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    • 5. 发明授权
    • Mark signal amplifier
    • 标记信号放大器
    • US4297676A
    • 1981-10-27
    • US107087
    • 1979-12-26
    • Shigeru MoriyaNobuo HamamtoKazuo IchinoKanji Ozawa
    • Shigeru MoriyaNobuo HamamtoKazuo IchinoKanji Ozawa
    • H01L21/027G06K7/10H01J37/304G06K9/32
    • G06K7/10851H01J37/3045
    • In electron-beam lithography, and similar operations, to achieve good drawing accuracy on a sample, it is necessary to detect the position of a mark on the sample with high accuracy. To accomplish this, a mark signal amplifier is provided including a first circuit for taking maximum and minimum values out of a mark signal detected by causing an electron beam to scan a mark area provided on a sample. A second circuit determines a peak-to-peak value of an amplitude of the detected mark signal in accordance with the maximum and minimum values, and a third circuit produces an output signal of a constant amplitude level as an input to a binary-coding circuit in accordance with the peak-to-peak value. The output signal of the third circuit remains constant in spite of fluctuations of the detected mark signal, so that a higher accuracy is obtained in detecting the mark for positioning. An alternative arrangement adds the maximum and minimum values, and establishes a mean value of the maximum and minimum values from the resultant sum.
    • 在电子束光刻和类似的操作中,为了在样品上获得良好的绘图精度,有必要高精度地检测样品上标记的位置。 为了实现这一点,提供了一种标记信号放大器,其包括用于从通过使电子束扫描样品上提供的标记区域而检测的标记信号中获取最大值和最小值的第一电路。 第二电路根据最大值和最小值确定检测到的标记信号的幅度的峰 - 峰值,并且第三电路产生恒定幅度电平的输出信号作为二进制编码电路的输入 按照峰峰值。 尽管检测到的标记信号的波动,第三电路的输出信号保持恒定,从而在检测定位标记时获得较高的精度。 一个替代方案是添加最大值和最小值,并从所得到的和建立最大值和最小值的平均值。