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    • 7. 发明授权
    • Method for measuring gases and/or minimizing cross sensitivity in FET-based gas sensors
    • 在基于FET的气体传感器中测量气体和/或最小化交叉灵敏度的方法
    • US07946153B2
    • 2011-05-24
    • US11587173
    • 2005-04-22
    • Maximilian FleischerUwe LampeHans MeixnerRoland PohleElfriede Simon
    • Maximilian FleischerUwe LampeHans MeixnerRoland PohleElfriede Simon
    • G01N7/00
    • G01N27/4143G01N33/006
    • A gas sensor based on a field effect transistor (“FET”) evaluates both a change in work function of a gas-sensitive layer of the FET and a change in the capacitance of the layer. Thus, two physically independent signals are read from the gas-sensitive layer, each signal representing a sensitivity to a different gas. This reduces the effect of cross-sensitivities; that is, of one gas on the target gas. The underlying physical mechanisms, the first causing a change in the work function in a reaction with gases and the second causing a change in the capacitance of the sensitive layer, are widely different. Because of this, the two parameters demonstrate different gas sensitivities. If the reactions to both gases are known, the effect of the interfering gas on the sensor signal can be compensated for, and with this the concentration of the target gas can be determined.
    • 基于场效应晶体管(“FET”)的气体传感器评估FET的气敏层的功函数变化和层的电容变化。 因此,从气体敏感层读取两个物理独立的信号,每个信号表示对不同气体的敏感性。 这降低了交叉敏感性的影响; 也就是目标气体上的一种气体。 潜在的物理机制,首先引起与气体反应的功函数的变化,第二个导致敏感层的电容变化的物理机制是不同的。 因此,这两个参数表现出不同的气体敏感性。 如果对两种气体的反应是已知的,则可以补偿干扰气体对传感器信号的影响,并且可以确定目标气体的浓度。
    • 8. 发明申请
    • Apparatus and Method for increasing the selectivity of fet-based gas sensors
    • 用于增加基于胎面的气体传感器的选择性的装置和方法
    • US20090211437A1
    • 2009-08-27
    • US11587171
    • 2005-04-21
    • Maximilian FleischerUwe LampeHans MeixnerRoland PohleRalf SchneiderElfriede Simon
    • Maximilian FleischerUwe LampeHans MeixnerRoland PohleRalf SchneiderElfriede Simon
    • G01N27/414
    • G01N33/0014G01N27/4143
    • A FET gas sensor having a relatively low operating temperature, for example, room temperature, is free from cross sensitivities from interfering gases by a preceding in-line filter. The sensor's service life is substantially stabilizable by using fabric-like activated charcoal filters which can be regenerated by a moderate temperature increase, and by limiting the diffusion of the analyte gas, which is made possible by the relatively small amount of gas detectable on the sensitive layer of the sensor. This substantially increases the service life of the filters. The gas sensor eliminates cross sensitivities to thereby increase the detection reliability thereof. Also, the gas sensor has relative long term stability and is economical to build. The gas sensor can read relatively weak signals generated by gas-sensitive layers, for example, without other stronger gas signals interfering with the weak signals.
    • 具有较低工作温度(例如室温)的FET气体传感器不受前面的在线过滤器的干扰气体的交叉敏感性。 传感器的使用寿命通过使用织物样的活性炭过滤器可以基本上稳定,该过滤器可以通过适度的温度升高再生,并且通过限制分析物气体的扩散,这是通过敏感的可检测的相对少量的气体 传感器层。 这大大增加了过滤器的使用寿命。 气体传感器消除了交叉敏感度,从而提高了其检测可靠性。 此外,气体传感器具有相对的长期稳定性并且构建经济。 气体传感器可以读取由气体敏感层产生的相对较弱的信号,例如,没有其他较强气体信号干扰弱信号。
    • 9. 发明授权
    • Apparatus and method for increasing the selectivity of FET-based gas sensors
    • 提高基于FET的气体传感器选择性的装置和方法
    • US07992426B2
    • 2011-08-09
    • US11587171
    • 2005-04-21
    • Maximilian FleischerUwe LampeHans MeixnerRoland PohleRalf SchneiderElfriede Simon
    • Maximilian FleischerUwe LampeHans MeixnerRoland PohleRalf SchneiderElfriede Simon
    • G01N33/00G01N27/414
    • G01N33/0014G01N27/4143
    • A FET gas sensor having a relatively low operating temperature, for example, room temperature, is free from cross sensitivities from interfering gases by a preceding in-line filter. The sensor's service life is substantially stabilizable by using fabric-like activated charcoal filters which can be regenerated by a moderate temperature increase, and by limiting the diffusion of the analyte gas, which is made possible by the relatively small amount of gas detectable on the sensitive layer of the sensor. This substantially increases the service life of the filters. The gas sensor eliminates cross sensitivities to thereby increase the detection reliability thereof. Also, the gas sensor has relative long term stability and is economical to build. The gas sensor can read relatively weak signals generated by gas-sensitive layers, for example, without other stronger gas signals interfering with the weak signals.
    • 具有较低工作温度(例如室温)的FET气体传感器不受前面的在线过滤器的干扰气体的交叉敏感性。 传感器的使用寿命通过使用织物样的活性炭过滤器可以基本上稳定,该过滤器可以通过适度的温度升高再生,并且通过限制分析物气体的扩散,这是通过敏感的可检测的相对少量的气体 传感器层。 这大大增加了过滤器的使用寿命。 气体传感器消除了交叉敏感度,从而提高了其检测可靠性。 此外,气体传感器具有相对的长期稳定性并且构建经济。 气体传感器可以读取由气体敏感层产生的相对较弱的信号,例如,没有其他较强气体信号干扰弱信号。