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    • 1. 发明授权
    • Laser beam scanner and its fabricating method
    • 激光束扫描器及其制造方法
    • US4957336A
    • 1990-09-18
    • US269412
    • 1988-11-10
    • Shin-ya HasegawaMasayuki KatoFumio YamagishiHiroyuki IkedaTakefumi Inagaki
    • Shin-ya HasegawaMasayuki KatoFumio YamagishiHiroyuki IkedaTakefumi Inagaki
    • G02B26/10
    • G02B26/106Y10S359/90
    • A high precision laser beam scanner is provided which is able to shape a beam generated by a laser, suppress the influence of jitter of a scanning beam due to mode hopping of a semiconductor laser, and reduce aberration of the scanning beam. A beam source generates a semiconductor laser beam, which is diffracted by a rotary hologram, forming a scanning beam on a surface to be scanned. An aberration correcting stationary hologram is disposed between the beam source and the rotary hologram. The stationary hologram is constructed with an object wave and a reference wave, which interfere on a stationary hologram substrate subject so that an aberration of the scanning beam on the surface to be scanned shall be corrected. The object wave is a spherical wave which has an aberration, a wave length shorter than that of the semiconductor laser beam, and an incident angle which is not vertical but is inclined with respect to the stationary hologram substrate. A method for fabricating the laser beam scanner is also provided.
    • 提供了能够对由激光产生的光束进行成形的高精度激光束扫描器,抑制由于半导体激光器的跳跃而导致的扫描光束的抖动的影响,并且减小扫描光束的像差。 光束源产生通过旋转全息图衍射的半导体激光束,在要扫描的表面上形成扫描光束。 像差校正固定全息图设置在光束源和旋转全息图之间。 固定全息图由对象波和参考波构成,其干涉固定的全息图基板对象,使得要扫描的表面上的扫描光束的像差被校正。 对象波是具有像差,波长短于半导体激光束的像差的球面波,并且不是垂直但相对于静止全息图基板倾斜的入射角。 还提供了一种用于制造激光束扫描器的方法。