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1. 发明授权

US06392825B1 Assembly comprising an optical element and a mount 有权
标题翻译：组件包括光学元件和安装座
公开(公告)号：US06392825B1
公开(公告)日：2002-05-21
申请号：US09491666
申请日：2000-01-27
申请人： Michael Trunz , Ralf Hilgers , Bernhard Gellrich
发明人： Michael Trunz , Ralf Hilgers , Bernhard Gellrich
IPC分类号： G02B702
CPC分类号： G03F7/70825 , G02B7/026
摘要： An assembly is provided with a mount (1)and an optical element (7). The optical element (7) is connected via elastic connecting elements directly or via one or more intermediate elements to the mount (1). The connecting elements have at least one membrane-like joining element (4), which is connected in the outer region to the mount (1) or to the intermediate element and in the inner region is connected via a rigid, moment-transferring connection (12) to the optical element (7).
摘要翻译：组件设置有安装件（1）和光学元件（7）。光学元件（7）通过直接或经由一个或多个中间元件的弹性连接元件连接到安装座（1）。连接元件具有至少一个膜状接合元件（4），其在外部区域中连接到安装件（1）或中间元件，并且在内部区域中通过刚性的力矩传递连接 12）到光学元件（7）。

2. 发明授权

US06366413B1 Method of straightening the supporting surfaces of supporting elements for optical elements 失效
标题翻译：矫正用于光学元件的支撑元件的支撑表面的方法
公开(公告)号：US06366413B1
公开(公告)日：2002-04-02
申请号：US09692256
申请日：2000-10-19
申请人： Michael Trunz , Bernhard Gellrich
发明人： Michael Trunz , Bernhard Gellrich
IPC分类号： G02B702
CPC分类号： G03F7/70241 , G02B7/026 , G03F7/70825
摘要： In a method of straightening the supporting surfaces (5) of supporting elements (3) for optical elements (1), in particular in lens systems of microlithography projection exposure equipment, the supporting elements (3) and/or at least one bearing part (2, 6) connected to the supporting elements (3) for the optical elements (1) are deformed by a laser beam (A, B, C, D) produced by a laser (7) in such a way that the supporting surfaces (5) are at least approximately aligned with a common supporting plane or some other prescribed distribution.
摘要翻译：在用于矫正用于光学元件（1）的支撑元件（3）的支撑表面（5）的方法中，特别是在微光刻投影曝光设备的透镜系统中，支撑元件（3）和/或至少一个轴承部件连接到用于光学元件（1）的支撑元件（3）的光束（2,6）通过由激光器（7）产生的激光束（A，B，C，D）变形，使得支撑表面 5）至少大致与公共支撑平面或某些其他规定分布对准。

3. 发明申请

US20080212052A1 OPTICAL ARRANGEMENT AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH PASSIVE THERMAL COMPENSATION 审中-公开
标题翻译：具有被动热补偿的微电脑的光学布置和投影曝光系统
公开(公告)号：US20080212052A1
公开(公告)日：2008-09-04
申请号：US12119693
申请日：2008-05-13
申请人： Christian Wagner , Michael Trunz , Ralf Hilgers
发明人： Christian Wagner , Michael Trunz , Ralf Hilgers
IPC分类号： G03B27/52
CPC分类号： G03F7/70825 , G02B7/028 , G03F7/70108 , G03F7/70241 , G03F7/70358
摘要： An optical arrangement with a light source includes an optical element that is fastened in a mount. The light source emits radiation and the optical element is acted on thereby such that the heat that results lacks symmetry corresponding to the shape of the optical element. A connecting structure is provided between the optical element and the mount and has a symmetry that does not correspond to the shape of the optical element and effects an at least partial homogenization of the temperature distribution in the optical element.
摘要翻译：具有光源的光学装置包括紧固在安装座中的光学元件。光源发射辐射，并且光学元件被作用在其上，使得导致对应于光学元件的形状的对称性的热量。在光学元件和安装座之间提供了连接结构，并且具有与光学元件的形状不对应的对称性，并且使光学元件中的温度分布至少部分均匀化。

4. 发明授权

US07274430B2 Optical arrangement and projection exposure system for microlithography with passive thermal compensation 有权
标题翻译：具有被动热补偿的微光刻的光学布置和投影曝光系统
公开(公告)号：US07274430B2
公开(公告)日：2007-09-25
申请号：US09934817
申请日：2001-08-21
申请人： Christian Wagner , Michael Trunz , Ralf Hilgers
发明人： Christian Wagner , Michael Trunz , Ralf Hilgers
IPC分类号： G03B27/30
CPC分类号： G03F7/70825 , G02B7/028 , G03F7/70108 , G03F7/70241 , G03F7/70358
摘要： An optical arrangement with a light source includes an optical element that is fastened in a mount. The light source emits radiation and the optical element is acted on thereby such that the heat that results lacks symmetry corresponding to the shape of the optical element. A connecting structure is provided between the optical element and the mount and has a symmetry that does not correspond to the shape of the optical element and effects an at least partial homogenization of the temperature distribution in the optical element.
摘要翻译：具有光源的光学装置包括紧固在安装座中的光学元件。光源发射辐射，并且光学元件被作用在其上，使得导致对应于光学元件的形状的对称性的热量。在光学元件和安装座之间提供了连接结构，并且具有与光学元件的形状不对应的对称性，并且使光学元件中的温度分布至少部分均匀化。

5. 发明授权

US06191898B1 Optical imaging device, particularly an objective, with at least one optical element 有权
标题翻译：具有至少一个光学元件的光学成像装置，特别是物镜
公开(公告)号：US06191898B1
公开(公告)日：2001-02-20
申请号：US09483320
申请日：2000-01-14
申请人： Michael Trunz , Ralf Hilgers , Erich Merz , Michael Mühlbeyer
发明人： Michael Trunz , Ralf Hilgers , Erich Merz , Michael Mühlbeyer
IPC分类号： G02B702
CPC分类号： G02B7/026
摘要： An optical imaging device, particularly an objective, is provided with at least one optical element, which is mounted in an inner ring, the inner ring being connected to an outer mount. A manipulator device serves for the displacement of the optical element in at least one direction that is perpendicular to the optical axis. By a system of peripheral slots between the inner ring and the outer mount with connecting members situated therebetween, a rotary joint between the inner ring and the outer mount, and at least one displacing rotary joint with an adjusting member between the inner ring and the outer mount as the manipulator device, a displacement of the optical element is attained with low deformation or controlled deformation of the optical element. The inner ring and the outer mount are preferably constituted monolithically.
摘要翻译：光学成像装置，特别是物镜，具有安装在内圈中的至少一个光学元件，内环连接到外部安装件。操纵器装置用于在垂直于光轴的至少一个方向上移动光学元件。通过内环和外部安装件之间的外围槽的系统，其中连接构件位于它们之间，内环和外部安装件之间的旋转接头以及至少一个带有调节构件的位移旋转接头，位于内圈和外圈之间作为机械手装置安装，通过光学元件的低变形或受控制的变形来获得光学元件的位移。内环和外部安装件优选地是整体构成的。

6. 发明授权

US06655037B2 Coordinate measuring apparatus having a bending-resistant measuring table 失效
标题翻译：具有耐弯曲测量台的坐标测量装置
公开(公告)号：US06655037B2
公开(公告)日：2003-12-02
申请号：US09405132
申请日：1999-09-24
申请人： Klaus-Dieter Götz , Michael Trunz , Heinz Broghammer
发明人： Klaus-Dieter Götz , Michael Trunz , Heinz Broghammer
IPC分类号： G01B5004
CPC分类号： G01B5/008 , G01B5/0011
摘要： A coordinate measuring apparatus includes a bending-resistant measuring table configured as a ribbed hollow body.
摘要翻译：坐标测量装置包括构造成肋状中空体的耐弯曲测量台。

7. 发明授权

US07227707B2 Holding device for an optical element 有权
标题翻译：用于光学元件的保持装置
公开(公告)号：US07227707B2
公开(公告)日：2007-06-05
申请号：US11379697
申请日：2006-04-21
申请人： Michael Trunz , Alexander Hinz
发明人： Michael Trunz , Alexander Hinz
IPC分类号： G02B7/02
CPC分类号： G02B7/028 , C22C21/02 , G02B7/008
摘要： A holding device for an optical element, is formed at least in part, of a silicon-containing aluminum material.
摘要翻译：用于光学元件的保持装置至少部分地由含硅铝材料形成。

8. 发明授权

US06834163B2 Camera system having at least two first cameras and two second cameras 有权
标题翻译：相机系统具有至少两个第一相机和两个第二相机
公开(公告)号：US06834163B2
公开(公告)日：2004-12-21
申请号：US10341454
申请日：2003-01-14
申请人： Michael Trunz , Johann Huell
发明人： Michael Trunz , Johann Huell
IPC分类号： G03B3500
CPC分类号： G01C11/02 , G03B37/04
摘要： The invention relates to a camera system, especially for photogrammetric applications. The camera system contains at least two first cameras (1, 2), which are inclined towards each other so that the optical axes (7, 8) of the first cameras (1, 2) intersect at a common point of intersection (5). The camera system also has at least two second cameras (10, 11) which are located at a distance from the first cameras (1, 2), in the viewing direction of the first cameras (1, 2). The inclination of the optical axes (7, 8) of the first cameras (1, 2) towards each other provides an area (b) in which the envelope that surrounds the acceptance cones of the first cameras (1, 2) has an essentially constant diameter. The second cameras (10, 11) are located in this area (b) so that the second cameras (10, 11) avoid truncating the projection of the visual fields of the first cameras (1, 2). The first cameras are preferably panchromatic and the second cameras polychromatic.
摘要翻译：本发明涉及一种相机系统，特别是用于摄影测量应用。相机系统包含至少两个相互倾斜的第一相机（1,2），使得第一相机（1,2）的光轴（7,8）在公共交叉点（5）相交，。相机系统还具有在第一相机（1,2）的观察方向上与第一相机（1,2）一定距离的至少两个第二相机（10,11）。第一相机（1,2）的光轴（7,8）朝向彼此的倾斜度提供了一个区域（b），其中围绕第一相机（1,2）的接收锥的信封具有基本上恒定直径。第二相机（10,11）位于该区域（b）中，使得第二相机（10,11）避免截断第一相机（1,2）的视野的投影。第一相机优选是全色的，第二相机是多色的。

9. 发明授权

US06259571B1 Adjustable assembly 有权
标题翻译：可调组件
公开(公告)号：US06259571B1
公开(公告)日：2001-07-10
申请号：US09503023
申请日：2000-02-14
申请人： Hubert Holderer , Peter Ruemmer , Michael Trunz , Bernhard Geuppert , Thomas Polzer , Johan Dries , Hugo Timmers , Albert Post
发明人： Hubert Holderer , Peter Ruemmer , Michael Trunz , Bernhard Geuppert , Thomas Polzer , Johan Dries , Hugo Timmers , Albert Post
IPC分类号： G02B702
CPC分类号： G12B5/00 , G02B7/023 , G02B7/026
摘要： An adjustable assembly comprises a base (mount ring 1), an adjustable part (inner ring 3), a lever (tilting lever 5) and a drive (drive element 6). The lever (tilting lever 5) is connected to the base (mount ring 1) and to the adjustable part (inner ring 3) via two elastic solid pivoting joints (7, 8) oriented in parallel. One of the two solid pivoting joints (7) is divided into two pivoting joint parts (7a, 7b), which are arranged such that along their pivoting axis (9) they are offset sideways on either side of the second solid pivoting joint (8).
摘要翻译：可调组件包括基座（安装环1），可调部分（内环3），杠杆（倾斜杆5）和驱动（驱动元件6））。杠杆（倾斜杆5）通过平行定向的两个弹性固体枢转接头（7,8）连接到基座（安装环1）和可调节部分（内环3）。两个固定枢转接头（7）中的一个被分成两个枢转接头部分（7a，7b），它们被布置为使得沿着它们的枢转轴线（9），它们在第二固体枢转接头（8）的任一侧侧向偏移）。

10. 发明授权

US06229657B1 Assembly of optical element and mount 有权
标题翻译：组装光学元件和安装座
公开(公告)号：US06229657B1
公开(公告)日：2001-05-08
申请号：US09328938
申请日：1999-06-09
申请人： Hubert Holderer , Peter Rümmer , Michael Trunz
发明人： Hubert Holderer , Peter Rümmer , Michael Trunz
IPC分类号： G02B702
CPC分类号： G03F7/70058 , G02B7/023 , G03F7/70241 , G03F7/70825
摘要： Assembly of an optical element and a mount, in which the optical element is coupled by means of numerous lugs to a rigid intermediate ring, which itself is coupled by adjusting members or passive decouplers to the mount for connection to a housing and/or to a further mount.
摘要翻译：光学元件和安装件的组装，其中光学元件通过许多凸耳连接到刚性中间环，该刚性中间环本身通过调节构件或被动分离器耦合到安装件，以连接到壳体和/或进一步安装。

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