direction is lower than spring constants of the second spring portion in the y-axis and the z-axis directions respectively. The first movable portion is configured to move along the z-axis but not to move along the x-axis and the y-axis nor to rotate around the z-axis, and the second movable portion is configured to move along the x-axis and the z-axis with respect to the support portion.
摘要翻译：公开了一种具有沿x轴方向和z轴方向移动的第二可移动部分和仅沿着z轴方向移动的第一可动部分的装置。该装置设置有固定到支撑部分的固定部分，连接到固定部分的多个第一弹簧部分，连接到多个第一弹簧部分的第一可动部分，连接到第一可动部分的第二弹簧部分，以及与第二弹簧部连接的第二可动部。多个第一弹簧部分中的每一个在z轴方向上的弹簧常数分别低于多个第一弹簧部分在x轴和y轴方向上的弹簧常数，弹簧常数 x轴方向上的第二弹簧部分分别低于第二弹簧部分在y轴和z轴方向上的弹簧常数。第一可移动部分被配置为沿着z轴移动但不沿着x轴和y轴移动，也不围绕z轴旋转，并且第二可移动部分构造成沿x轴移动和z轴相对于支撑部分。

7. 发明授权

US6158280A Detector for detecting angular velocities about perpendicular axes 有权
标题翻译：用于检测关于垂直轴的角速度的检测器
公开(公告)号：US6158280A
公开(公告)日：2000-12-12
申请号：US218151
申请日：1998-12-22
申请人： Yutaka Nonomura , Motohiro Fujiyoshi , Yoshiteru Omura , Norio Fujitsuka
发明人： Yutaka Nonomura , Motohiro Fujiyoshi , Yoshiteru Omura , Norio Fujitsuka
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5719
摘要： A detector has first and second excitation beams extending along X-axis and Y-axis directions. These beams are fixed to a substrate via an intersecting portion. Mass portions are disposed at free ends of the beams. Sensing electrodes are disposed at the central portions of the mass portions to face the mass portions. By electrostatic force generated between the excitation electrodes and the mass portions, two mass portions vibrate in the Y-axis direction, while the remaining two mass portions vibrate in the X-axis direction. When an angular velocity .OMEGA..sub.x acts about the X axis, Z-axis Coriolis forces F.sub.1a and F.sub.1b act on the mass portions that are vibrating in the Y-axis direction. When an angular velocity .OMEGA..sub.y acts about the Y axis, Z-axis Coriolis forces F.sub.2a and F.sub.2b act on the mass portions that are vibrating in the X-axis direction. These vibrations are detected by the sensing electrodes in order to detect the angular velocities .OMEGA..sub.x and .OMEGA..sub.y.
摘要翻译：检测器具有沿X轴和Y轴方向延伸的第一和第二激发光束。这些光束经由交叉部分固定在基板上。质量部分设置在梁的自由端。传感电极设置在质量部分的中心部分以面对质量部分。通过在激励电极和质量部分之间产生的静电力，两个质量部分在Y轴方向上振动，而剩余的两个质量部分在X轴方向上振动。当角速度OMEGA x围绕X轴作用时，Z轴科里奥利力F1a和F1b作用在沿Y轴方向振动的质量部分上。当角速度OMEGA y围绕Y轴作用时，Z轴科里奥利力F2a和F2b作用在沿X轴方向振动的质量部分上。这些振动由感测电极检测，以便检测角速度OMEGA x和OMEGA y。

8. 发明授权

US5945599A Resonance type angular velocity sensor 失效
标题翻译：共振型角速度传感器
公开(公告)号：US5945599A
公开(公告)日：1999-08-31
申请号：US989911
申请日：1997-12-12
申请人： Motohiro Fujiyoshi , Yoshiteru Omura , Yutaka Nonomura , Norio Fujitsuka
发明人： Motohiro Fujiyoshi , Yoshiteru Omura , Yutaka Nonomura , Norio Fujitsuka
IPC分类号： G01C19/5719 , G01P9/04
CPC分类号： G01C19/5719
摘要： A resonance type angular velocity sensor is provided with a mass displacement supporting beam (20, 21, 22, 23) for supporting a vibration in a detecting direction due to a Coriolis force of a mass portion (1) and a mass excitation supporting beam for supporting a mass displacement supporting base portion (24, 25) in such a manner as to allow the mass portion (1) to vibrate away from the beam in an excitation direction. When the mass displacement supporting base portion (24) is excited in the excitation direction by an opposing comb exciting electrode (51), the mass portion (1) vibrates. A projecting electrode (31) is provided in a side surface of the Coriolis force detecting direction of the mass portion (1) and capacity detecting electrodes (30, 32) are disposed in such a manner as to oppose this. When the Coriolis force acts on the mass portion (1) vibrating in the excitation direction, the mass portion (1) vibrates also in the detecting direction so that the capacity change is detected by the capacity detecting electrodes (30, 32). In such a case, it is possible to provide a mechanism for applying a stress to the beam members (10, 11, 12, 13, 14, 15, 16, 17) so as to adjust the exciting frequency.
摘要翻译：共振型角速度传感器设有质量位移支撑梁（20,21,22,23），用于由于质量部分（1）的科里奥利力和用于支撑梁的质量激励支撑梁而支撑在检测方向上的振动支撑质量位移支撑基部（24,25），以允许质量部分（1）在激励方向上离开光束振动。当质量位移支撑基部（24）通过相对的梳齿形激励电极（51）在激励方向被激发时，质量部分（1）振动。在质量部（1）的科里奥利力检测方向的侧面设置有突出电极（31），并且以相反的方式设置容量检测电极（30,32）。当科里奥利力作用于在激励方向上振动的质量部分（1）时，质量部分（1）也沿检测方向振动，从而通过容量检测电极（30,32）检测容量变化。在这种情况下，可以提供一种用于向梁构件（10,11,12,13,14,15,16,17）施加应力以调节激励频率的机构。

9. 发明授权

US5585562A Vibration-sensing gyro 无效
标题翻译：振动陀螺仪
公开(公告)号：US5585562A
公开(公告)日：1996-12-17
申请号：US640399
申请日：1996-04-30
申请人： Nobuo Kurata , Nobuyoshi Sugitani , Takashi Ozaki , Kenji Harada , Kimitoshi Tsuji , Yutaka Nonomura , Takeshi Morikawa , Masayuki Okuwa , Kouji Tsukada
发明人： Nobuo Kurata , Nobuyoshi Sugitani , Takashi Ozaki , Kenji Harada , Kimitoshi Tsuji , Yutaka Nonomura , Takeshi Morikawa , Masayuki Okuwa , Kouji Tsukada
IPC分类号： G01C19/5607 , G01P9/04
CPC分类号： G01C19/5607
摘要： A vibration-sensing gyro composed of a light alloy such as duralumin includes a base and a first pair of tines projecting parallel to each other from the base. Piezoelectric elements are mounted on the root of the side faces of the first pair of tines to excite the first pair of tines along an X axis. The vibrations of the first pair of tines along the X axis are then propagated to a second pair of tines to vibrate the second pair of tines along the X axis. Piezoelectric elements are mounted on the root of the upper and the lower faces of the second pair of tines to detect vibrations of the second pair of tines along an Y axis. When the second pair of tines receives the Coriolis force based on an angular velocity .omega. around a Z axis and vibrates along the Y axis, the vibrations along the Y axis are detected as electric signals (alternating current voltages) by piezoelectric effects of the piezoelectric elements.
摘要翻译：由诸如硬铝的轻合金构成的振动感测陀螺包括基部和从底部彼此平行地突出的第一对尖齿。压电元件安装在第一对尖齿的侧面的根部上，以沿X轴激发第一对尖齿。沿着X轴的第一对尖齿的振动然后传播到第二对尖齿，以使第二对尖齿沿X轴振动。压电元件安装在第二对尖齿的上表面和下表面的根部上，以检测第二对尖齿沿着Y轴的振动。当第二对尖齿接收基于围绕Z轴的角速度ω的科里奥利力并且沿着Y轴振动时，通过压电元件的压电效应将沿着Y轴的振动检测为电信号（交流电压）。

10. 发明申请

US20100290056A1 Abnormality detection appraratus of optical fiber gyro 审中-公开
标题翻译：光纤陀螺异常检测仪器
公开(公告)号：US20100290056A1
公开(公告)日：2010-11-18
申请号：US11989866
申请日：2006-08-01
申请人： Hisayoshi Sugihara , Yutaka Nonomura , Motohiro Fujiyoshi
发明人： Hisayoshi Sugihara , Yutaka Nonomura , Motohiro Fujiyoshi
IPC分类号： G01C19/72
CPC分类号： G01C19/721
摘要： The numbers of pulses of the CW signal and the CCW signal of the optical fiber gyro during a predetermined sampling duration are detected by samplers. An abnormality determiner determines that the optical fiber gyro is normal if at least one of the pulse numbers is greater than or equal to a threshold value. If both pulse numbers are smaller than the threshold value, the abnormality determiner determines that an abnormality, such as a circuit break, a bad connection, etc., has occurred, and outputs the result of determination to an output unit. The abnormality determiner may determine an abnormality on the basis of the presence/absence of quantization noise.
摘要翻译：采样器检测预定采样持续时间内的CW信号的脉冲数和光纤陀螺的CCW信号。如果脉冲数中的至少一个大于或等于阈值，则异常确定器确定光纤陀螺仪是正常的。如果两个脉冲数都小于阈值，则异常判定部判定为发生电路断线，连接不良等异常，并将判断结果输出到输出部。异常判定器可以基于量化噪声的存在/不存在来确定异常。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式