会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明授权
    • Charge-particle energy analyzer
    • 电荷粒子能量分析仪
    • US4219730A
    • 1980-08-26
    • US936928
    • 1978-08-25
    • Isao IshikawaYoshitaka GotoMichiyasu Itoh
    • Isao IshikawaYoshitaka GotoMichiyasu Itoh
    • G01N23/227G01N23/225G01Q30/02G01Q90/00G01T1/36G21K1/087H01J37/256H01J49/44H01J49/48H01J39/00
    • H01J37/256G01N23/225G21K1/087H01J49/482
    • A charged-particle energy analyzer having means for irradiating a sample with a primary electron beam, deflecting electrode means which focus charged particle flux emitted from the sample onto a center axis of the primary electron beam or onto an identical circumference with its center on the axis, a slit disposed at the focus point of the charged particles, an energy analyzer whose object point lies at the focus point, a detector for detecting the charged particles analyzed by the energy analyzer, and charged particle flux deflecting means provided between the sample and the detector, for shielding by one part of the charged particle flux focused in a true circular form, to thereby make it possible not only to set a wide accepted solid angle for signals but also to get an information as to the concave or convex surface condition of the sample at the measured portion.
    • 一种带电粒子能量分析仪,其具有用于用一次电子束照射样品的装置,将从样品发射的带电粒子通量聚焦到一次电子束的中心轴上的偏转电极装置或与其一致的圆周上的中心在轴上的偏转电极装置 设置在带电粒子的聚焦点的狭缝,物点在焦点处的能量分析器,用于检测由能量分析器分析的带电粒子的检测器,以及设置在样品和样品之间的带电粒子通量偏转装置 检测器,用于通过以真圆形形式聚焦的一部分带电粒子通量进行屏蔽,从而不仅能够为信号设置广泛接受的立体角,而且可以获得关于凹面或凸面状况的信息 在测量部分的样品。
    • 5. 发明授权
    • Charged-particle analyzer
    • 充电粒子分析仪
    • US4135088A
    • 1979-01-16
    • US810970
    • 1977-06-28
    • Isao IshikawaMichiyasu ItohKatsuhisa Usami
    • Isao IshikawaMichiyasu ItohKatsuhisa Usami
    • G01N23/227G01N23/225G05B7/02H01J49/44H01J49/48H01J39/00
    • G01N23/225H01J49/482H01J2237/05
    • A charged-particle beam correction arrangement for a charged-particle analyzer having deflecting electrodes which focus charged particles emitted from a sample onto a center axis, an extension thereof, or onto an identical circumference with its center on the axis, a slit which is disposed at the focus point, and an energy analyzer whose object point lies at the focus point. The charged-particle beam correction arrangement is disposed axially symmetrically in the vicinity of the path of the charged particles between the sample and the slit to correct a deformation in the focusing of the charged-particle beam. BACKGROUND OF THE INVENTIONThe present invention relates to a charged-particle analyzer.For the analysis of a feeble electron beam of low energy, such as Auger electrons and photoelectrons in the surface analysis, it is important to efficiently utilize the electrons emitted from a sample. Accordingly, it is necessary that the accepted solid angle (= the solid angle of electron rays entering an analyzing system/the entire solid angle of electron rays emitted from a sample) be wide.As an optimum structure based on such requirement, an analyzing equipment shown in FIG. 1 has been proposed (Japanese Patent Application No. 12283/76). The feature of this equipment is that a deflecting system consisting of two inner and outer electrodes is arranged axially symmetrically around a sample and that signals emitted from the sample and entering the deflecting system are caused to depict a greatly curved track, whereupon they are focused on the center axis of the equipment or a circumference with its center on the axis again. Further, at a stage succeeding the deflecting system, an analyzing system is arranged in such electrooptical relation that the point of the above focusing is considered as the emission point of the signals. Thus, an energy analysis of photo-electrons, Auger electrons, etc. is carried out.FIG. 1 is a constructional view showing the prior art equipment described above including an electron gun. An electron beam 2 produced from the electron gun is focused by a focusing lens 3, and irradiates a sample 4. Charged particles 5, such as Auger electrons, are emitted from the irradiated point P of the sample 4 in substantially the COS-Law spacial distribution. Among the charged particles, rays of electrons are surrounded by two cones whose vertexes are the point P and whose half vertical angles are .theta. + a and .theta. - a, which rays enter between deflecting electrodes 6 and 7. The deflecting electrodes 6 and 7 are disposed axially symmetrically and are L-shaped in section so as to form a double electrode system.Within the deflecting electrode system, the rays of electrons depict greatly curved tracks owing to a deflecting electric field. Further, the rays of electrons have the tracks corrected by an auxiliary electrode 8 and are converged in the first order of the angle a onto a slit 9 situated at a stage succeeding the auxiliary electrode 8. After passing through the slit 9, the rays travel so as to cross on the axis of the equipment. They are subjected then to the energy analysis by a cylindrical mirror type analyzer 10 arranged after the slit 9 with only electrons having certain specific energy being converged onto a detection slit 9' which is placed on the axis, signals being detected by a detector 11 which is disposed behind the detecting slit 9'.The energy analysis of the charged particles 5 emitted from the sample becomes possible in such a way that voltages to be applied to the deflecting electrodes 6, 7, the auxiliary electrode 8, and the electrode of the cylindrical mirror type analyzer 10 are appropriately selected with divider resistances 12, 13 and 14 connected to a power source 20 and then scanned at a fixed ratio.When it is desired to have a high sensitivity of analysis utilizing the aforedescribed analyzing system, the signal obtained from the sample must of course be received at the widest possible accepted solid angle as stated above. Additionally, the loss of signal between the deflecting system and the slit must be confined to a minimum. To this end, it is necessary that the rays of electrons at the time when they pass through the slit 9 have the best possible circularity so as to reduce the amount to which the rays are intercepted by the end face of the slit 9.In this respect, a glass plate coated with a phosphor was placed at the position of the slit 9 in the aforedescribed equipment, and the shape of the rays of electrons focused on this point was directly observed. It was determined that the rays of electrons were not truly circular, but rather often presented a ring shape deformed in one direction or a shape having a long tail at a certain part.The cause therefor was studied, and has been revealed to be a kind of electrooptical astigmatism attributed to the fact that the electrodes were not fixed coaxially or that the parallelism of each electrode was not maintained. Therefore, in constructing the equipment, careful attention was pair to the finish precision of the electrodes and the assembling was carefully executed. While considerable improvements were thus effected, it has been determined that a satisfactory result has not been attained.SUMMARY OF THE INVENTIONAn object of the present invention is to provide an improved charged-particle analyzer.Another object of the present invention is to provide a charged-particle analyzer which makes it possible to set a wide accepted solid angle for signals and to attach a sample of large area without greatly decreasing the accepted solid angle.These and other objects are attained by a charged-particle analyzer having an irradiation device for irradiating a sample with a primary beam, a deflecting electrode system for focusing charged particles emitted from the sample onto the center axis of the primary beam or an extension thereof or onto an identical circumference with its center located on the axis or the extension, a slit which is disposed at the focus point of the charged particles, an energy analyzing system whose object point lies at the focus point, a detector for detecting the charged particles analyzed by the energy analyzing system, and a charged-particle beam correction arrangement disposed axially symmetrically in the vicinity of the path of the charged particles between the sample and the slit.