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    • 9. 发明授权
    • Variable lot size load port
    • 可变批量负载端口
    • US07597523B2
    • 2009-10-06
    • US11774750
    • 2007-07-09
    • Anthony C. BonoraMichael KrolakRoger G. HineTheodore W. Rogers
    • Anthony C. BonoraMichael KrolakRoger G. HineTheodore W. Rogers
    • B65G49/07
    • H01L21/67772H01L21/67775Y10S414/14
    • A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.
    • 可变批量装载端口组件包括工具接口,前进板和密封板。 工具界面大致垂直延伸,并且具有前表面,大体平行于前表面的后表面和孔。 前进板位于孔下方的工具界面的前部。 前进板大致水平地延伸并且被配置为支撑前开口统一舱(FOUP)。 推进板在缩回位置和高级位置之间平移。 前进位置靠近工具界面,缩回位置与工具界面间隔开。 密封板具有固定到工具接口的上端,并且下端覆盖孔的一部分以形成减小的孔。 密封板成形为与安装到前进板的选定容量的FOUP的前凸缘形成邻近密封件并且被带到前进位置。