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    • 1. 发明授权
    • Die bonding apparatus
    • 焊接装置
    • US4768702A
    • 1988-09-06
    • US42705
    • 1987-04-27
    • Michio TakahashiShinichi AraiTooru MitaTatsuhiro Suzuki
    • Michio TakahashiShinichi AraiTooru MitaTatsuhiro Suzuki
    • H01L21/52B23Q1/36B23Q1/50H01L21/00B23K20/02
    • H01L21/67138B23Q1/36B23Q1/50H01L24/81H01L2224/16225H01L2924/10253
    • As a die bonding apparatus for establishing electrical connection between electrodes on one side of a semiconductor chip and associated electrodes on a package comprises a pair of pinching and pressing mechanisms having a pair of pinching and pressing surfaces adapted to be moved closer relative to each other and so as to pinch and press semiconductor chip and package and at least one remote center mechanism provided in at least one of the pair of pinching and pressing mechanisms, in such a manner that a remote center thereof is positioned in the pinching and pressing surface of above-mentioned one pinching and pressing mechanism, for adjusting orientations of the pair of pinching and pressing surfaces to make the orientations thereof correspond to those of both surfaces of the semiconductor chip and the package at the time of the pressing and pinching operation all of the electrodes on one side of the semiconductor chip are thereby uniformly pressed against the corresponding electrodes on the package without any laterally shifting movement thereof even if the chip is inclined relative to the package because the sizes of bumps of the electrodes on the chip are not constant.
    • 作为用于在半导体芯片的一侧上的电极和封装上的相关电极之间建立电连接的芯片焊接装置,包括一对夹紧和压制机构,其具有适于彼此相对移动的一对夹紧和按压表面, 以便夹紧并按压半导体芯片和封装以及至少一个远程中心机构,其设置在所述一对夹紧和挤压机构中的至少一个中,使得其远程中心位于上述的夹紧和按压表面中 所述一个夹紧和挤压机构用于调节所述一对夹紧和挤压表面的取向,使得其取向对应于在挤压和捏合操作时半导体芯片和封装的两个表面的取向全部电极 因此半导体芯片的一侧由此被均匀地压在相应的电极上 即使芯片相对于封装是倾斜的,因为芯片上的电极的凸块的尺寸不恒定,因此其没有任何横向移位的移动。