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    • 4. 发明授权
    • Vertical boat and a method for making the same
    • 垂直船和制作相同的方法
    • US5492229A
    • 1996-02-20
    • US151386
    • 1993-11-12
    • Takashi TanakaJun YoshikawaEiichi ToyaAtsuo KitazawaKazunori MeguroTatsuo NozawaYutaka IshizukaYoshiyuki WatanabeMasaru SeinoHideo Nakanishi
    • Takashi TanakaJun YoshikawaEiichi ToyaAtsuo KitazawaKazunori MeguroTatsuo NozawaYutaka IshizukaYoshiyuki WatanabeMasaru SeinoHideo Nakanishi
    • C30B31/14H01L21/673A47F7/00
    • H01L21/67309C30B31/14
    • A vertical boat for holding a plurality of semiconductor wafers comprising two end members (2) positioned at the top and the bottom of the vertical boat, and a plurality of support members (3,4,5,6,104) vertically mounted on the end members (2) for supporting the wafers, wherein each support member (3,4,5,6,104) is formed by a plate-like member having a series of slits (9,10,7,8,108) formed thereon in such a manner that a plurality of support arms are defined by the slits (9,10,7,8,108) at a predetermined interval, each support arm having a support projection (11,12,13,14,112) formed at the end thereof, and wherein the inner portions (P) of the wafer (1) is to be supported by the support projections (11,12,13,14,112) whereas the periphery of the wafer (1) does not contact the arms of the support members (3,4,5,6,104). The slits can be formed in two steps: forming a series of first slit portions on the plate-like member at a predetermined interval so as to retain two side walls of the plate-like member; and forming a series of second small slit portions on one of the side walls at the same interval so as to connect each second slit portion to the corresponding first slit portion.
    • 一种用于保持多个半导体晶片的垂直船,包括位于垂直船的顶部和底部的两个端部构件(2)和垂直安装在端部构件上的多个支撑构件(3,4,5,6,104) (2),用于支撑晶片,其中每个支撑构件(3,4,5,6,104)由其上形成有一系列狭缝(9,10,7,8,108)的板状构件形成,其方式使得 多个支撑臂由狭缝(9,10,7,8,108)以预定的间隔限定,每个支撑臂具有在其端部形成的支撑突起(11,12,13,14,112),并且其中内部 晶片(1)的部分(P)将由支撑突起(11,12,13,14,112)支撑,而晶片(1)的周边不与支撑部件(3,4)的臂接触, 5,6,104)。 狭缝可以分成两个步骤:以预定间隔在板状构件上形成一系列第一狭缝部分,以便保持板状构件的两个侧壁; 并且在一个侧壁上以相同的间隔形成一系列第二小狭缝部分,以将每个第二狭缝部分连接到相应的第一狭缝部分。