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    • 1. 发明授权
    • Gallium phosphide luminescent device
    • 磷化镓发光装置
    • US06479312B1
    • 2002-11-12
    • US09869266
    • 2001-06-27
    • Masato YamadaSusumu HiguchiKousei YumotoMakoto KawasakiKen Aihara
    • Masato YamadaSusumu HiguchiKousei YumotoMakoto KawasakiKen Aihara
    • H01L2100
    • H01L33/025H01L33/30Y10S438/918
    • By providing a nitrogen-doped low carrier concentration layer 13 having both of a donor concentration and an acceptor concentration controlled below 1×1016/cm3 at a p-n junction portion between an n-type GaP layer 12 and a p-type GaP layer 14, the luminance of the GaP light emitting device can be improved by as much as 20 to 30% over the conventional one. Suppressing the donor concentration and the acceptor concentration in the low carrier concentration layer 13 below 1×1016/cm3 inevitably gives a carrier concentration, which is expressed as a difference between both concentrations, lower than 1×1016/cm3 accordingly. The emission efficiency upon injection of electrons or holes can be improved by suppressing the concentration of the donor which serves as non-emissive center below 1×1016/cm3 to thereby extend the carrier lifetime; and by concomitantly suppressing the carrier concentration at a level significantly lower than that in the adjacent layers 12 and 14.
    • 通过在n型GaP层12和p型GaP层14之间的pn结部分提供具有供体浓度和受主浓度两者的氮掺杂低载流子浓度层13,其控制在1×1016 / cm3以下, 的GaP发光器件可以比传统的发光器件提高多达20至30%。 抑制低载体浓度层13中的供体浓度和受体浓度低于1×10 16 / cm 3时,不可避免地会产生一个载流子浓度,其表示为两个浓度之间的差值,相应地低于1×10 16 / cm 3。 通过抑制作为不发光中心的供体的浓度低于1×10 16 / cm 3,可以提高注入电子或空穴的发射效率,从而延长载体寿命; 并且通过伴随地将载流子浓度抑制在显着低于相邻层12和14中的水平。
    • 4. 发明授权
    • Liquid phase epitaxial growth method for carrying out the same
    • 液相外延生长法进行相同
    • US5603761A
    • 1997-02-18
    • US510861
    • 1995-08-03
    • Munehisa YanagisawaSusumu HiguchiYuji YoshidaMasahiko Saito
    • Munehisa YanagisawaSusumu HiguchiYuji YoshidaMasahiko Saito
    • C30B19/00C30B19/06C30B29/44C30B35/00H01L21/208
    • C30B19/064Y10T117/10Y10T117/1024
    • In an improved liquid phase epitaxial growth method and apparatus in which a plurality of substrates are placed in a deposition chamber having at least one first vent hole; a solution for liquid phase growth is held in a solution chamber having at least one second vent hole and at least two sub-chambers separated by a partition plate and communicated with each other via a communicating portion; and before the substrates and the solution for liquid phase growth are brought into contact with each other, the deposition chamber and the solution chamber are revolved for causing the solution for liquid phase growth to move through the communicating portion so as to increase and decrease the volume of space portions of the respective sub-chambers and thereby replacement of a heat-treatment gas in the deposition chamber and the solution chamber is undertaken to achieve heat treatment. With this heat-treatment, surface oxide films on the substrates and the solution are removed, thus making it possible to obtain a liquid phase epitaxial layer with excellent qualities.
    • 在改进的液相外延生长方法和装置中,其中多个基板被放置在具有至少一个第一通气孔的沉积室中; 用于液相生长的溶液被保持在具有至少一个第二通气孔的溶液室中,并且至少两个分隔开的隔板通过连通部分彼此连通; 在基板和液相生长用溶液彼此接触之前,使沉积室和溶液室旋转,使液相生长溶液移动通过连通部,从而增大和减小体积 的各个副室的空间部分,由此更换沉积室和溶液室中的热处理气体以实现热处理。 通过这种热处理,去除了基板上的表面氧化膜和溶液,从而可以获得具有优良品质的液相外延层。