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    • 3. 发明授权
    • Semiconductor chip, chip stack package and manufacturing method
    • 半导体芯片,芯片堆栈封装及制造方法
    • US07208343B2
    • 2007-04-24
    • US11017805
    • 2004-12-22
    • Young Hee SongSa Yoon KangMin Young Son
    • Young Hee SongSa Yoon KangMin Young Son
    • H01L21/00
    • H01L25/0657H01L24/24H01L24/82H01L2224/24145H01L2224/48091H01L2225/0651H01L2225/06551H01L2225/06589H01L2924/01078H01L2924/01079H01L2924/15311H01L2924/30107H01L2924/00014
    • A semiconductor chip with conductive wiring that is routed to the edge of the substrate from the chip's backside. A plurality of such semiconductor chips are stacked and electrically connected using a wiring element that is a circuit board or conductive adhesive strips. The wiring element connects the conductive wiring of each semiconductor chip along the sides of the chips to the package substrate. A method of manufacturing the semiconductor chip includes batch manufacturing a plurality of die on a wafer with an active surface on which a plurality bonding pads are formed, and a backside which is the rear side of the active surface; forming a circuit groove on the backside; applying conductive wiring on the circuit groove using a conductive material; and separating the wafer into a plurality of semiconductor chips. A method of manufacturing the chip stack package with a plurality of such semiconductor chips having bump pads and connection pads routed to the side surface of the semiconductor chip includes stacking and bonding the bonding pad of the upper semiconductor chip on the bump pad of a lower semiconductor chip; electrically connecting the bonding pad of the lowest semiconductor chip to the substrate by bump bonding electrically connecting the wiring element to the connection pad of the semiconductor chip and the substrate; and connecting an external connection to the substrate.
    • 具有导电布线的半导体芯片,其从芯片的背面引导到衬底的边缘。 多个这样的半导体芯片被堆叠并使用作为电路板或导电粘合带的布线元件电连接。 布线元件将每个半导体芯片的导体布线沿着芯片的侧面连接到封装基板。 制造半导体芯片的方法包括在其上形成有多个焊盘的有源表面的晶片上分批制造多个管芯,以及作为有源表面的后侧的背面; 在背面形成电路槽; 使用导电材料在电路槽上施加导电布线; 并将晶片分离成多个半导体芯片。 制造具有多个这样的具有凸块焊盘的半导体芯片的芯片堆叠封装的方法和布置到半导体芯片的侧表面的连接焊盘包括将上部半导体芯片的焊盘堆叠并粘合到下半导体的凸块焊盘上 芯片; 通过将布线元件电连接到半导体芯片和衬底的连接焊盘的凸起接合将最低半导体芯片的焊盘电连接到衬底; 并将外部连接连接到基板。