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    • 1. 发明授权
    • Method of forming lateral trench gate FET with direct source-drain current path
    • 形成具有直接源极 - 漏极电流路径的横向沟槽栅极FET的方法
    • US08097510B2
    • 2012-01-17
    • US12890947
    • 2010-09-27
    • Chang-ki JeonGary Dolny
    • Chang-ki JeonGary Dolny
    • H01L21/336
    • H01L29/7825H01L29/0634H01L29/0696
    • A method of forming a field effect transistor (FET) includes: forming a drift region comprising a stack of alternating conductivity type silicon layers; forming a drain region of a first conductivity type extending into the stack of alternating conductivity type silicon layers; forming a trench gate extending into the stack of alternating conductivity type silicon layers, the trench gate having a non-active sidewall and an active sidewall being perpendicular to one another; and forming a body region of a second conductivity type adjacent to the active sidewall of the trench gate, wherein the trench gate and the drain region are formed such that the non-active sidewall of the trench gate faces the drain region.
    • 形成场效应晶体管(FET)的方法包括:形成包括交替导电型硅层叠层的漂移区; 形成延伸到交替导电型硅层堆叠中的第一导电类型的漏区; 形成延伸到交替导电型硅层的堆叠中的沟槽栅极,所述沟槽栅极具有非活性侧壁和主动侧壁彼此垂直; 以及形成与所述沟槽栅极的有源侧壁相邻的第二导电类型的主体区域,其中所述沟槽栅极和漏极区域形成为使得所述沟槽栅极的非有源侧壁面向所述漏极区域。
    • 2. 发明申请
    • Method of Forming Lateral Trench Gate FET with Direct Source-Drain Current Path
    • 形成具有直接源极漏极电流路径的侧沟栅极FET的方法
    • US20110014760A1
    • 2011-01-20
    • US12890947
    • 2010-09-27
    • Chang-ki JeonGary Dolny
    • Chang-ki JeonGary Dolny
    • H01L21/336
    • H01L29/7825H01L29/0634H01L29/0696
    • A method of forming a field effect transistor (FET) includes: forming a drift region comprising a stack of alternating conductivity type silicon layers; forming a drain region of a first conductivity type extending into the stack of alternating conductivity type silicon layers; forming a trench gate extending into the stack of alternating conductivity type silicon layers, the trench gate having a non-active sidewall and an active sidewall being perpendicular to one another; and forming a body region of a second conductivity type adjacent to the active sidewall of the trench gate, wherein the trench gate and the drain region are formed such that the non-active sidewall of the trench gate faces the drain region.
    • 形成场效应晶体管(FET)的方法包括:形成包括交替导电型硅层叠层的漂移区; 形成延伸到交替导电型硅层堆叠中的第一导电类型的漏区; 形成延伸到交替导电型硅层的堆叠中的沟槽栅极,所述沟槽栅极具有非活性侧壁和主动侧壁彼此垂直; 以及形成与所述沟槽栅极的有源侧壁相邻的第二导电类型的主体区域,其中所述沟槽栅极和漏极区域形成为使得所述沟槽栅极的非有源侧壁面向所述漏极区域。
    • 7. 发明申请
    • HIGH VOLTAGE SEMICONDUCTOR DEVICE HAVING SHIFTERS AND METHOD OF FABRICATING THE SAME
    • 具有变形器的高电压半导体器件及其制造方法
    • US20090243696A1
    • 2009-10-01
    • US12402528
    • 2009-03-12
    • Chang-ki JeonMin-suk KimYong-cheol Choi
    • Chang-ki JeonMin-suk KimYong-cheol Choi
    • H03L5/00H01L21/76
    • H01L27/088H01L21/823481
    • Provided are a high-voltage semiconductor device including a junction termination which electrically isolates a low voltage unit from a high voltage unit, and a method of fabricating the same. The high voltage semiconductor device includes a high voltage unit, a low voltage unit surrounding the high voltage unit, and a junction termination formed between the high voltage unit and the low voltage unit and surrounding the high voltage unit to electrically isolate the high voltage unit from the low voltage unit. The junction termination includes at least one level shifter which level shifts signals from the low voltage unit and supplies the same to the high voltage unit, a first device isolation region surrounding the high voltage unit to electrically isolate the high voltage unit from the level shifter, and a resistor layer electrically connecting neighboring level shifters.
    • 提供一种包括将低电压单元与高电压单元电隔离的接合端子的高压半导体器件及其制造方法。 高电压半导体器件包括高电压单元,围绕高电压单元的低电压单元,以及形成在高电压单元和低电压单元之间并且围绕高电压单元的连接端子,以将高压单元与 低压单位。 所述连接终端包括至少一个电平移位器,其将来自所述低电压单元的信号电平移位并将其提供给所述高压单元;围绕所述高压单元的第一器件隔离区,以将所述高压单元与所述电平移位器电隔离; 以及电连接相邻电平移位器的电阻层。