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1. 发明授权

US07828504B2 Combination load lock for handling workpieces 有权
标题翻译：用于处理工件的组合装载锁
公开(公告)号：US07828504B2
公开(公告)日：2010-11-09
申请号：US11432923
申请日：2006-05-12
申请人： Michel Pharand , Klaus Becker , Klaus Petry , Marvin R. LaFontaine , Michael R. Mitrano
发明人： Michel Pharand , Klaus Becker , Klaus Petry , Marvin R. LaFontaine , Michael R. Mitrano
IPC分类号： H01L21/677
CPC分类号： H01L21/67201 , H01L21/67265 , H01L21/67294 , H01L21/67748
摘要： A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for supporting a workpiece is disposed within an interior portion of the chamber, wherein a translation apparatus is operably coupled thereto. The translation apparatus is operable to rotate and/or translate the workpiece on the support member about and/or along a first axis, wherein a detection apparatus associated with the chamber is operable to detect one or more characteristics of the workpiece during the rotation and/or translation thereof. The workpiece may be further rotated in a predetermined manner based on the one or more detected characteristics. A recess is further defined in the interior portion of the chamber, wherein the translation apparatus is operable to translate the workpiece into and out of the recess to reduce particulate contamination thereon.
摘要翻译：提供一种组合式加载锁定装置，其中腔室与两个或更多个相应体积选择性流体连通的两个或更多个阀联接。用于支撑工件的支撑构件设置在腔室的内部部分内，其中平移装置可操作地联接到其上。翻译装置可操作以沿着第一轴线旋转和/或平移在支撑构件上的工件，其中与腔室相关联的检测装置可操作以在旋转期间检测工件的一个或多个特性，和/ 或其翻译。可以基于一个或多个检测到的特性以预定方式进一步旋转工件。在腔室的内部部分中进一步限定凹部，其中平移装置可操作以将工件平移到凹槽中并减少其中的颗粒污染物。

2. 发明申请

US20070264105A1 Combination load lock for handling workpieces 有权
标题翻译：用于处理工件的组合装载锁
公开(公告)号：US20070264105A1
公开(公告)日：2007-11-15
申请号：US11432923
申请日：2006-05-12
申请人： Michel Pharand , Klaus Becker , Klaus Petry , Marvin LaFontaine , Michael Mitrano
发明人： Michel Pharand , Klaus Becker , Klaus Petry , Marvin LaFontaine , Michael Mitrano
IPC分类号： H01L21/677
CPC分类号： H01L21/67201 , H01L21/67265 , H01L21/67294 , H01L21/67748
摘要： A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for supporting a workpiece is disposed within an interior portion of the chamber, wherein a translation apparatus is operably coupled thereto. The translation apparatus is operable to rotate and/or translate the workpiece on the support member about and/or along a first axis, wherein a detection apparatus associated with the chamber is operable to detect one or more characteristics of the workpiece during the rotation and/or translation thereof. The workpiece may be further rotated in a predetermined manner based on the one or more detected characteristics. A recess is further defined in the interior portion of the chamber, wherein the translation apparatus is operable to translate the workpiece into and out of the recess to reduce particulate contamination thereon.
摘要翻译：提供一种组合式加载锁定装置，其中腔室与两个或更多个相应体积选择性流体连通的两个或更多个阀联接。用于支撑工件的支撑构件设置在腔室的内部部分内，其中平移装置可操作地联接到其上。翻译装置可操作以沿着第一轴线旋转和/或平移在支撑构件上的工件，其中与腔室相关联的检测装置可操作以在旋转期间检测工件的一个或多个特性，和/ 或其翻译。可以基于一个或多个检测到的特性以预定方式进一步旋转工件。在腔室的内部部分中进一步限定凹部，其中平移装置可操作以将工件平移到凹槽中并减少其中的颗粒污染物。

3. 发明授权

US06727509B2 Wafer pedestal tilt mechanism 失效
标题翻译：晶圆台座倾斜机构
公开(公告)号：US06727509B2
公开(公告)日：2004-04-27
申请号：US10023516
申请日：2001-12-17
申请人： Michel Pharand , Allan D. Weed
发明人： Michel Pharand , Allan D. Weed
IPC分类号： A61N500
CPC分类号： H01L21/68764 , G21K5/08 , H01J37/20 , H01J37/3171 , H01J2237/31701
摘要： The invention provides a wafer pad assembly and actuation system for use in an ion implanter, preferably a batch-type ion implanter. The wafer pad assembly includes a rotatable wafer support pad having an upper surface for mounting the wafer, and a lower surface rotationally mounted to a housing of the wafer pad assembly. The lower surface of the wafer support pad further comprises a flange connected to a rotatable shaft. The shaft is connected to an actuator for selectively indexing the shaft so that the wafer support pad is rotationally indexed about its geometric center. The lower surface of the wafer support pad is also connected to a frame having an outer curved surface rotatably mounted within a mating bearing surface of a housing. The curved frame is connected to a plurality of linkages for moving the wafer support pad within the curved frame so that the wafer is pivotable or tiltable about its geometric center.
摘要翻译：本发明提供了一种用于离子注入机，优选分批式离子注入机的晶圆垫组件和致动系统。晶片垫组件包括可旋转晶片支撑垫，其具有用于安装晶片的上表面，以及可旋转地安装到晶片垫组件的壳体的下表面。晶片支撑垫的下表面还包括连接到可旋转轴的凸缘。轴连接到致动器以选择性地分度轴，使得晶片支撑垫围绕其几何中心旋转地分度。晶片支撑垫的下表面还连接到具有可旋转地安装在壳体的配合支承表面内的外曲面的框架。弯曲框架连接到多个联动装置，用于在晶片框架内移动晶片支撑垫，使得晶片围绕其几何中心可枢转或可倾斜。

4. 发明授权

US09625368B2 Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure 有权
公开(公告)号：US09625368B2
公开(公告)日：2017-04-18
申请号：US13281393
申请日：2011-10-25
申请人： Eric Peter Goodwin , David Michael Williamson , Daniel Gene Smith , Michel Pharand , Alexander Cooper , Alec Robertson , Brian L. Stamper
发明人： Eric Peter Goodwin , David Michael Williamson , Daniel Gene Smith , Michel Pharand , Alexander Cooper , Alec Robertson , Brian L. Stamper
IPC分类号： G01C3/08 , G01N21/01 , G01B11/02 , G01S7/481 , G01N21/17
CPC分类号： G01N21/01 , G01B11/026 , G01N2021/1793 , G01S7/4814 , G01S7/4817 , G01S7/4818
摘要： An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

5. 发明授权

US08376130B2 Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport 有权
标题翻译：直接驱动模块式皮带输送机，墨盒和快速连接断开恒速驱动轴，用于高速FOUP运输
公开(公告)号：US08376130B2
公开(公告)日：2013-02-19
申请号：US12420529
申请日：2009-04-08
申请人： Roumen Deyanov , Michel Pharand , Michael Krolak , Theodore W. Rogers
发明人： Roumen Deyanov , Michel Pharand , Michael Krolak , Theodore W. Rogers
IPC分类号： B65G15/60
CPC分类号： B65G21/06 , B65G15/105 , B65G2201/0297 , B65G2207/30
摘要： A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.
摘要翻译：输送机系统包括限定输送机的一部分的料筒。在一个实施例中，盒包括多个轮，其被设计为传送器部分的单元，并且筒的轮被设计成保持带。在一个可选实施例中，输送机部分包括用于检测容器（例如，FOUP）的存在的集成传感器，并且每个输送机部分可以实施便于高速FOUP运输的精密金属板轨道。在一个实施例中，每个输送段具有两个侧面。每一侧都有一个带有一个皮带的墨盒。在特定实施例中，传送部分的一侧包括驱动传送器的驱动马达。

6. 发明申请

US20120267219A9 DIRECT DRIVE MODULAR BELT CONVEYOR, CARTRIDGE, AND QUICK CONNECT-DISCONNECT CONSTANT VELOCITY DRIVE SHAFT, FOR HIGH SPEED FOUP TRANSPORT 有权
标题翻译：直接驱动模块式皮带输送机，快速连接和快速连接不间断驱动轴，用于高速FOUP运输
公开(公告)号：US20120267219A9
公开(公告)日：2012-10-25
申请号：US12420529
申请日：2009-04-08
申请人： Roumen Deyanov , Michel Pharand , Michael Krolak , Theodore W. Rogers
发明人： Roumen Deyanov , Michel Pharand , Michael Krolak , Theodore W. Rogers
IPC分类号： B65G15/60
CPC分类号： B65G21/06 , B65G15/105 , B65G2201/0297 , B65G2207/30
摘要： A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.
摘要翻译：输送机系统包括限定输送机的一部分的料筒。在一个实施例中，盒包括多个轮，其被设计为传送器部分的单元，并且筒的轮被设计成保持带。在一个可选实施例中，输送机部分包括用于检测容器（例如，FOUP）的存在的集成传感器，并且每个输送机部分可以实现便于高速FOUP运输的精密金属板轨道。在一个实施例中，每个输送段具有两个侧面。每一侧都有一个带有一个皮带的墨盒。在特定实施例中，传送部分的一侧包括驱动传送器的驱动马达。

7. 发明授权

US07070661B2 Uniform gas cushion wafer support 失效
标题翻译：均匀气垫片支架
公开(公告)号：US07070661B2
公开(公告)日：2006-07-04
申请号：US10646249
申请日：2003-08-22
申请人： Ari Eiriksson , Richard Gueler , Michel Pharand
发明人： Ari Eiriksson , Richard Gueler , Michel Pharand
IPC分类号： H01L21/00 , C23C16/00
CPC分类号： H01L21/6838
摘要： A workpiece is supported on a gas cushion to reduce mechanical stresses on the workpiece during processing. A plenum having a workpiece support flange for receiving the workpiece is connected to a gas supply. When gas flows into the plenum and pressure increases sufficiently to lift the workpiece, the workpiece is lifted and the gas flows out of the plenum between the flange and the workpiece edge. The workpiece is thus supported above the flange by the gas during processing.
摘要翻译：工件被支撑在气垫上，以减少加工过程中工件的机械应力。具有用于接收工件的工件支撑凸缘的气室连接到气体供应。当气体流入增压室并且压力增加到足以提升工件时，工件被提升，并且气体在凸缘和工件边缘之间流出增压室。因此，工件在加工过程中被气体支撑在法兰上方。

8. 发明授权

US07560705B2 Workpiece handling scan arm for ion implantation system 有权
标题翻译：用于离子植入系统的工件处理扫描臂
公开(公告)号：US07560705B2
公开(公告)日：2009-07-14
申请号：US11840888
申请日：2007-08-17
申请人： Ari Eiriksson , Donovan Beckel , Robert Mitchell , Michel Pharand , Marvin LaFontaine , Ashwin Purohit , Steven Weed , Wayne Arseneault , Shantanu Pathak , Joseph Daniel Foley
发明人： Ari Eiriksson , Donovan Beckel , Robert Mitchell , Michel Pharand , Marvin LaFontaine , Ashwin Purohit , Steven Weed , Wayne Arseneault , Shantanu Pathak , Joseph Daniel Foley
IPC分类号： H01J37/317
CPC分类号： H01L21/6831 , H01L21/68764
摘要： An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.
摘要翻译：提供离子注入装置，系统和方法用于将工件保持器与扫描臂连接和断开。提供了一种扭转头，其中可操作地安装静电卡盘，其中与一个或多个扭转头和静电卡盘相关联的一个或多个旋转和非旋转构件具有与其相关联的一个或多个动态电动和流体旋转连接。静电卡盘还可操作以从扭转头移除而不断开一个或多个动态流体密封件。

9. 发明授权

US07100759B2 Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit 失效
标题翻译：垂直快速热处理装置的电梯管的磁支撑结构
公开(公告)号：US07100759B2
公开(公告)日：2006-09-05
申请号：US10914343
申请日：2004-08-09
申请人： Michel Pharand , Dennis Normandin , Ari Eiriksson
发明人： Michel Pharand , Dennis Normandin , Ari Eiriksson
IPC分类号： B65G35/00
CPC分类号： H01L21/68792
摘要： A vertical rapid thermal processing system includes a processing chamber and an elevator structure providing for vertical movement of a workpiece within the processing chamber. The elevator structure includes a workpiece support for supporting the workpiece and an elevator shaft coupled to the workpiece support and extending externally from the processing chamber. An end portion of the elevator shaft, external to the processing chamber, has a selected magnetic polarity. The elevator structure also includes moveable carriage coupled to the shaft to provide vertical movement of the workpiece within the processing chamber. The carriage includes a shaft support having the selected polarity. The shaft support is positioned adjacent the polarized end portion of the elevator shaft such that repulsive magnetic forces maintain a gap between the end portion of the elevator shaft and the shaft support as the shaft support and elevator shaft move vertically along a path of travel.
摘要翻译：垂直快速热处理系统包括处理室和提供工件在处理室内的垂直移动的升降机结构。电梯结构包括用于支撑工件的工件支撑件和联接到工件支撑件并从处理室外部延伸的升降机轴。电梯井的在处理室外部的端部具有选定的磁极性。电梯结构还包括联接到轴的可移动的托架，以提供工件在处理室内的垂直移动。托架包括具有所选极性的轴支撑件。轴支撑件邻近电梯井的极化端部定位，使得当轴支撑件和电梯井沿行进路径垂直移动时，排斥磁力在电梯井的端部和轴支撑件之间保持间隙。

10. 发明申请

US20060027440A1 Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit 失效
公开(公告)号：US20060027440A1
公开(公告)日：2006-02-09
申请号：US10914343
申请日：2004-08-09
申请人： Michel Pharand , Dennis Normandin , Ari Eiriksson
发明人： Michel Pharand , Dennis Normandin , Ari Eiriksson
IPC分类号： B65G35/00
CPC分类号： H01L21/68792
摘要： A vertical rapid thermal processing system includes a processing chamber and an elevator structure providing for vertical movement of a workpiece within the processing chamber. The elevator structure includes a workpiece support for supporting the workpiece and an elevator shaft coupled to the workpiece support and extending externally from the processing chamber. An end portion of the elevator shaft, external to the processing chamber, has a selected magnetic polarity. The elevator structure also includes moveable carriage coupled to the shaft to provide vertical movement of the workpiece within the processing chamber. The carriage includes a shaft support having the selected polarity. The shaft support is positioned adjacent the polarized end portion of the elevator shaft such that repulsive magnetic forces maintain a gap between the end portion of the elevator shaft and the shaft support as the shaft support and elevator shaft move vertically along a path of travel.

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