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1. 发明授权

US5982182A Interface apparatus for automatic test equipment with positioning modules incorporating kinematic surfaces 失效
标题翻译：用于自动测试设备的接口设备，带有包含运动表面的定位模块
公开(公告)号：US5982182A
公开(公告)日：1999-11-09
申请号：US414456
申请日：1995-03-31
申请人： Michael A. Chiu , David H. Levy , Alexander H. Slocum
发明人： Michael A. Chiu , David H. Levy , Alexander H. Slocum
IPC分类号： G01R31/26 , G01R1/04 , G01R1/06 , G01R1/067 , G01R1/073 , G01R31/02 , G01R31/28 , H01L21/66
CPC分类号： G01R1/04 , G01R1/06705 , G01R1/073 , G01R31/2887
摘要： A kinematic coupling for a test system with a test head which must be docked with a handling device. The coupling is implemented with a plurality of modules attached to the test head. Each module has one kinematic surface and is designed to mate with another kinematic surface on the handling device. Each module includes a motor which can extend or retract the kinematic surface. These modules allow docking of the test head to the handling device with a final motion perpendicular to the handler. They also allow the tilt angle between the test head and the handler to be adjusted to achieve planarization.
摘要翻译：用于具有测试头的测试系统的运动耦合，测试头必须与处理装置对接。耦合是用连接在测试头上的多个模块来实现的。每个模块都有一个运动表面，设计成与处理装置上的另一个运动表面配合。每个模块包括一个能够延伸或缩回运动表面的马达。这些模块允许测试头与操纵装置对接，并以垂直于处理器的最终动作。它们还允许调整测试头和处理器之间的倾斜角度以实现平坦化。

2. 发明授权

US5931048A Manipulator for automatic test equipment test head 失效
标题翻译：机械手自动测试设备测试头
公开(公告)号：US5931048A
公开(公告)日：1999-08-03
申请号：US808131
申请日：1997-02-28
申请人： Alexander H. Slocum , Carsten A. Hochmuth , David H. Levy , Sepehr Kiani , R. Ryan Vallance
发明人： Alexander H. Slocum , Carsten A. Hochmuth , David H. Levy , Sepehr Kiani , R. Ryan Vallance
IPC分类号： G01R1/06 , G01R31/28 , H01L21/66 , G05G11/00
CPC分类号： G01R31/2887 , Y10T74/20311 , Y10T74/20341
摘要： A manipulator for a test head connected to automatic test equipment through a heavy, inflexible cable. The manipulator includes a telescoping column assembly to which is mounted a vertical member. A cradle holding the test head is mounted to the vertical member. The cable is clamped at the vertical member to reduce the amount of force exerted by the cable on the test head. The cradle includes movable members to allow fine positioning of the test head, while maintaining the test head isolated from cable force. Course motion of the test head may be made by moving portions of the manipulator on the opposite side of the cable clamp from the test head. Precise positioning of the test head relative to a handling device is accomplished through a positioning mechanism at the interface between the test head and the handling device. To allow the positioning mechanism to operate, the manipulator has compliance which allows the test head to be forced into position by the positioning mechanism.
摘要翻译：用于通过重型，不灵活的电缆连接到自动测试设备的测试头的操纵器。操纵器包括一个可伸缩的柱组件，其上安装有垂直构件。夹持测试头的托架安装在垂直构件上。电缆被夹紧在垂直构件上，以减少电缆施加在测试头上的力量。支架包括可移动构件，以允许测试头的精细定位，同时保持测试头与电缆力隔离。可以通过将操纵器的与测试头相对的电缆夹的相对侧上的部分移动来进行测试头的运动。测试头相对于处理装置的精确定位是通过在测试头和处理装置之间的界面处的定位机构实现的。为了允许定位机构操作，机械手具有允许通过定位机构将测试头压入到位的顺从性。

3. 发明授权

US09236509B2 Solar cells with patterned antireflective surfaces 有权
标题翻译：具有图案抗反射表面的太阳能电池
公开(公告)号：US09236509B2
公开(公告)日：2016-01-12
申请号：US14260687
申请日：2014-04-24
申请人： David H. Levy , Daniele Margadonna , Dennis Flood , Wendy G. Ahearn , Richard W. Topel, Jr. , Theodore Zubil
发明人： David H. Levy , Daniele Margadonna , Dennis Flood , Wendy G. Ahearn , Richard W. Topel, Jr. , Theodore Zubil
IPC分类号： H01L21/76 , H01L31/0236 , H01L31/068 , H01L31/18
CPC分类号： H01L31/02363 , H01L31/068 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： Systems and methods for producing nanoscale textured low reflectivity surfaces may be utilized to fabricate solar cells. A substrate may be patterned with a resist prior to an etching process that produces a nanoscale texture on the surface of the substrate. Additionally, the substrate may be subjected to a dopant diffusion process. Prior to dopant diffusion, the substrate may be optionally subjected to liquid phase deposition to deposit a material that allows for patterned doping. The order of the nanoscale texture etching and dopant diffusion may be modified as desired to produce post-nano emitters or pre-nano emitters.
摘要翻译：用于生产纳米级织构的低反射率表面的系统和方法可用于制造太阳能电池。可以在蚀刻工艺之前用抗蚀剂图案化衬底，其在衬底的表面上产生纳米尺度的纹理。此外，可以对衬底进行掺杂剂扩散处理。在掺杂剂扩散之前，衬底可以任选地进行液相沉积以沉积允许图案化掺杂的材料。可以根据需要修改纳米尺度纹理蚀刻和掺杂剂扩散的顺序以产生纳米后发射体或预纳米发射体。

4. 发明授权

US08791023B2 Patterned thin film dielectric layer formation 有权
标题翻译：图案化的薄膜介电层形成
公开(公告)号：US08791023B2
公开(公告)日：2014-07-29
申请号：US13600287
申请日：2012-08-31
申请人： Carolyn R. Ellinger , David H. Levy , Shelby F. Nelson
发明人： Carolyn R. Ellinger , David H. Levy , Shelby F. Nelson
IPC分类号： H01L21/311
CPC分类号： H01L31/1884 , H01L21/02178 , H01L21/022 , H01L21/0228 , H01L21/02301 , H01L21/02315 , H01L21/02565 , H01L21/02573 , H01L21/0262 , H01L21/32 , H01L29/42384 , H01L29/4908 , H01L31/0392 , H01L31/03926 , Y02E10/50
摘要： A method of producing an inorganic thin film dielectric material layer includes providing a substrate. A first inorganic thin film dielectric material layer is deposited on the substrate using an atomic layer deposition process. The first inorganic thin film dielectric material layer is treated after its deposition. A patterned deposition inhibiting material layer is provided on the substrate. A second inorganic thin film dielectric material layer is selectively deposited on a region of the substrate where the deposition inhibiting material layer is not present using an atomic layer deposition process.
摘要翻译：无机薄膜电介质材料层的制造方法包括提供基板。使用原子层沉积工艺在衬底上沉积第一无机薄膜电介质材料层。第一种无机薄膜介电材料层在沉积后进行处理。在衬底上设置有图案化的沉积抑制材料层。使用原子层沉积工艺，在不存在沉积抑制材料层的基板的区域上选择性地沉积第二无机薄膜电介质材料层。

5. 发明申请

US20140061795A1 THIN FILM TRANSISTOR INCLUDING IMPROVED SEMICONDUCTOR INTERFACE 审中-公开
标题翻译：薄膜晶体管，包括改进的半导体界面
公开(公告)号：US20140061795A1
公开(公告)日：2014-03-06
申请号：US13600302
申请日：2012-08-31
申请人： David H. Levy , Carolyn R. Ellinger , Shelby F. Nelson
发明人： David H. Levy , Carolyn R. Ellinger , Shelby F. Nelson
IPC分类号： H01L29/786
CPC分类号： H01L29/7869 , H01L29/42384 , H01L29/4908
摘要： A transistor includes a substrate; a gate including a first electrically conductive layer stack on the substrate; and a first inorganic thin film dielectric layer on the substrate with the first inorganic thin film dielectric layer having a first pattern. A second inorganic thin film dielectric layer has a second pattern. A semiconductor layer is in contact with and has the same pattern as the second inorganic thin film dielectric material layer. A source/drain includes a second electrically conductive layer stack.
摘要翻译：晶体管包括衬底; 栅极，包括在所述衬底上的第一导电层堆叠; 以及第一无机薄膜电介质层，其具有第一图案的第一无机薄膜电介质层。第二无机薄膜电介质层具有第二图案。半导体层与第二无机薄膜介电材料层接触并具有相同的图案。源极/漏极包括第二导电层堆叠。

6. 发明授权

US08420168B2 Delivery device for deposition 有权
标题翻译：用于沉积的输送装置
公开(公告)号：US08420168B2
公开(公告)日：2013-04-16
申请号：US13466507
申请日：2012-05-08
申请人： Roger S. Kerr , David H. Levy , James T. Murray
发明人： Roger S. Kerr , David H. Levy , James T. Murray
IPC分类号： C23C16/455 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： B05B1/005 , C23C16/45551 , C23C16/45574 , Y10T29/494 , Y10T29/49432 , Y10T29/49826 , Y10T137/0318 , Y10T137/87249
摘要： A delivery device for thin-film material deposition has at least first, second, and third inlet ports for receiving a common supply for a first, a second and a third gaseous material, respectively. Each of the first, second, and third elongated emissive channels allow gaseous fluid communication with one of corresponding first, second, and third inlet ports. The delivery device can be formed from apertured plates, superposed to define a network of interconnecting supply chambers and directing channels for routing each of the gaseous materials from its corresponding inlet port to a corresponding plurality of elongated emissive channels. The delivery device comprises a diffusing channel formed by a relief pattern between facing plates. Also disclosed is a process for thin film deposition. Finally, more generally, a flow diffuser and a corresponding method of diffusing flow is disclosed.
摘要翻译：用于薄膜材料沉积的递送装置具有至少第一，第二和第三入口端口，用于分别接收用于第一，第二和第三气态材料的共同供应。第一，第二和第三细长发射通道中的每一个允许与对应的第一，第二和第三入口端口之一的气态流体连通。输送装置可以由孔板形成，叠加以形成互连供应室的网络，并且引导通道用于将每个气态材料从其相应的入口端口路由到相应的多个细长的发射通道。输送装置包括由相对板之间的浮雕图案形成的扩散通道。还公开了一种用于薄膜沉积的方法。最后，更一般地，公开了一种流扩散器和相应的扩散流的方法。

7. 发明申请

US20130084681A1 PRODUCING A VERTICAL TRANSISTOR INCLUDING REENTRANT PROFILE 有权
标题翻译：生产垂直晶体管，包括重新配置
公开(公告)号：US20130084681A1
公开(公告)日：2013-04-04
申请号：US13248560
申请日：2011-09-29
申请人： Shelby F. Nelson , David H. Levy , Lee W. Tutt
发明人： Shelby F. Nelson , David H. Levy , Lee W. Tutt
IPC分类号： H01L21/336
CPC分类号： H01L29/78642
摘要： Producing a vertical transistor includes providing a substrate including a gate material layer stack with a reentrant profile. A patterned deposition inhibiting material is deposited over a portion of the gate material layer stack and over a portion of the substrate. An electrically insulating material layer is deposited over a portion of the gate material layer stack and over a portion of the substrate using a selective area deposition process in which the electrically insulating material layer is not deposited over the patterned deposition inhibiting material. A semiconductor material layer is deposited over the electrically insulating material layer.
摘要翻译：制造垂直晶体管包括提供包括具有折入轮廓的栅极材料层叠层的衬底。图案化的沉积抑制材料沉积在栅极材料层堆叠的一部分上并在衬底的一部分上方。使用选择性区域沉积工艺在栅极材料层堆叠的一部分上并在衬底的一部分上沉积电绝缘材料层，其中电绝缘材料层不沉积在图案化的沉积抑制材料上。半导体材料层沉积在电绝缘材料层上。

8. 发明申请

US20120231239A1 INTEGRATED COLOR MASK 有权
标题翻译：集成彩色面膜
公开(公告)号：US20120231239A1
公开(公告)日：2012-09-13
申请号：US13474757
申请日：2012-05-18
申请人： Lyn M. Irving , David H. Levy , Mark E. Irving , Carolyn R. Ellinger
发明人： Lyn M. Irving , David H. Levy , Mark E. Irving , Carolyn R. Ellinger
IPC分类号： B32B3/10 , H01L29/78
CPC分类号： H01L27/1288 , G03F7/2016 , G03F7/2018 , G03F7/40 , H01L27/1214 , H01L27/1225 , H01L29/66765 , H01L29/7869 , Y10T428/24851
摘要： The invention relates to a process for forming a structure comprising providing a support, coating one side of said support with a colored mask, coating a layer photopatternable by visible light, and exposing the layer through the colored mask with visible light to photopattern the layer.
摘要翻译：本发明涉及一种用于形成结构的方法，包括提供支撑体，用彩色掩模涂覆所述支撑体的一侧，涂覆可见光的可见光层，以及通过可见光将层暴露于彩色掩模以对该层进行光图案化。

9. 发明授权

US08153352B2 Multicolored mask process for making display circuitry 有权
标题翻译：用于制作显示电路的多彩蒙版工艺
公开(公告)号：US08153352B2
公开(公告)日：2012-04-10
申请号：US11986088
申请日：2007-11-20
申请人： Lyn M. Irving , David H. Levy , Lan B. Thai
发明人： Lyn M. Irving , David H. Levy , Lan B. Thai
IPC分类号： G03F7/20
CPC分类号： H01L27/1288 , G03F7/2022 , H01L27/1214 , H01L27/1225 , H01L27/3244 , H01L29/66765 , H01L29/7869 , H01L2227/323 , Y10T428/24802
摘要： A process for forming a pixel circuit is disclosed comprising: (a) providing a transparent support; (b) forming a multicolor mask having at least four different color patterns; (c) forming integrated electronic components of the pixel circuit having at least four layers of patterned functional material comprising a first conductor, a dielectric, a semiconductor, and a second conductor each layer of patterned functional material corresponding to the four different color patterns of the multicolor mask. The functional material is patterned using a photopattern corresponding to each color pattern.
摘要翻译：公开了一种用于形成像素电路的工艺，包括：（a）提供透明支撑体; （b）形成具有至少四种不同颜色图案的多色蒙版; （c）形成像素电路的集成电子部件，其具有至少四层图案化的功能材料，其包括第一导体，电介质，半导体和第二导体，每层图案化的功能材料层对应于四个不同颜色图案多色面膜使用对应于每个颜色图案的光图案来对功能材料进行图案化。

10. 发明申请

US20120070942A1 PROCESS FOR FORMING THIN FILM ENCAPSULATION LAYERS 有权
标题翻译：形成薄膜包封层的方法
公开(公告)号：US20120070942A1
公开(公告)日：2012-03-22
申请号：US13303513
申请日：2011-11-23
申请人： Elena A. Fedorovskaya , Michael L. Boroson , David H. Levy , John A. Agostinelli
发明人： Elena A. Fedorovskaya , Michael L. Boroson , David H. Levy , John A. Agostinelli
IPC分类号： H01L21/56
CPC分类号： B05D5/00 , C23C16/403 , C23C16/405 , C23C16/45551 , C23C16/45574 , H01L51/5253
摘要： A thin film environmental barrier encapsulation process includes providing an electronic device on a substrate, a first reactant gaseous material, a second reactant gaseous material, an inert gaseous material; and a delivery head through which the reactant gaseous materials and the inert gaseous material are simultaneously directed toward the electronic device and the substrate. One or more of the reactant gaseous materials and the inert gaseous material flows through the delivery head. The flow of the one or more of the reactant gaseous materials and the inert gaseous material generates a pressure to create a gas fluid bearing that maintains a substantially uniform distance between the delivery head and the substrate. Relative motion between the delivery head and the substrate causes the second reactant gaseous material to react with at least a portion of the electronic device and the substrate that has been treated with the first reactant gaseous material.
摘要翻译：薄膜环境屏障封装方法包括在基底上提供电子器件，第一反应物气态材料，第二反应物气态物质，惰性气态物质; 以及输送头，反应物气体材料和惰性气体材料通过该输送头同时朝向电子装置和基板。一种或多种反应物气态物质和惰性气体物质流过输送头。一种或多种反应物气态物质和惰性气体物质的流动产生压力以产生在输送头和基底之间保持基本均匀距离的气体流体轴承。输送头和基底之间的相对运动导致第二反应物气态物质与已经用第一反应物气态物质处理的电子器件和基底的至少一部分反应。

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