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    • 2. 发明授权
    • High voltage lateral DMOS transistor having low on-resistance and high breakdown voltage
    • 具有低导通电阻和高击穿电压的高电压横向DMOS晶体管
    • US06833585B2
    • 2004-12-21
    • US10120207
    • 2002-04-10
    • Min-hwan KimChang-ki JeonYoung-suk Choi
    • Min-hwan KimChang-ki JeonYoung-suk Choi
    • H01L2976
    • H01L29/7816H01L29/0634H01L29/7835
    • A high voltage lateral Double diffused Metal Oxide Semiconductor (DMOS) transistor includes a plurality of well regions of a first conductivity type formed to be spaced out within a well region of a second conductivity type between a channel region of the first conductivity type and a drain region of the second conductivity type. Most current is carried through some portions of the well region of the second conductivity type in which the well regions of the first conductivity do not appear so that the current carrying performance of the device is improved. When a bias voltage is applied to the drain region, the well region of the second conductivity type is completely depleted at other portions where the well region of the second conductivity type and the well regions of the first conductivity type alternately appear so that the breakdown voltage of the device can be increased. In addition, since the well region of the second conductivity type can be easily depleted, not only the breakdown voltage can be increased, but also the impurity concentration of the well region of the second conductivity type can be increased. Accordingly, the on-resistance of the device can be decreased.
    • 高压横向双扩散金属氧化物半导体(DMOS)晶体管包括多个第一导电类型的阱区,其形成为在第一导电类型的沟道区域和漏极之间的第二导电类型的阱区域内间隔开 第二导电类型的区域。 大多数电流通过第二导电类型的阱区的一些部分被携带,其中第一导电性的阱区不出现,从而提高了器件的载流性能。 当偏置电压施加到漏极区域时,第二导电类型的阱区域在第二导电类型的阱区域和第一导电类型的阱区域交替出现的其它部分完全耗尽,使得击穿电压 的设备可以增加。 此外,由于第二导电类型的阱区域容易耗尽,不仅可以提高击穿电压,而且能够提高第二导电型阱区的杂质浓度。 因此,可以降低器件的导通电阻。
    • 3. 发明授权
    • Power semiconductor device having high breakdown voltage and method for fabricating the same
    • 具有高击穿电压的功率半导体器件及其制造方法
    • US06486512B2
    • 2002-11-26
    • US09790815
    • 2001-02-23
    • Chang-ki JeonJong-jib KimYoung-suk ChoiChang-seong ChoiMin-whan Kim
    • Chang-ki JeonJong-jib KimYoung-suk ChoiChang-seong ChoiMin-whan Kim
    • H01L2976
    • H01L29/0692H01L29/0696H01L29/7835
    • A power semiconductor device and a method for fabricating the same are provided. The power semiconductor device includes a source structure having a projected portion with a tip-shaped end portion on its center and formed so as to surround a predetermined region of right and left and upper portions of the projected portion. Two drain structures are formed in a predetermined region surrounded by the source structure. Extended drain structures are formed around the drain structures and the extended drain structures function as a channel with a field effect channel between sides of the projected portion of the source structure. Accordingly, since there are no drain structures on the tip of the projected portion of the source structure, although a radius of curvature of the tip of the projected portion is small, a decrease in a breakdown voltage of a device due to the small radius of curvature of the tip of the projected portion can be suppressed. As a result, a power semiconductor device having a small radius of curvature of the source structure and a high breakdown voltage can be provided.
    • 提供了功率半导体器件及其制造方法。 功率半导体器件包括源结构,其具有在其中心具有尖端形状的端部的突出部分并且形成为围绕突出部分的左右上部的预定区域。 在由源结构包围的预定区域中形成两个漏极结构。 在漏极结构周围形成扩展的漏极结构,并且延伸的漏极结构用作具有源结构的突出部分的侧面之间的场效应沟道的沟道。 因此,由于在源极结构的突出部分的尖端上没有漏极结构,尽管突出部分的尖端的曲率半径小,但是由于半径小的部件,器件的击穿电压降低 可以抑制突出部分的尖端的弯曲。 结果,可以提供具有较小的源结构曲率半径和高击穿电压的功率半导体器件。
    • 7. 发明申请
    • HIGH VOLTAGE SEMICONDUCTOR DEVICE HAVING SHIFTERS AND METHOD OF FABRICATING THE SAME
    • 具有变形器的高电压半导体器件及其制造方法
    • US20090243696A1
    • 2009-10-01
    • US12402528
    • 2009-03-12
    • Chang-ki JeonMin-suk KimYong-cheol Choi
    • Chang-ki JeonMin-suk KimYong-cheol Choi
    • H03L5/00H01L21/76
    • H01L27/088H01L21/823481
    • Provided are a high-voltage semiconductor device including a junction termination which electrically isolates a low voltage unit from a high voltage unit, and a method of fabricating the same. The high voltage semiconductor device includes a high voltage unit, a low voltage unit surrounding the high voltage unit, and a junction termination formed between the high voltage unit and the low voltage unit and surrounding the high voltage unit to electrically isolate the high voltage unit from the low voltage unit. The junction termination includes at least one level shifter which level shifts signals from the low voltage unit and supplies the same to the high voltage unit, a first device isolation region surrounding the high voltage unit to electrically isolate the high voltage unit from the level shifter, and a resistor layer electrically connecting neighboring level shifters.
    • 提供一种包括将低电压单元与高电压单元电隔离的接合端子的高压半导体器件及其制造方法。 高电压半导体器件包括高电压单元,围绕高电压单元的低电压单元,以及形成在高电压单元和低电压单元之间并且围绕高电压单元的连接端子,以将高压单元与 低压单位。 所述连接终端包括至少一个电平移位器,其将来自所述低电压单元的信号电平移位并将其提供给所述高压单元;围绕所述高压单元的第一器件隔离区,以将所述高压单元与所述电平移位器电隔离; 以及电连接相邻电平移位器的电阻层。
    • 10. 发明申请
    • Method of Forming Lateral Trench Gate FET with Direct Source-Drain Current Path
    • 形成具有直接源极漏极电流路径的侧沟栅极FET的方法
    • US20110014760A1
    • 2011-01-20
    • US12890947
    • 2010-09-27
    • Chang-ki JeonGary Dolny
    • Chang-ki JeonGary Dolny
    • H01L21/336
    • H01L29/7825H01L29/0634H01L29/0696
    • A method of forming a field effect transistor (FET) includes: forming a drift region comprising a stack of alternating conductivity type silicon layers; forming a drain region of a first conductivity type extending into the stack of alternating conductivity type silicon layers; forming a trench gate extending into the stack of alternating conductivity type silicon layers, the trench gate having a non-active sidewall and an active sidewall being perpendicular to one another; and forming a body region of a second conductivity type adjacent to the active sidewall of the trench gate, wherein the trench gate and the drain region are formed such that the non-active sidewall of the trench gate faces the drain region.
    • 形成场效应晶体管(FET)的方法包括:形成包括交替导电型硅层叠层的漂移区; 形成延伸到交替导电型硅层堆叠中的第一导电类型的漏区; 形成延伸到交替导电型硅层的堆叠中的沟槽栅极,所述沟槽栅极具有非活性侧壁和主动侧壁彼此垂直; 以及形成与所述沟槽栅极的有源侧壁相邻的第二导电类型的主体区域,其中所述沟槽栅极和漏极区域形成为使得所述沟槽栅极的非有源侧壁面向所述漏极区域。